COUPLING LIGHT OF LIGHT EMITTING RESONATOR TO WAVEGUIDE

COPYRIGHT NOTICE

[0001] A portion of the disclosure of this patent document contains material which is subject to copyright or mask work protection. The copyright or mask work owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyright or mask work rights whatsoever.

CROSS-REFERENCE TO CO-PENDING APPLICATIONS

[0002] The present invention is related to and claims priority from U.S.

Application No. 11/302,471, entitled "Coupled Nano-Resonating Energy Emitting Structures," filed December 14, 2005 [atty. docket 2549-0056], the entire contents of which is incorporated herein by reference (a copy of which is attached as Appendix A and is part of this application). [0003] The present invention is related to the following co-pending U.S. Patent applications, which are all commonly owned with the present application, the entire contents of each of which are incorporated herein by reference:

. (1) U.S. Patent Application No. 11/238,991 [atty. docket 2549-0003], filed September 30, 2005, entitled "Ultra-Small Resonating Charged Particle Beam Modulator";

(2) U.S. Patent Application No. 10/917,511 , filed on August 13, 2004, entitled "Patterning Thin Metal Film by Dry Reactive Ion Etching";

(3) U.S. Application No. 11/203,407, filed on August 15, 2005, entitled "Method Of Patterning Ultra-Small Structures";

(4) U.S. Application No. 11/243,476 [Atty. Docket 2549-0058], filed on October 5, 2005, entitled "Structures And Methods For Coupling Energy From An Electromagnetic Wave";

(5) U.S. Application No. 11/243,477 [Atty. Docket 2549-0059], filed on October 5, 2005, entitled "Electron beam induced resonance,"

(6) U.S. Application no. 11/325,448, entitled "Selectable Frequency Light Emitter from Single Metal Layer," filed January 5, 2006 [Atty. Docket 2549- 0060];

(7) U.S. Application No. 11/325,432, entitled, "Matrix Array Display," filed January 5, 2006 [Atty. Docket 2549-0021];

(8) U.S. Application No. 11/410,924, entitled, "Selectable Frequency EMR Emitter," filed April 26, 2006 [Atty. Docket 2549-0010];

(9) U.S. Application No. 11/349,963, filed February 9, 2006, entitled "Method And Structure For Coupling Two Microcircuits," [Atty. Docket 2549-0037],

FIELD OF THE DISCLOSURE

[0004] This relates to electromagnetic radiation devices, and, more particularly, to coupling output from light-emitting structures.

INTRODUCTION

[0005] Various light-emitting resonator structures have been disclosed, e.g., in the related applications listed above. For example, U.S. Application No. 11/410,924, entitled, "Selectable Frequency EMR Emitter," filed April 26, 2006 [Atty. Docket 2549-0010], which has been fully incorporated herein by reference, describes various optical transmitters including, in some embodiments, an optical switch using plural resonant structures emitting electromagnetic radiation resonant (EMR), where the resonant structures are excited by a charged particle source such as an electron beam. [0006] It is desirable to couple such produced EMR into a waveguide, thereby allowing the light to be directed along a specific path.

BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The following description, given with respect to the attached drawings, may be better understood with reference to the non-limiting examples of the drawings, wherein:

[0008] FIGS. 1-3 show structures for coupling emitted light, according to embodiments of the present invention.

THE PRESENTLY PREFERRED EXEMPLARY EMBODIMENTS

[0009] Various exemplary EMR-emitting micro-resonant structures have been described in the related applications. For example, U.S. Application No. 11/410,924, (described more fully above, and incorporated herein by reference) entitled, "Selectable Frequency EMR Emitter," [Atty. Docket 2549-0010] describes various exemplary light- emitting micro-resonant structures. The structures disclosed therein can emit light (such as infrared light, visible light or ultraviolet light or any other electromagnetic radiation (EMR) at a wide range of possible frequencies, and often at a frequency higher than that of microwave). The EMR is emitted when the resonant structure is exposed to a beam of charged particles ejected from or emitted by a source of charged particles. The source may be controlled by applying a signal on a data input. The charged particle beam can include ions (positive or negative), electrons, protons and the like. The beam may be produced by any source, including, e.g., without limitation an ion gun, a thermionic filament, a tungsten filament, a cathode, a field-emission cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer and the like.

