Title:
CONVEYING ROLLER AND SUBSTRATE CONVEYING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/102308
Kind Code:
A1
Abstract:
Disclosed is a conveying roller (100) comprising a hollow shaft (102), a compressor (104) supplying compressed air to one end of the hollow shaft (102), an air discharge aperture (122) which provides one-way openings in a circumferential direction to the outside from within the hollow interior (121) of the hollow shaft (102), and a roller (106) rotatably mounted to the hollow shaft (102) with a gap in the axial direction thereof interposed therebetween.
Inventors:
OKI, Masahiko (())
Application Number:
JP2011/052994
Publication Date:
August 25, 2011
Filing Date:
February 14, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
B65G39/04; B65G49/06; H01L21/677
Attorney, Agent or Firm:
TESHIMA Masaru (Teshima Patent Law Firm, 5F MF MinamiMorimachi Bldg. 2-3-8, Tenjinbashi, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
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