Title:
CONVEYANCE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2013/150859
Kind Code:
A1
Abstract:
A conveyance system (100) is provided with: accommodating shelves (20) which are provided in the vicinity of semiconductor producing devices (60, 62), and which accommodate objects (10) to be conveyed; a stacker crane (30) which carries, on to and off of the accommodating shelves (20), the objects (10) to be conveyed; vehicles (40) for conveying the objects (10) to be conveyed; an ID tag reader (R) which is provided to the stacker crane (30), and which reads ID tags (T) of the objects (10) to be conveyed; and a controller (50) which, in cases when identification information acquired by the ID tag reader (R) is consistent with information included in the conveyance command for the object (10) to be conveyed, controls the stacker crane (30) such that the object (10) to be conveyed is conveyed to a conveyance destination in the conveyance command. At at least one section of the accommodating shelves (20), the objects (10) to be conveyed can be deposited and withdrawn by grippers (44) on the vehicles (40).
More Like This:
Inventors:
YAMAMOTO MAKOTO (JP)
Application Number:
PCT/JP2013/056346
Publication Date:
October 10, 2013
Filing Date:
March 07, 2013
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
B65G1/04; B65G1/00; B65G35/08; B65G49/07; H01L21/677
Foreign References:
| JP2000118607A | 2000-04-25 | |||
| JP2006096427A | 2006-04-13 | |||
| JP4730617B2 | 2011-07-20 | |||
| JP2011116538A | 2011-06-16 | |||
| JPH09315521A | 1997-12-09 | |||
| JP2010058937A | 2010-03-18 | |||
| JP2002179203A | 2002-06-26 |
Other References:
See also references of EP 2835325A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
Download PDF: