Title:
COOLING CONTROL SYSTEM AND WATER-COOLING ROD FOR USE IN AN APPARATUS FOR MANUFACTURING SILICON INGOTS
Document Type and Number:
WIPO Patent Application WO/2011/043550
Kind Code:
A2
Abstract:
The present invention relates to a cooling control system and to a water-cooling rod for use in an apparatus for manufacturing silicon ingots. The cooling control system of the present invention comprises: at least two water-cooling rod groups spaced apart from each other outwardly from the center of the lower surface of a crucible-mounting unit; a cooling water supply unit for supplying cooling water to the water-cooling rod groups through a water supply pipe; a valve for opening/shutting the water supply pipe connected between the cooling water supply unit and the water-cooling rod groups; and a valve controller for controlling the opening/shutting operation of the valve in accordance with the temperature of heat sensed by first and second heat-sensing units.
Inventors:
LEE GEUN-TEK (KR)
PARK SUNG-EUN (KR)
PARK JONG-HOON (KR)
PARK SUNG-EUN (KR)
PARK JONG-HOON (KR)
Application Number:
PCT/KR2010/006495
Publication Date:
April 14, 2011
Filing Date:
September 20, 2010
Export Citation:
Assignee:
SEMI MATERIALS CO LTD (KR)
LEE GEUN-TEK (KR)
PARK SUNG-EUN (KR)
PARK JONG-HOON (KR)
LEE GEUN-TEK (KR)
PARK SUNG-EUN (KR)
PARK JONG-HOON (KR)
International Classes:
C30B21/02
Foreign References:
| JPH10182137A | 1998-07-07 | |||
| JP2000290096A | 2000-10-17 | |||
| US6027563A | 2000-02-22 | |||
| JP2007332022A | 2007-12-27 |
Attorney, Agent or Firm:
KIM, SEON-MIN (KR)
김선민 (KR)
김선민 (KR)
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