Title:
COOLANT INJECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/064866
Kind Code:
A1
Abstract:
Disclosed is a coolant injection device used in a wire saw apparatus. The present invention relates to a coolant injection device that is designed to inject a coolant through a double pipe in a wire saw apparatus for cutting an ingot into a wafer size to realize uniform cooling, thereby enhancing quality of a wafer. The coolant injection device according to the present invention comprises an inner pipe connected to a coolant supply pipe to make a coolant supplied thereinto and having a discharge hole formed therein for discharging the coolant to the outside, and an outer pipe in which the inner pipe is installed with a space therebetween and including a nozzle which the coolant discharged through the discharge hole is collected and then discharged from.
Inventors:
KANG IN HO (KR)
LEE YOUNG JUN (KR)
JEONG JAE HUN (KR)
OH DAE KYUN (KR)
HAHN YOUNG SIK (KR)
CHOI HYO IL (KR)
KIM NAM KI (KR)
KIM DONG JIN (KR)
BAE DONG WOO (KR)
JUNG SEUNG GU (KR)
LEE BO RAM (KR)
SHIN YONG WON (KR)
LEE YOUNG JUN (KR)
JEONG JAE HUN (KR)
OH DAE KYUN (KR)
HAHN YOUNG SIK (KR)
CHOI HYO IL (KR)
KIM NAM KI (KR)
KIM DONG JIN (KR)
BAE DONG WOO (KR)
JUNG SEUNG GU (KR)
LEE BO RAM (KR)
SHIN YONG WON (KR)
Application Number:
PCT/KR2014/003763
Publication Date:
May 07, 2015
Filing Date:
April 29, 2014
Export Citation:
Assignee:
WOONGJIN ENERGY CO LTD (KR)
International Classes:
B28D7/02; B28D1/08
Foreign References:
| JPH07195358A | 1995-08-01 | |||
| KR100908884B1 | 2009-07-23 | |||
| JP2005021867A | 2005-01-27 |
Attorney, Agent or Firm:
LEEON INTELLECTUAL PROPERTY LAW FIRM (KR)
특허법인 리온 (KR)
특허법인 리온 (KR)
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