Title:
CONVEYING DEVICE AND VACUUM APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/062051
Kind Code:
A1
Abstract:
Provided are technologies wherein an article to be conveyed is reliably held and is conveyed at high speed not only in an environment where the temperature of the article to be conveyed and the ambient atmospheric temperature are relatively low but also in an environment where such temperatures are high, and wherein dust generated during conveyance of the article to be conveyed is reduced as far as possible. A conveying device (50) is provided with an extensible and retractable link mechanism (20) comprising a plurality of arms to which power is transmitted from a drive source, and a mounting section (5) which is connected to the operation tip section of the link mechanism (20) via a third left arm (3L) and a third right arm (3R), and serves to mount a board (10). A downstream area of the mounting section (5) in the direction in which the board (10) is conveyed, is provided with a downstream force applying device (7) which, in conjunction with the operation of the link mechanism (20), abuts the side section of the board (10), thereby applying force to the board (10) in the direction toward the link mechanism (20). An upstream area of the mounting section (5) in the direction in which the board (10) is conveyed, is provided with an upstream force applying device (9) which, in conjunction with the operation of the link mechanism (20), abuts the side section of the board (10), thereby applying force to the board (10) in the direction in which the board (10) is conveyed.
Inventors:
MINAMI, Hirofumi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
Application Number:
JP2010/069413
Publication Date:
May 26, 2011
Filing Date:
November 01, 2010
Export Citation:
Assignee:
ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
International Classes:
B25J15/00; B25J15/08; H01L21/677
Attorney, Agent or Firm:
ABE, Hideki et al. (Toranomonkougyou Bldg, 3F 1-2-18, Toranomon, Minato-k, Tokyo 01, 〒1050001, JP)