Title:
COPPER THERMAL RESISTANCE THIN FILM TEMPERATURE SENSOR CHIP, AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2016/138840
Kind Code:
A1
Abstract:
A copper thermal resistance thin film temperature sensor chip, comprising a substrate (3), a temperature sensor, and two electrode plates (1, 2), the temperature sensor being arranged on the substrate (3) and including a plurality of electrically connected resistance elements (4), a portion of the resistance elements forming a resistance adjustment circuit (5). An integrated circuit element is formed by thin film technology deposition, the components of the integrated circuit element being: a seed layer, a copper thermal resistance thin film layer above the seed layer, and a passivation protective layer on the copper thermal resistance thin film layer, the thermosensitive resistance layer of the structure being made into a series of thermosensitive resistance wires via a semiconductor manufacturing technique and process to form the temperature sensor, the resistance adjustment circuit (5) being arranged on the temperature sensor to accurately adjust a resistance value. The preparation method for the sensor chip comprises depositing a thin film on a surface of the substrate, and obtaining the final sensor chip via processes such as magnetron sputtering, patterning, peeling and etching. The sensor chip has advantages such as high impedance, good thermal stability, high linearity and low costs.
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Inventors:
XUE SONGSHENG (CN)
SHEN WEIFENG (CN)
FENG LIXIAN (CN)
SHEN WEIFENG (CN)
FENG LIXIAN (CN)
Application Number:
PCT/CN2016/074799
Publication Date:
September 09, 2016
Filing Date:
February 29, 2016
Export Citation:
Assignee:
MULTIDIMENSION TECHNOLOGY CO LTD (CN)
International Classes:
G01K7/18
Foreign References:
| CN104807554A | 2015-07-29 | |||
| CN204535878U | 2015-08-05 | |||
| RU2065143C1 | 1996-08-10 | |||
| CN104034454A | 2014-09-10 | |||
| RU2513654C2 | 2014-04-20 | |||
| CN203940940U | 2014-11-12 | |||
| CN86200693U | 1986-09-17 | |||
| JPS5763429A | 1982-04-16 |
Other References:
See also references of EP 3267165A4
Attorney, Agent or Firm:
SCIHEAD PATENT AGENT CO., LTD (CN)
广州三环专利代理有限公司 (CN)
广州三环专利代理有限公司 (CN)
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