[0010] It is sometimes desirable to couple the emitted light so as to direct it to some other location. For example, a communications medium (e.g., a fiber optic cable) may be provided in close proximity to the resonant structures such that light emitted from the resonant structures is directed in the direction of a receiver, as is illustrated, e.g., in figure 21 of U.S. Application No. 11/410,924 [Atty. Docket 2549-0010]. [0011] Fig. 1 shows a typical light-emitting device 200 according to embodiments of the present invention. The device 200 includes at least one element 202 formed on a substrate 204 (such as a semiconductor substrate or a circuit board). The element 202 is made up of at least one resonant structure that emits light (such as infrared light, visible light or ultraviolet light or any other electromagnetic radiation (EMR) 206 at a wide

range of possible frequencies, and often at a frequency higher than that of microwave). The EMR 206 is emitted when the resonant structure is exposed to a beam 208 of charged particles ejected from or emitted by a source of charged particles 210. The charged . particle beam can include ions (positive or negative), electrons, protons and the like. The beam may be produced by any source, including, e.g., without limitation an ion gun, a tungsten filament, a cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer. [00121 The devices described produce electromagnetic radiation by the excitation of ultra-small resonant structures. The resonant excitation in the device described is induced by electromagnetic interaction which is caused, e.g., by the passing of a charged particle beam in close proximity to the device.

[0013] Such a device as represented in Fig..1 may be made, e.g., using techniques such as described in U.S. Patent Application No. 10/917,511, entitled "Patterning Thin Metal Film by Dry Reactive Ion Etching" and/or U.S. Application No. 11/203,407, entitled "Method Of Patterning Ultra-Small Structures," both of which have been incorporated herein by reference. The element 202 may comprise any number of resonant microstructures constructed and adapted to produce EMR, e.g., as described above and/or in U.S. Application no. 11/325,448, entitled "Selectable Frequency Light Emitter from Single Metal Layer," filed January 5, 2006 [Atty. Docket 2549-0060], U.S. Application No. 11/325,432, entitled, "Matrix Array Display," filed January 5, 2006, and U.S. Application No. 11/243,476 [Atty. Docket 2549-0058], filed on October 5, 2005, entitled "Structures And Methods For Coupling Energy From An Electromagnetic Wave"; U.S. Application No. 11/243,477 [Atty. Docket 2549-0059], filed on October 5, 2005, entitled "Electron beam induced resonance;" and U.S. Application No. 11/302,471, entitled "Coupled Nano-Resonating Energy Emitting Structures," filed December 14, 2005 [atty. docket 2549-0056]. ^{' '}

[0014] The electromagnetic radiation produced by the nano-resonating structure

202 may be coupled to an electro-magnetic wave via a waveguide conduit 212 positioned

in the proximity of nano-resonating structure 202. The waveguide conduit may be, for example, an optical fiber or the like.

[0015] The actual positioning of a particular waveguide conduit will depend, at least in part, on the form and type particular nano-resonating structure 202. Different structures will emit light at different angles relative to the surface of the substrate 204, and relative to the various components of the structure 202. In general, as shown, e.g., in

Fig. 2, light is emitted in a conical volume 214, and the waveguide conduit 212 should be positioned within that volume, preferably centered within that volume.

[0016] In some cases it may be difficult to position the waveguide conduit 212 in an optimal or even suitable location. For example, depending on the structure 202, the angle of the emitted light relative to the surface of the substrate 204 and/or the angle of the conical region may make positioning of the waveguide conduit difficult or even impossible. In such cases, additional reflective structure be provided, e.g., on the substrate, in order to direct the emitted light to the waveguide. In addition to reflecting the emitted light, the reflective structure may be used to narrow or widen the beam. For example, as shown in Fig. 3, a reflective structure 216 is positioned on the surface of the substrate 204 to redirect the emitted light E (as light Er) to the waveguide conduit. Note that the conical volume 218 may have a wider or narrower angle than that of the light emitted from the structure 202. Reflective structure 216 may comprise on or more reflective elements formed on the substrate 204 and/or in a package containing the substrate.

