Title:
CONVEYING HEATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/002800
Kind Code:
A1
Abstract:
Provided is a conveying heating apparatus with which it is possible to prevent generation of waste metal and suppress variations in in-plane temperature distribution of a substrate. This conveying heating apparatus comprises: a heating device which has arrayed therein one or more heating furnaces and which is configured to cause the heating furnaces to blow hot air onto an object to be heated; and a conveyance conveyor which conveys a substrate into the heating device. The conveyance conveyor is provided with: a conveyance chain that comprises opposing link plates, a shaft or roller disposed between the link plates, and an attachment for mounting a substrate thereon; a metal rail which has a U-shaped cross-section formed by contiguously connecting a top surface, an under surface, and a lateral surface, and in which the conveyance chain is disposed in a space between the top surface and the under surface; and a plurality of rod-like underside resin guides which comprise a heat-resistant, non-conductive resin and are inserted in a groove formed in the under surface of the metal rail so as to extend in the conveyance direction and which are brought into contact with the under surface of the shaft or roller.
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Inventors:
HASEGAWA NORIO (JP)
KIMOTO HISASHI (JP)
KIMOTO HISASHI (JP)
Application Number:
PCT/JP2022/025132
Publication Date:
January 26, 2023
Filing Date:
June 23, 2022
Export Citation:
Assignee:
TAMURA SEISAKUSHO KK (JP)
International Classes:
B65G21/22; F27B9/24; F27B9/30; H05K3/34
Foreign References:
| JP2002299812A | 2002-10-11 | |||
| JP2003179342A | 2003-06-27 | |||
| JPH01118091A | 1989-05-10 | |||
| JP2008177590A | 2008-07-31 | |||
| JPH1179349A | 1999-03-23 | |||
| JPH0428477A | 1992-01-31 | |||
| JPH07309417A | 1995-11-28 |
Attorney, Agent or Firm:
SUGIURA PATENT OFFICE et al. (JP)
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