Title:
COPPER THIN FILM SUBSTRATE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2018/043766
Kind Code:
A1
Abstract:
The present invention relates to a copper thin film substrate and a method for manufacturing same and, more specifically, to a copper thin film substrate comprising: a substrate; and a copper thin film formed on the substrate and comprising copper (Cu) or a copper alloy, wherein the ratio of a plane (111) of the copper thin film to the entire crystalline plane decreases as the thickness of the copper thin film increases and I (111)/I (200) of the copper thin film exceeds 17. The copper thin film substrate, according to the present invention, enables a copper thin film to be grown into a continuous two-dimensional thin film from the beginning of the growth and have excellent light transmittance and conductivity.
Inventors:
YUN JUNG HEUM (KR)
LEE GUN HWAN (KR)
LEE SUNG HUN (KR)
ZHAO GUO QING (KR)
LEE GUN HWAN (KR)
LEE SUNG HUN (KR)
ZHAO GUO QING (KR)
Application Number:
PCT/KR2016/009613
Publication Date:
March 08, 2018
Filing Date:
August 30, 2016
Export Citation:
Assignee:
KOREA INST MACH & MATERIALS (KR)
International Classes:
C23C14/20; C23C14/00; C23C14/02; C23C14/06; C23C14/18; C23C14/22; C23C14/54; C23C14/58
Foreign References:
| US20150044871A1 | 2015-02-12 | |||
| KR20130125663A | 2013-11-19 | |||
| KR20130118362A | 2013-10-29 | |||
| US20050121320A1 | 2005-06-09 | |||
| KR19980070382A | 1998-10-26 |
Other References:
ZHAO, G.: "Stable ultrathin partially oxidized copper film electrode for highly efficient flexible solar cells", NATURE COMMUNICATIONS, vol. 6, no. 8830, 5 November 2015 (2015-11-05), pages 1 - 8, XP055605194, DOI: 10.1038/ncomms9830
ZHAO, G.: "Bendable solar cells from stable, flexible, and transparent conducting electrodes fabricated using a nitrogen-doped ultrathin copper film", ADVANCED FUNCTIONAL MATERIALS, vol. 26, no. 23, 13 April 2016 (2016-04-13), pages 4180 - 4191, XP055605196, DOI: 10.1002/adfm.201600392
YUN, J.: "Flexible solar cells from flexible transparent conducting electrodes fabricated using an ultrathin continuous metal film", INTERNATIONAL UNION OF MATERIALS RESEARCH SOCIETIES-INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS(IUMRS-ICEM) 2016, 6 July 2016 (2016-07-06)
ZHAO, G.: "Bendable solar cells from stable, flexible, and transparent conducting electrodes fabricated using a nitrogen-doped ultrathin copper film", ADVANCED FUNCTIONAL MATERIALS, vol. 26, no. 23, 13 April 2016 (2016-04-13), pages 4180 - 4191, XP055605196, DOI: 10.1002/adfm.201600392
YUN, J.: "Flexible solar cells from flexible transparent conducting electrodes fabricated using an ultrathin continuous metal film", INTERNATIONAL UNION OF MATERIALS RESEARCH SOCIETIES-INTERNATIONAL CONFERENCE ON ELECTRONIC MATERIALS(IUMRS-ICEM) 2016, 6 July 2016 (2016-07-06)
Attorney, Agent or Firm:
EZ INTERNATIONAL PATENT & TRADEMARK LAW OFFICE (KR)
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