[0017] Those skilled in the art will immediately understand that more than one reflective structure 216 may be provided. Further, more than one nano-resonant structure

202 may emit light into the same reflective structure. In this manner, a single waveguide conduit may be provided for multiple nano-resonant structures.

[0018] It is preferable to position the waveguide conduit 212 to capture as much of the emitted light as possible.

[0019] In some embodiments of the present invention, the nano-resonating structure 202 and the waveguide conduit 212 may be integrated into a single microchip.

[0020] As used throughout this and the related applications, the word "light"

(unless otherwise specifically limited) refers generally to any electromagnetic radiation (EMR) at a wide range of possible frequencies, regardless of whether it is visible to the human eye, including, e.g., infrared light, visible light or ultraviolet light. [0021] While certain configurations of structures have been illustrated for the purposes of presenting the basic structures of the present invention, one of ordinary skill in the art will appreciate that other variations are possible which would still fall within the scope of the appended claims. While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

APPENDIX A

COUPLED NANO-RESONATϊNG ENERGY EMITTING STRUCTURES

COPYRIGHT NOTICE

[0001] A portion of the disclosure of this patent document contains material which is subject to copyright or mask work protection. The copyright or mask work owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyright or mask work rights whatsoever.

CROSS-REFERENCE TO CO-PENDING APPLICATIONS

[0002] The present invention is related to and claims priority from the following co-pending U.S. Patent applications: (1) U.S. Patent Application No. 11/238,991, [arty, docket 2549-0003], entitled "Ultra-Small Resonating Charged Particle Beam Modulator," and filed September 30, 2005, and (2) U.S. Application No. 11/243,477 [Any. docket 2549-0059], entitled "Electron beam induced resonance," filed on October 5, 2005, the entire contents of both of which are incorporated-herein by reference.

[0003] • The present invention is related to the following co-pending U.S. Patent applications: (1) U.S. Patent Application No. 10/917,511, filed on August 13, 2004, entitled "Patterning Thin Metal Film by Dry Reactive Ion Etching," and to U.S. Application No. 11/203,407, filed on August 15, 2005, entitled "Method Of Patterning Ultra-Small Structures," (2) U.S. Application No. 11/243,476 [Arty. Docket 2549-0058], entitled "Structures And Methods For Coupling Energy From An Electromagnetic Wave," filed on October 5, 2005; which are both commonly owned with the present application, the entire contents of each of which are incorporated herein by reference.

FIELD OF THE DISCLOSURE

[0004] This disclosure relates to electromagnetic radiation devices, and particularly to ultra-small resonant structures.

INTRODUCTION

[0005] A multitude of applications exist for electromagnetic radiating devices. A few such devices emit radiation at frequencies spanning the infrared, visible, and ultra-violet spectrums. A subgroup (being the majority) of such devices are constructed using semiconductor-based technologies (light emitting diodes and the like), and are considered small (on the order of millimeters in dimension).

[0006] The devices of the present invention produce electromagnetic radiation by the excitation of ultra-small resonant structures. The resonant excitation in a device according to the invention is induced by electromagnetic interaction which is caused, e.g., by the passing of a charged particle beam in close proximity to the device. The charged particle beam can include ions (positive or negative), electrons, protons and the like. The beam may be produced by any source, including, e.g., without limitation an ion gun, a tungsten filament, a cathode, a planar vacuum triode, an electron-impact iom ^' zer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.

GLOSSARY

[0007] As used throughout this document:

[0008] The phrase "ultra-small resonant structure" shall mean any structure of any material, type or microscopic size that by its characteristics causes electrons to resonate at a frequency in excess of the microwave frequency.

[0009] The term "ultra-small" within the phrase "ultra-small resonant structure" shall mean microscopic structural dimensions and shall include

so-called "micro" structures, "nano" structures, or any other very small structures that will produce resonance at frequencies in excess of microwave frequencies.

DESCRIPTION Of PRESENTLY PREFERRED EXAMPLES OF THE INVENTION

BRIEF PESCRIPTION OF FIGURES

[0010] The invention is better understood by reading the following detailed description with reference to the accompanying drawings in which:

[0011] Figs.1-2 are schematic views of coupled nano-resonating energy emitting structures according to embodiments of the present invention;

[0012] Figs. 3(a)-3(o) show various coupled nano-resonating energy emitting structures according to embodiments of the present invention; and

[0013] Figs. 4(a)-4(d), 5(a)-5(e) and 6(a)-6(d) are microscopic photographs of series of exemplary structures according to embodiments of the present invention.

DESCRIPTION

[0014] As shown in Fig. 1, a nano-resonating energy emitting structure 100 according to embodiments of the present invention consists of a number of component substructures 102-1, 102-2, 102-3, . . . , 102-w. A source 104 of charged particles produces abeam 106 consisting of one or more charged particles. The charged particles of beam 106 may consist of electrons, protons or ions.

[0015] The charged particle beam can include ions (positive or negative), electrons, proton ^' s and the like. Many well-known means and methods exist to produce a charged particle beam. The beam may be produced by any source, including, e.g., without limitation an ion gun, a tungsten filament, a cathode, a planar vacuum triode, an electron-impact ionizer, a laser ionizer, a chemical ionizer, a thermal ionizer, an ion-impact ionizer.

[0016] In operation, the beam 106 passes in proximity to nano-resonating structure 100, causing the component substructures 102-1, 102-2, 102-3, . . . , 102-« of the structure to resonate and thereby to produce electromagnetic radiation (denoted E in the drawing). Electromagnetic radiation may be coupled out of nano-resonating structure 100, .e.g., to some other structure. For example, the electromagnetic radiation may be coupled to an electro-magnetic wave via a waveguide conduit 108 positioned in the proximity of nano-resonating structure 100. The waveguide conduit may be, for example, an optical fiber or the like.

[0017] Fig.2 depicts alternate embodiments of the present invention in which nano-resonant structure 200 consists of a number of component substructures 202-1, 202-2, 202-3, . . . , 202-«, (collectively substructures 202) along with component substructures 204-1, 204-2, 204-3, . . ., 204-m (collectively substructures 204). The two collections of substructures 202, 204 are positioned opposite each other such that a particle beam 106 can pass between them. Although the individual substructures 202 are each shown opposite a corresponding substructure 204, there is no requirement that they be directly opposite each other, and, in some embodiments the two collections of substructures may be offset from each other. Further, although the two collections or rows of substructures 202, 204 are shown in the drawing to be parallel or substantially parallel to each other, there is also no requirement that they be in rows or that they be in parallel rows.

[0018] In operation, when the beam 106 passes in proximity to the substructures of nano-resonant structure 100 or nano-r©sonant structure 200, there is coupling (e.g., capacitive coupling) between various of the substructures. For example, in the embodiments of the form shown in Fig. 1, each substructure 102-jr, may capacitively couple with at least one adjacent substructure 102-y+i (and possibly substructure 102-j~l. In some embodiments, a substructure may capacitively couple with at least two adjacent substructures. There is no

requirement that the substructure couple with an immediately adjacent substructure. As the magnetic and electric fields extend out to infinity the coupling can occur between any two or more structures. Magnetic coupling may also occur.

[0019] As will be described below; the various substructures that comprise a nano-resonant structure 100, 200, may be formed in different shapes, including C-shaped, rectangular (which includes square shaped and which includes rectangles with rounded corners), semicircular, semi-ovular, or semi-rectangular. The various- substructures may have straight and/or rounded edges and/or corners. Each substructure may be at an angle to the electron beam. The substructures can all be the same shape and size, they can be the same shape and of different sizes as each other, or Of different shapes and / or sizes as each other.

[0020] The nano-resonant structures 100, 200 may be symmetrical or non-symmetrical. There is no requirement that any multiple nano-resonating structures be positioned with any symmetry relating to each other or any other.

[0021] Figs.3(a)-3(o) show various exemplary nano-resonating energy emitting structures according to embodiments of the present invention. The waveguide conduit is omitted from these drawings.

[0022] Fig. 3(a) depicts an embodiments of the present invention in which the- nano-resonant structure 1Q0-A cpmprises substructures that are rectangular shaped blocks positioned spaced apart and adjacent to each other. The blocks may all be substantially the same size and shape, or they may be of different sizes. The blocks may be substantially equally spaced, or the inter-block spacing may vary. In the embodiment shown in the drawing, the blocks are substantially perpendicular to a path 110 of a particle beam. The row of rectangular blocks in Fig. 3(a) form a so-called comb structure.

[0023] Figs. 4(a)-4(d) (Figures 6, 8, 9, 12, respectively, from related U.S.

Application No. 11/243,477) are microscopic photographs of series of exemplary light-emitting comb structures according to embodiments of the present invention as shown in Figs. 1 and 3(a). The various substructures shown in Figs. 4(b)-4(c), e.g., are substantially rectangular, with rounded corners.

[0024] Figs. 3(b)-3(c) depict embodiments of the present invention similar to those shown in Fig. 3(a). However, in the embodiments shown in Figs. 3(b)-3(c), some or all of the various subcomponents 100-B and 100-C are positioned at non-right angles relative a path 110 of a particle beam. As with the embodiments of Fig. 3(a), the substructures 100-B and 100-C! are substantially rectangular shaped blocks positioned spaced apart and adjacent to each other. The blocks may all be substantially the same size and shape, or they may be of different sizes. The blocks may be substantially equally spaced, or the inter-block spacing may vary. The two rows of rectangular blocks in each of Figs.3(b)-3(c) form angled comb structures.

[0025] Fig. 3(d) depicts embodiments of the present invention according to

Fig. 1, in which the nano-resonant structure 100-D consists of a series of rectangular shaped substructures 102-D1, 102-D2, . . ., 102-D _m _i, 102-D _m , and in which immediately adjacent substructures have different sizes and/or shapes, while alternating substructures are substantially the same size and shape. In this exemplary embodiment, the substructures couple with the immediately adjacent substructures as well as with the alternate substructures. Thus, for example, substructure 102-D1 couples with substructures 102-03 and 102-D5, etc. as well as with the immediately adjacent substructure 102-D2.

[0026] Figs. 3(e)-β(g) depict embodiments of the present invention as shown in Fig. 1. In the embodiments shown in Fig. 3(e), the substructures 100-E are ^' substantially semi-circular in shape. In the embodiments of Fig. 3(f), each substructure consists of two open rectangular shapes, and in the embodiments of

Fig. 3(g), each substructure consists of two open rectangular shapes, one within the other. In the exemplary embodiments shown in Figs. 3(e)-3(g), the substructures are open in the direction of a path 110 of a particle beam.

[0027] Fig. 3(h) depicts a nano-resonant structure having two rows of substantially rectangular shaped blocks or posts (denoted 202-H, 204-H). This embodiment corresponds to those of Fig. 2. As with the exemplary embodiments shown in Fig. 3(a), the blocks may all be substantially the same size and shape, or they may be of different sizes. The blocks in each row may be substantially equally spaced, or the inter-block spacing may vary. In the embodiment shown in the drawing, the blocks are substantially perpendicular to a path 110 of a particle beam. Further, in the embodiment shown in the drawing, each of the blocks 202-H is substantially opposite a corresponding one of the blocks 204-H. As explained above with reference to Fig.2, there is no requirement that the blocks 202-H be parallel to the blocks 204-H, nor is there any requirement that each of the blocks 202-H be exactly opposite a corresponding block 204-H. Thus, as shown, e.g., in Fig. 3(i), substructures in the first row, blocks 202-1 are not the same size as the substructures (blocks 204-1) in the second row. Furthermore, in the example shown in Fig. 3(i), the blocks in the second row are not each exactly opposite a corresponding block in the first row, instead they are offset.

