Title:
CONVEYANCE MECHANISM, VACUUM TREATMENT APPARATUS USING SAME, AND METHOD FOR PREPARING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/121632
Kind Code:
A1
Abstract:
Disclosed is a conveyance mechanism which is capable of stably conveying even a large substrate and is easy to adjust.
Installed between a pair of supports (10, 10) are a plurality of wires (3) which are equally distant from the center of the rotation movement of the supports (10, 10). The substrate (20) is conveyed forward by the movement of the wires (3) with the rotation movement of the supports (10, 10).
Inventors:
UNEHARA, Yoshifumi (5-1 Kurigi 2-chome, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2010/002261
Publication Date:
October 06, 2011
Filing Date:
March 29, 2010
Export Citation:
Assignee:
CANON ANELVA CORPORATION (5-1 Kurigi 2-chome, Asao-ku Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 Kanagawa, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２丁目５番１号 Kanagawa, 〒2158550, JP)
International Classes:
B65G39/10; B65G49/06; H01L21/677
Attorney, Agent or Firm:
WATANABE, Keisuke et al. (6th Floor, Mitsui Sumitomo Ginko Okachimachi Bldg. 11-4, Taito 4-chome, Taito-k, Tokyo 16, 〒1100016, JP)
Claims:
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