COOLING DEVICE, ION MICROSCOPE, AND OBSERVATION DEVICE OR INSPECTION DEVICE

Title:

COOLING DEVICE, ION MICROSCOPE, AND OBSERVATION DEVICE OR INSPECTION DEVICE

Document Type and Number:

WIPO Patent Application WO/2013/069410

Kind Code:

A1

Abstract:

The purpose of the present invention pertains to provision of a cooling device that inhibits transmission of vibrations to an object to be cooled, and of an ion microscope and an observation device or an inspection device that utilize this cooling device. Provided are a cooling device, and an ion microscope and an observation device or an inspection device that utilize this cooling device, said cooling device being equipped with: cooling heat conductors (53, 406) which are thermally connected to an object to be cooled which is placed inside a vacuum container and is at least partially cooled at least to a temperature lower than room temperature; heat exchangers (405, 414) which are thermally connected to the cooling heat conductors while mechanically connected directly or indirectly to the vacuum container; a refrigerant circulation circuit which has, on its path, reciprocating pipe arrangements (403, 407, 413, 415) for supplying a refrigerant, which has at least a temperature lower than room temperature in order to cool the object to be cooled, to the heat exchangers and for recovering the refrigerant from the heat exchangers, and a refrigerator (401) for cooling the refrigerant; and flexure-retaining structure mechanisms (500, 508) which are provided between the heat exchangers and the refrigerator on the reciprocating pipe arrangements of the refrigerant circulation circuit and which can bend in two-dimensional or three-dimensional directions.

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Inventors:

SAHO NORIHIDE (JP)
TANAKA HIROYUKI (JP)
ARAI NORIAKI (JP)
SHICHI HIROYASU (JP)
KAWANAMI YOSHIMI (JP)
MATSUDA KAZUYA (JP)

Application Number:

PCT/JP2012/076566

Publication Date:

May 16, 2013

Filing Date:

October 15, 2012

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

H01J37/09; F25B9/14; H01J37/16; H01J37/18; H01J37/28

Domestic Patent References:

WO2011001600A1

2011-01-06

Foreign References:

JP2011525037A	2011-09-08
JP2007003397A	2007-01-11
JPH095498A	1997-01-10
JP2006059513A	2006-03-02

Attorney, Agent or Firm:

INOUE Manabu et al. (JP)
Manabu Inoue (JP)

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Claims:

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