Title:
CORROSION-RESISTANT MEMBER AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/2008/044555
Kind Code:
A1
Abstract:
Disclosed is a corrosion-resistant member which is high in acid resistance, plasma resistance and hydrophilicity. Also disclosed is a method for producing such a corrosion-resistant member. A corrosion-resistant member having high acid resistance, plasma resistance and hydrophilicity is obtained by surface-treating an object member (such as ceramics and metals) by spraying a superheated water vapor at a temperature of 300-1000˚C. The corrosion-resistant member may be a member which is in contact with a processing space within a vapor-phase surface treatment apparatus (such as a chamber) for surface-treating a base material by a vapor-phase process such as PVD, CVD or dry etching.
Inventors:
KOBAYASHI TOSHIO (JP)
MORIKAWA YOSHIMI (JP)
TAKAYANAGI KOICHIRO (JP)
MORIKAWA YOSHIMI (JP)
TAKAYANAGI KOICHIRO (JP)
Application Number:
PCT/JP2007/069312
Publication Date:
April 17, 2008
Filing Date:
October 02, 2007
Export Citation:
Assignee:
ASAHI TECH CO LTD (JP)
KOBAYASHI TOSHIO (JP)
MORIKAWA YOSHIMI (JP)
TAKAYANAGI KOICHIRO (JP)
KOBAYASHI TOSHIO (JP)
MORIKAWA YOSHIMI (JP)
TAKAYANAGI KOICHIRO (JP)
International Classes:
C23C26/00; C03C23/00; C23C28/04; C25D11/18
Foreign References:
| JPH08140921A | 1996-06-04 | |||
| JP2004292887A | 2004-10-21 | |||
| JP2005029891A | 2005-02-03 |
Attorney, Agent or Firm:
KUWATA, Mitsuo (6th Floor Minato Umeda Building,3-17, Nishitemma 6-chome,Kita-ku, Osaka-shi, Osaka 47, JP)
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