Title:
CONVEYANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/161376
Kind Code:
A1
Abstract:
This conveyance device, which is for causing the floatation of a subject by means of a gas and conveying the subject in a first direction, is provided with: a floatation unit that causes the floatation of the subject by means of imparting pressure to the subject by jetting a gas; a conveyance unit configured in a manner so as to contact the subject, driving the subject in a first direction, and provided with a plurality of rollers, which can rotate in the first direction and that are arrayed in the first direction, and/or a belt that is an endless belt extending in a first direction and provided with a plurality of protrusions projecting in a manner so as to contact the subject; a cover that covers the conveyance unit or extends in parallel neighboring the conveyance unit, permits the protrusion of only the top ends of each of the plurality of protrusions or plurality of rollers, and is provided with a surface parallel to the bottom surface of the subject; and a suction unit that imparts negative pressure to the cover interior and causes the subject to contact the conveyance unit.
Inventors:
WANG PENG (JP)
WADA YOSHIYUKI (JP)
MATSUO KENGO (JP)
WADA YOSHIYUKI (JP)
MATSUO KENGO (JP)
Application Number:
PCT/JP2013/054989
Publication Date:
October 31, 2013
Filing Date:
February 26, 2013
Export Citation:
Assignee:
IHI CORP (JP)
International Classes:
B65G49/06; H01L21/677
Domestic Patent References:
| WO2008044706A1 | 2008-04-17 | |||
| WO2004100254A1 | 2004-11-18 |
Foreign References:
| JP2011184186A | 2011-09-22 | |||
| JP2001196438A | 2001-07-19 | |||
| JP2004244186A | 2004-09-02 | |||
| JP2007008644A | 2007-01-18 |
Attorney, Agent or Firm:
MIYOSHI, Hidekazu et al. (JP)
Hidekazu Miyoshi (JP)
Hidekazu Miyoshi (JP)
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