[0028] Figs. 5(a)-5(e) (Figures 15, 16, and 18-20, respectively, from related

U.S. Application No. 11/243, 477) are microscopic photographs of series of substantially parallel rows of nano-resonating energy emitting structures according to embodiments of the present invention. As can be seen from the drawings, the structures on the left side of Fig. 5(a) are substantially parallel and substantially symmetric to those on the right side of the photograph. The structures in Fig. 5(b) are substantially parallel and symmetric, although the structures on the left side of the picture are smaller than those on'the right side of the picture and are staggered.

[0029] In. the exemplary structures of Fig. 5(a), the structures on the both sides of the drawing are substantially rectangular in shape, with dimensions of about 200 nm by 71.7 nm ~ 77.2 nm. The two rows of rectangular nano structures are about 62.8 nm apart. The structures in each row are about 100 nm apart, In the exemplary structures of Fig. 5(b), the structures on the both sides of the drawing are also substantially rectangular in shape. The structures in each row are about 53.5 nm apart. The various substructures shown in Figs. 5(b)-5(e), e.g., are substantially rectangular, with rounded corners.

[0030] Fig. 3(j) depicts a nano-resonant structure 200-J having two substantially parallel rows of tilted rectangular shaped substructures (denoted 202-J, 204-J), forming a so-called chevron shaped -nano-resonant structure. The rows are separated so that a particle beam may be emitted to pass between the two rows or in a path above the two rows. Fig. 3(k) depicts two rows of tilted parallel nano-resonating energy emitting structures as in Fig. 3(j), however, in this embodiment the structures 202-K are offset or staggered relative to the structures 204-K.

[0031] Note that for any of these nano-resonant structures shown or described herein, including the nano-resonant structures 200-J and 200-K, in operation the nano-resonant structure may be positioned so that a particle beam passes in either direction along the path shown.

[0032] Figs. 3(l)-3(o) show various other exemplary nano-resonant structures according to embodiments of the present invention.

[0033 J Figs. 6(a)-6(d) (Figures 21 -24, respectively, from related U. S . Patent

Application No. 11/243,477) are microscopic photographs of series of nano-resonating energy emitting structures according to embodiments of the present invention.

[0034] As can be seen from the various drawings and photographs, the nano-resonating structures can be staggered, symmetric, asymmetric, and angled.

MANUFACTURE

[0035] Nano-resonating structures 100, 200 can be constructed with many types of materials. Examples of suitable fabrication materials include silver, high conductivity metals, and high temperature superconducting materials. The material may-be opaque or semi-transparent, In the above-identified ^" patent applications, ultra-small structures for producing electromagnetic radiation are disclosed, and methods of making the same. In at least one embodiment, the resonant structures of the present invention are made from at least one layer of metal (e.g., silver, gold, aluminum, platinum or copper or alloys made with such metals); however, multiple layers and non-metallic structures (e.g., carbon nanotubes and high temperature superconductors) can be utilized, as long as the structures are excited by the passage of a charged particle beam. The materials making up the resonant structures may be deposited on a substrate and then ^" etched, electroplated, or otherwise processed to create a number of individual resonant elements. The material need not even be a contiguous layer, but can be a series of resonant elements individually present on a substrate. The materials making up the resonant elements can be produced by a variety of methods, such as by pulsed-plating, depositing or etching. Preferred methods for doing so are described jn co-pending U.S. Application No. 10/917,571, filed on August 13, 2004, entitled "Patterning Thin Metal Film by Dry Reactive ^' lon Etching," and in U.S. Application No. 11/203,407, filed on August 15, 2005, entitled "Method Of Patterning Ultra-Small Structures," both of which are commonly owned at the time of filing, and the entire contents of each of which are incorporated herein by reference.

[0036] Various photographs show exemplary dimensions for the structures and their respective spacing. Those skilled in the art will realize that these

dimensions are merely exemplary and are not intended to limit the scope of the invention in any way. While the invention is not to be limited -by the dimensions and spacing of the various nanα-resonant structures, the dimensions and relative positions of various exemplary nano-resόnant structures according to embodiments of the present invention can be seen in the various photographs of Figs. 4(a)-4(d), 5(a)-5(e), and 6(a)-6(d).

[0037] While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims,