CROSS REFERENCE TO OTHER APPLICATIONS

[0001] This application claims priority to U.S. Provisional Patent Application No.

63/353,490 entitled MEMS VIBRATIONAL COOLING SYSTEM HAVING AN INTEGRATED SPOUT AND A GRAPHITE COVER filed June 17, 2022 which is incorporated herein by reference for all purposes.

[0002] This application is a continuation in part of U.S. Patent Application No.

17/475,252 entitled HOOD FOR MEMS-BASED COOLING SYSTEMS filed September 14, 2021, which claims priority to U.S. Provisional Patent Application No. 63/079,926 entitled HOOD FOR MEMS-BASED COOLING SYSTEMS filed September 17, 2020, U.S.

Provisional Patent Application No. 63/220,371 entitled MEMS-BASED ACTIVE COOLING SYSTEMS INCLUDING COOLING CELL ARRANGEMENT, TABS, ANCHOR BONDING, INTEGRATED SPREADER, ADHESIVE, AND POWER MANAGEMENT filed July 09, 2021 and U.S. Provisional Patent Application No. 63/220,862 entitled PIEZOELECTRIC ACTIVE MEMS COOLING SYSTEMS INCLUDING ENGINEERED ACTUATORS, TAILORED ORIFICES, CONTROLLED GAPS, AND STRIP LEVEL MANUFACTURING filed July 12, 2021, all of which are incorporated herein by reference for all purposes.

BACKGROUND OF THE INVENTION

[0003] As computing devices grow in speed and computing power, the heat generated by the computing devices also increases. Various mechanisms have been proposed to address the generation of heat. Active devices, such as fans, may be used to drive air through large computing devices, such as laptop computers or desktop computers. Passive cooling devices, such as heat spreaders, may be used in smaller, mobile computing devices, such as smartphones, virtual reality devices and tablet computers. However, such active and passive devices may be unable to adequately cool both mobile devices such as smartphones and larger devices such as laptops and desktop computers. Moreover, incorporating cooling solutions into computing devices may be challenging. Consequently, additional cooling solutions for computing devices are desired. BRIEF DESCRIPTION OF THE DRAWINGS

[0004] Various embodiments of the invention are disclosed in the following detailed description and the accompanying drawings.

[0005] FIGS. 1A-1G depict an embodiment of an active MEMS cooling system including a centrally anchored cooling element.

[0006] FIGS. 2A-2B depict an embodiment of an active MEMS cooling system including a centrally anchored cooling element.

[0007] FIGS. 3A-3E depict an embodiment of an active MEMS cooling system formed in a tile.

[0008] FIGS. 4A-4B depict an embodiment of an active MEMS heat transfer system including an enhanced cover.

[0009] FIGS. 5A-5B depict an embodiment of an active MEMS heat transfer system including an enhanced cover.

[0010] FIGS. 6A-6B depict embodiments of active MEMS heat transfer systems including enhanced covers.

[0011] FIG. 7 depicts an embodiment of an active MEMS heat transfer system including an enhanced cover having a dust guard.

[0012] FIGS. 8A-8B depict an embodiment of an active MEMS heat transfer system including an enhanced cover having a dust guard.

[0013] FIG. 9 depicts an embodiment of a method for declogging a port of an active cooling mems system.

[0014] FIG. 10 depicts an embodiment of a method for using an active cooling mems system. DETAILED DESCRIPTION

[0015] The invention can be implemented in numerous ways, including as a process; an apparatus; a system; a composition of matter; a computer program product embodied on a computer readable storage medium; and/or a processor, such as a processor configured to execute instructions stored on and/or provided by a memory coupled to the processor. In this specification, these implementations, or any other form that the invention may take, may be referred to as techniques. In general, the order of the steps of disclosed processes may be altered within the scope of the invention. Unless stated otherwise, a component such as a processor or a memory described as being configured to perform a task may be implemented as a general component that is temporarily configured to perform the task at a given time or a specific component that is manufactured to perform the task. As used herein, the term ‘processor’ refers to one or more devices, circuits, and/or processing cores configured to process data, such as computer program instructions.

[0016] A detailed description of one or more embodiments of the invention is provided below along with accompanying figures that illustrate the principles of the invention. The invention is described in connection with such embodiments, but the invention is not limited to any embodiment. The scope of the invention is limited only by the claims and the invention encompasses numerous alternatives, modifications and equivalents. Numerous specific details are set forth in the following description in order to provide a thorough understanding of the invention. These details are provided for the purpose of example and the invention may be practiced according to the claims without some or all of these specific details. For the purpose of clarity, technical material that is known in the technical fields related to the invention has not been described in detail so that the invention is not unnecessarily obscured.

[0017] As semiconductor devices become increasingly powerfill, the heat generated during operations also grows. For example, processors for mobile devices such as smartphones, tablet computers, notebook computers, and virtual reality devices as well as for other computing devices such as servers, can operate at high clock speeds, but produce a significant amount of heat. Because of the quantity of heat produced, processors may run at lull speed only for a relatively short period of time. After this time expires, throttling (e.g. slowing of the processor’s clock speed) occurs. Although throttling can reduce heat generation, it also adversely affects processor speed and, therefore, the performance of devices using the processors. As technology moves to 5G and beyond, this issue is expected to be exacerbated. Further, other components in a computing device may generate heat. Thus, thermal management is increasingly an issue for computing devices.

[0018] Larger computing devices, such as laptop computers, desktop computers, or servers, include active cooling systems. Active cooling systems are those in which an electrical signal is used to drive cooling. An electric fan that has rotating blades is an example of an active cooling system, while a heat sink is an example of a passive cooling system. When energized, the fan’s rotating blades drive air through the larger devices to cool internal components. However, space and other limitations in computing devices limit the use of active cooling systems. Fans are typically too large for mobile and/or thinner devices such as smartphones and tablet or notebook computers. Fans also may have limited efficacy because of the boundary layer of air existing at the surface of the components because they provide a limited airspeed for air flow across the hot surface desired to be cooled, and because they may generate an excessive amount of noise. Fans also have a limited backpressure. Space and power limitations may further restrict the ability to provide electrical connection to active cooling systems. For example, if multiple active cooling systems are used, the connections to the active cooling systems may be required to fit within a small area. In addition, the power consumed by such a cooling system may be desired to be small, particularly for mobile devices. Moreover, space limitations may adversely affect the ability to provide a sufficient flow for cooling computing devices. Consequently, active cooling systems face particular challenges when used in computing devices such as active computing devices. Passive cooling solutions may include components such as a heat spreader and a heat pipe or vapor chamber to transfer heat to a heat exchanger. However, passive cooling solutions may be unable to provide a sufficient amount of heat transfer to remove excessive heat generated. Thus, additional cooling solutions are desired.

[0019] A heat transfer system is described. The heat transfer system includes fluid transfer cells and a thermally conductive cover. The fluid transfer cells vibrationally move a fluid. The thermally conductive cover is enhanced to conduct heat from the fluid transfer cells while avoiding transfer of mechanical energy between the fluid transfer cells.

[0020] In some embodiments, the heat transfer system also includes an electrically insulating cover coupled with the thermally conductive cover. The electrically insulating cover electrically insulates the fluid transfer cells from the thermally conductive cover while avoiding the transfer of the mechanical energy between the fluid transfer cells. The thermally conductive cover may have a bulk modulus of elasticity of at least 10 GPa and a thickness of not more than 200 micrometers. In some embodiments, the fluid transfer cells are thermally coupled to a heat-spreader structure that has a first temperature. In such embodiments, the fluid may have an exit temperature from the fluid transfer cells of not less than the first temperature minus five degrees Celsius. In some embodiments, the thermally conductive cover includes or consists of graphite having a thickness of not more than 110 micrometers.

[0021] The heat transfer system may also include a membrane. The fluid transfer cells include an outer wall having an outer inlet port, an inner wall having an inner inlet port, and a support member disposed laterally on the inner wall such that a flow chamber is between the outer wall and the inner wall. The membrane is supported by the support member along the outer wall. In some embodiments, the fluid transfer cells include actuators. Each actuator has a first vibrational mode and a second vibrational mode. The first vibrational mode is for a first frequency and causes the fluid to enter the outer inlet port. The second vibrational mode is for a second frequency and causes the fluid to be expelled from the outer inlet port.

[0022] A fluid transfer module includes an outer wall, an inner wall, a support member, and a membrane. The outer wall has an outer opening. The inner wall has an inner opening. The support member is disposed laterally on the inner wall such that a flow chamber is defined between the outer wall and the inner wall. The membrane is supported by the support member along the outer wall. In some embodiments, the membrane is substantially flush with the outer wall.

[0023] The support members may include spacers coupled to the inner wall. In some embodiments, the support member includes spacers (e.g. ribs) integrally formed in the inner wall. In some embodiments, the fluid transfer module includes a chamber and an actuator in the chamber. The inner opening provides an inlet to the chamber. The actuator undergoes vibrational motion that drives fluid through the chamber. The actuator may have first and second vibrational modes. The first vibrational mode is for a first frequency and causes the fluid to enter the outer opening. The second vibrational mode is for a second frequency and causes the fluid to be expelled from the outer opening. In some embodiments, a mesh is between the support member and the membrane. The membrane may prevent at least eighty four percent of particles having a characteristic size of 0.3 micrometer through 1.0 micrometers from passing through the membrane. The membrane may also prevent at least ninety nine percent of particles having a characteristic size of greater than 1.0 micrometer from passing through the membrane.

[0024] A fluid transfer module including an inlet port and an actuator is described. The actuator is configured to undergo vibrational motion and has first and second vibrational modes. The first vibrational mode causes a fluid to enter the inlet port. The second vibrational mode expels fluid from the inlet port. Expelling fluid from the inlet port reduces clogging of the inlet port. In some embodiments, the first vibrational mode is a first oscillating mode and the second vibrational mode is a second oscillating mode. The fluid transfer module may also include a support structure. In some such embodiments, the actuator has a first cantilevered region, a second cantilevered region, a central region between the first cantilevered region and the second cantilevered region, and a perimeter. The actuator is supported by the support structure at the central region. At least a portion of the perimeter is unpinned. The first cantilevered region and the second cantilevered region vibrate out-of-phase at a first frequency for the first vibrational mode. The first cantilevered region and the second cantilevered region vibrate in-phase at a second frequency for the second vibrational mode. In some embodiment, the second vibrational mode corresponds to a synthetic flow of the fluid through the inlet port.

[0025] In some embodiments, the fluid transfer module also include an inner wall having an inner port, a support member and a membrane. The support member is disposed laterally on the inner wall such that a flow chamber is defined between the inlet port and the inner port. The membrane is supported by the support member along the inlet port. The second vibrational mode is configured to reduce the clogging of the membrane.

[0026] FIGS. 1A-1G are diagrams depicting an exemplary embodiment of active MEMS cooling system 100 usable with heat-generating structure 102 and including a centrally anchored cooling element 120 or 120’. Although termed a cooling system, MEMS system 100 and analogous systems described herein may be considered heat transfer systems and/or fluid transfer systems. Cooling element 120 is shown in FIGS. 1A-1F and cooling element 120’ is shown in FIG. 1G. For clarity, only certain components are shown. FIGS. 1A-1G are not to scale. FIGS. 1A and IB depict cross-sectional and top views of cooling system 100 in a neutral position. FIGS. 1C-1D depict cooling system 100 during actuation for in-phase vibrational motion. FIGS. IE- IF depict cooling system 100 during actuation for out- of-phase vibrational motion. Although shown as symmetric, cooling system 100 need not be. [0027] Cooling system 100 includes top plate 110 having vent 112 therein, cooling element 120, orifice plate 130 having orifices 132 and cavity 134 therein, support structure (or “anchor”) 160 and chambers 140 and 150 (collectively chamber 140/150) formed therein. Cooling element 120 is supported at its central region by anchor 160. Although termed a cooling element with respect to FIGS 1A-1G, cooling element 120 and analogous elements described herein may also be considered actuators, a vibrating elements, vibrating components, active components, and/or other terms indicating that the element is configured to undergo vibrational motion when activated (or energized) and/or to drive fluid through a system. Regions of cooling element 120 closer to and including portions of the cooling element’s perimeter (e.g. tip 121) vibrate when actuated. In some embodiments, tip 121 of cooling element 120 includes a portion of the perimeter fijrthest from anchor 160 and undergoes the largest deflection during actuation of cooling element 120. For clarity, only one tip 121 of cooling element 120 is labeled in FIG. 1A. Also shown is pedestal 190 that connects orifice plate 130 to and offsets orifice plate 130 from heat-generating structure 102. In some embodiments, pedestal 190 also thermally couples orifice plate 130 to heatgenerating structure 102. In some embodiments, an additional jet channel plate may be present and supported by pedestal 190. Thus orifice plate 130 and/or such a jet channel plate may be part or all of a bottom plate supported by pedestal 190. Thus, multiple plates and/or plate(s) having various structures may be used at the bottom plate for cooling system 100.

[0028] FIG. 1A depicts cooling system 100 in a neutral position. Thus, cooling element 120 is shown as substantially flat. For in-phase operation, cooling element 120 is driven to vibrate between positions shown in FIGS. 1C and ID. This vibrational motion draws fluid (e.g. air) into vent 112, through chambers 140 and 150 and out orifices 132 at high speed and/or flow rates. For example, the speed at which the fluid impinges on heatgenerating structure 102 may be at least thirty meters per second. In some embodiments, the fluid is driven by cooling element 120 toward heat-generating structure 102 at a speed of at least forty-five meters per second. In some embodiments, the fluid is driven toward heatgenerating structure 102 by cooling element 120 at speeds of at least sixty meters per second. Other speeds may be possible in some embodiments. Cooling system 100 is also configured so that little or no fluid is drawn back into chamber 140/150 through orifices 132 by the vibrational motion of cooling element 120.

[0029] Heat-generating structure 102 is desired to be cooled by cooling system 100. In some embodiments, heat-generating structure 102 generates heat. For example, heatgenerating structure may be an integrated circuit. In some embodiments, heat-generating structure 102 is desired to be cooled but does not generate heat itself. Heat-generating structure 102 may conduct heat (e.g. from a nearby object that generates heat). For example, heat-generating structure 102 might be a heat spreader or a vapor chamber. Thus, heatgenerating structure 102 may include semiconductor component(s) including individual integrated circuit components such as processors, other integrated circuit(s) and/or chip package(s); sensor(s); optical device(s); one or more batteries; other component(s) of an electronic device such as a computing device; heat spreaders; heat pipes; other electronic component(s) and/or other device(s) desired to be cooled. In some embodiments, heatgenerating structure 102 may be a thermally conductive part of a module containing cooling system 100. For example, cooling system 100 may be affixed to heat-generating structure 102, which may be coupled to another heat sink, vapor chamber, integrated circuit, or other separate structure desired to be cooled.

[0030] The devices in which cooling system 100 is desired to be used may also have limited space in which to place a cooling system. For example, cooling system 100 may be used in computing devices. Such computing devices may include but are not limited to smartphones, tablet computers, laptop computers, tablets, two-in-one laptops, hand held gaming systems, digital cameras, virtual reality headsets, augmented reality headsets, mixed reality headsets and other devices that are thin. Cooling system 100 may be a micro-electro- mechanical system (MEMS) cooling system capable of residing within mobile computing devices and/or other devices having limited space in at least one dimension. For example, the total height, h3, of cooling system 100 (from the top of heat-generating structure 102 to the top of top plate 110) may be less than 2 millimeters. In some embodiments, the total height of cooling system 100 is not more than 1.5 millimeters. In some embodiments, this total height is not more than 1.1 millimeters. In some embodiments, the total height does not exceed one millimeter. In some embodiments, the total height does not exceed two hundred and fifty micrometers. Similarly, the distance between the bottom of orifice plate 130 and the top of heat-generating structure 102, y, may be small. In some embodiments, y is at least two hundred micrometers and not more than 1.2 millimeter. For example, y may be at least two hundred and fifty micrometers and not more than three hundred micrometers. In some embodiments, y is at least five hundred micrometers and not more than one millimeter. In some embodiments, y is at least two hundred micrometers and not more than three hundred micrometers. Thus, cooling system 100 is usable in computing devices and/or other devices having limited space in at least one dimension. However, nothing prevents the use of cooling system 100 in devices having fewer limitations on space and/or for purposes other than cooling. Although one cooling system 100 is shown (e.g. one cooling cell), multiple cooling systems 100 might be used in connection with heat-generating structure 102. For example, a one or two-dimensional array of cooling cells might be utilized.

[0031] Cooling system 100 is in communication with a fluid used to cool heatgenerating structure 102. The fluid may be a gas or a liquid. For example, the fluid may be air. In some embodiments, the fluid includes fluid from outside of the device in which cooling system 100 resides (e.g. provided through external vents in the device). In some embodiments, the fluid circulates within the device in which cooling system 100 resides (e.g. in an enclosed device).

[0032] Cooling element 120 can be considered to divide the interior of active MEMS cooling system 100 into top chamber 140 and bottom chamber 150. Top chamber 140 is formed by cooling element 120, the sides, and top plate 110. Bottom chamber 150 is formed by orifice plate 130, the sides, cooling element 120 and anchor 160. Top chamber 140 and bottom chamber 150 are connected at the periphery of cooling element 120 and together form chamber 140/150 (e.g. an interior chamber of cooling system 100).

[0033] The size and configuration of top chamber 140 may be a fimction of the cell (cooling system 100) dimensions, cooling element 120 motion, and the frequency of operation. Top chamber 140 has a height, hl. The height of top chamber 140 may be selected to provide sufficient pressure to drive the fluid to bottom chamber 150 and through orifices 132 at the desired flow rate and/or speed. Top chamber 140 is also sufficiently tall that cooling element 120 does not contact top plate 110 when actuated. In some embodiments, the height of top chamber 140 is at least fifty micrometers and not more than five hundred micrometers. In some embodiments, top chamber 140 has a height of at least two hundred and not more than three hundred micrometers.

[0034] Bottom chamber 150 has a height, h2. In some embodiments, the height of bottom chamber 150 is sufficient to accommodate the motion of cooling element 120. Thus, no portion of cooling element 120 contacts orifice plate 130 during normal operation. Bottom chamber 150 is generally smaller than top chamber 140 and may aid in reducing the backflow of fluid into orifices 132. In some embodiments, the height of bottom chamber 150 is the maximum deflection of cooling element 120 plus at least five micrometers and not more than ten micrometers. In some embodiments, the deflection of cooling element 120 (e.g. the deflection of tip 121), z, has an amplitude of at least ten micrometers and not more than one hundred micrometers. In some such embodiments, the amplitude of deflection of cooling element 120 is at least ten micrometers and not more than sixty micrometers. However, the amplitude of deflection of cooling element 120 depends on factors such as the desired flow rate through cooling system 100 and the configuration of cooling system 100. Thus, the height of bottom chamber 150 generally depends on the flow rate through and other components of cooling system 100.

[0035] Top plate 110 includes vent 112 through which fluid may be drawn into cooling system 100. Top vent 112 may have a size chosen based on the desired acoustic pressure in chamber 140. For example, in some embodiments, the width, w, of vent 112 is at least five hundred micrometers and not more than one thousand micrometers. In some embodiments, the width of vent 112 is at least two hundred fifty micrometers and not more than two thousand micrometers. In the embodiment shown, vent 112 is a centrally located aperture in top plate 110. In other embodiments, vent 112 may be located elsewhere. For example, vent 112 may be closer to one of the edges of top plate 110. Vent 112 may have a circular, rectangular or other shaped footprint. Although a single vent 112 is shown, multiple vents might be used. For example, vents may be offset toward the edges of top chamber 140 or be located on the side(s) of top chamber 140. Although top plate 110 is shown as substantially flat, in some embodiments trenches and/or other structures may be provided in top plate 110 to modify the configuration of top chamber 140 and/or the region above top plate 110.

[0036] Anchor (support structure) 160 supports cooling element 120 at the central portion of cooling element 120. Thus, at least part of the perimeter of cooling element 120 is unpinned and free to vibrate. In some embodiments, anchor 160 extends along a central axis of cooling element 120 (e.g. perpendicular to the page in FIGS. 1A-1F). In such embodiments, portions of cooling element 120 that vibrate (e.g. including tip 121) move in a cantilevered fashion. Thus, portions of cooling element 120 may move in a manner analogous to the wings of a butterfly (i.e. in phase) and/or analogous to a see-saw (i.e. out of phase). Thus, the portions of cooling element 120 that vibrate in a cantilevered fashion do so in phase in some embodiments and out of phase in other embodiments. In some embodiments, anchor 160 does not extend along an axis of cooling element 120. In such embodiments, all portions of the perimeter of cooling element 120 are free to vibrate (e.g. analogous to a jellyfish). In the embodiment shown, anchor 160 supports cooling element 120 from the bottom of cooling element 120. In other embodiments, anchor 160 may support cooling element 120 in another manner. For example, anchor 160 may support cooling element 120 from the top (e.g. cooling element 120 hangs from anchor 160). In some embodiments, the width, a, of anchor 160 is at least 0.5 millimeters and not more than four millimeters. In some embodiments, the width of anchor 160 is at least two millimeters and not more than 2.5 millimeters. Anchor 160 may occupy at least ten percent and not more than fifty percent of cooling element 120.

[0037] Cooling element 120 has a first side distal from heat-generating structure 102 and a second side proximate to heat-generating structure 102. In the embodiment shown in FIGS. 1A-1F, the first side of cooling element 120 is the top of cooling element 120 (closer to top plate 110) and the second side is the bottom of cooling element 120 (closer to orifice plate 130). Cooling element 120 is actuated to undergo vibrational motion as shown in FIGS. 1A-1F. The vibrational motion of cooling element 120 drives fluid from the first side of cooling element 120 distal from heat-generating structure 102 (e.g. from top chamber 140) to a second side of cooling element 120 proximate to heat-generating structure 102 (e.g. to bottom chamber 150). The vibrational motion of cooling element 120 also draws fluid through vent 112 and into top chamber 140; forces fluid from top chamber 140 to bottom chamber 150; and drives fluid from bottom chamber 150 through orifices 132 of orifice plate 130. Thus, cooling element 120 may be viewed as an actuator. Although described in the context of a single, continuous cooling element, in some embodiments, cooling element 120 may be formed by two (or more) cooling elements. Each of the cooling elements is depicted as one portion pinned (e.g. supported by support structure 160) and an opposite portion unpinned. Thus, a single, centrally supported cooling element 120 may be formed by a combination of multiple cooling elements supported at an edge.

[0038] Cooling element 120 has a length, L, that depends upon the frequency at which cooling element 120 is desired to vibrate. In some embodiments, the length of cooling element 120 is at least four millimeters and not more than ten millimeters. In some such embodiments, cooling element 120 has a length of at least six millimeters and not more than eight millimeters. The depth of cooling element 120 (e.g. perpendicular to the plane shown in FIGS. 1A-1F) may vary from one fourth of L through twice L. For example, cooling element 120 may have the same depth as length. The thickness, t, of cooling element 120 may vary based upon the configuration of cooling element 120 and/or the frequency at which cooling element 120 is desired to be actuated. In some embodiments, the cooling element thickness is at least two hundred micrometers and not more than three hundred and fifty micrometers for cooling element 120 having a length of eight millimeters and driven at a frequency of at least twenty kilohertz and not more than twenty-five kilohertz. The length, C, of chamber 140/150 is close to the length, L, of cooling element 120. For example, in some embodiments, the distance, d, between the edge of cooling element 120 and the wall of chamber 140/150 is at least one hundred micrometers and not more than five hundred micrometers. In some embodiments, d is at least two hundred micrometers and not more than three hundred micrometers.

[0039] Cooling element 120 may be driven at a frequency that is at or near both the resonant frequency for an acoustic resonance of a pressure wave of the fluid in top chamber 140 and the resonant frequency for a structural resonance of cooling element 120. The portion of cooling element 120 undergoing vibrational motion is driven at or near resonance (the “structural resonance”) of cooling element 120. This portion of cooling element 120 undergoing vibration may be a cantilevered section in some embodiments. The frequency of vibration for structural resonance is termed the structural resonant frequency. Use of the structural resonant frequency in driving cooling element 120 reduces the power consumption of cooling system 100. Cooling element 120 and top chamber 140 may also be configured such that this structural resonant frequency corresponds to a resonance in a pressure wave in the fluid being driven through top chamber 140 (the acoustic resonance of top chamber 140). The frequency of such a pressure wave is termed the acoustic resonant frequency. At acoustic resonance, a node in pressure occurs near vent 112 and an antinode in pressure occurs near the periphery of cooling system 100 (e.g. near tip 121 of cooling element 120 and near the connection between top chamber 140 and bottom chamber 150). The distance between these two regions is C/2. Thus, C/2 = nl/4, where A. is the acoustic wavelength for the fluid and n is odd (e.g. n = 1, 3, 5, etc.). For the lowest order mode, C = X/2. Because the length of chamber 140 (e.g. C) is close to the length of cooling element 120, in some embodiments, it is also approximately true that L/2 = nX/4, where /- is the acoustic wavelength for the fluid and n is odd. Thus, the frequency at which cooling element 120 is driven, v, is at or near the structural resonant frequency for cooling element 120. The frequency v is also at or near the acoustic resonant frequency for at least top chamber 140. The acoustic resonant frequency of top chamber 140 generally varies less dramatically with parameters such as temperature and size than the structural resonant frequency of cooling element 120. Consequently, in some embodiments, cooling element 120 may be driven at (or closer to) a structural resonant frequency rather than to the acoustic resonant frequency.

[0040] Orifice plate 130 has orifices 132 and cavities 134 therein. Although a particular number and distribution of orifices 132 are shown, another number and/or another distribution may be used. Cavities 134 may be configured differently or may be omitted. A single orifice plate 130 is used for a single cooling system 100. In other embodiments, multiple cooling systems 100 may share an orifice plate. For example, multiple cells 100 may be provided together in a desired configuration. In such embodiments, the cells 100 may be the same size and configuration or different size(s) and/or configuration(s). Orifices 132 are shown as having an axis oriented normal to a surface of heat-generating structure 102. In other embodiments, the axis of one or more orifices 132 may be at another angle. For example, the angle of the axis may be selected from substantially zero degrees and a nonzero acute angle. Orifices 132 also have sidewalls that are substantially parallel to the normal to the surface of orifice plate 130. In some embodiments, orifices may have sidewalls at a nonzero angle to the normal to the surface of orifice plate 130. For example, orifices 132 may be cone-shaped. Further, although orifice place 130 is shown as substantially flat, in some embodiments, trenches and/or other structures may be provided in orifice plate 130 to modify the configuration of bottom chamber 150 and/or the region between orifice plate 130 and heat-generating structure 102.

[0041] The size, distribution and locations of orifices 132 are chosen to control the flow rate of fluid driven to the surface of heat-generating structure 102. The locations and configurations of orifices 132 may be configured to increase/maximize the fluid flow from bottom chamber 150 through orifices 132 to the jet channel (the region between the bottom of orifice plate 130 and the top of heat-generating structure 102). The locations and configurations of orifices 132 may also be selected to reduce/minimize the suction flow (e.g. back flow) from the jet channel through orifices 132. For example, the locations of orifices are desired to be sufficiently far from tip 121 that suction in the upstroke of cooling element 120 (tip 121 moves away from orifice plate 130) that would pull fluid into bottom chamber 150 through orifices 132 is reduced. The locations of orifices are also desired to be sufficiently close to tip 121 that suction in the upstroke of cooling element 120 also allows a higher pressure from top chamber 140 to push fluid from top chamber 140 into bottom chamber 150. In some embodiments, the ratio of the flow rate from top chamber 140 into bottom chamber 150 to the flow rate from the jet channel through orifices 132 in the upstroke (the “net flow ratio”) is greater than 2:1. In some embodiments, the net flow ratio is at least 85:15. In some embodiments, the net flow ratio is at least 90:10. In order to provide the desired pressure, flow rate, suction, and net flow ratio, orifices 132 are desired to be at least a distance, rl, from tip 121 and not more than a distance, r2, from tip 121 of cooling element 120. In some embodiments, rl is at least one hundred micrometers (e.g. rl > 100 pm) and r2 is not more than one millimeter (e.g. r2 < 1000 pm). In some embodiments, orifices 132 are at least two hundred micrometers from tip 121 of cooling element 120 (e.g. rl > 200 pm). In some such embodiments, orifices 132 are at least three hundred micrometers from tip 121 of cooling element 120 (e.g. rl > 300 pm). In some embodiments, orifices 132 have a width, o, of at least one hundred micrometers and not more than five hundred micrometers. In some embodiments, orifices 132 have a width of at least two hundred micrometers and not more than three hundred micrometers. In some embodiments, the orifice separation, s, is at least one hundred micrometers and not more than one millimeter. In some such embodiments, the orifice separation is at least four hundred micrometers and not more than six hundred micrometers. In some embodiments, orifices 132 are also desired to occupy a particular fraction of the area of orifice plate 130. For example, orifices 132 may cover at least five percent and not more than fifteen percent of the footprint of orifice plate 130 in order to achieve a desired flow rate of fluid through orifices 132. In some embodiments, orifices 132 cover at least eight percent and not more than twelve percent of the footprint of orifice plate 130.

[0042] In some embodiments, cooling element 120 is actuated using a piezoelectric. Thus, cooling element 120 may be a piezoelectric cooling element. Cooling element 120 may be driven by a piezoelectric that is mounted on or integrated into cooling element 120. In some embodiments, cooling element 120 is driven in another manner including but not limited to providing a piezoelectric on another structure in cooling system 100. Cooling element 120 and analogous cooling elements are referred to hereinafter as piezoelectric cooling elements though it is possible that a mechanism other than a piezoelectric might be used to drive the cooling element. In some embodiments, cooling element 120 includes a piezoelectric layer on substrate. The substrate may include or consist of stainless steel, a Ni alloy, Hastelloy, Al (e.g. an Al alloy), and/or Ti (e.g. a Ti alloy such as T16A1-4V). In some embodiments, a piezoelectric layer includes multiple sublayers formed as thin films on the substrate. In other embodiments, the piezoelectric layer may be a bulk layer affixed to the substrate. Such a piezoelectric cooling element 120 also includes electrodes used to activate the piezoelectric. The substrate fimctions as an electrode in some embodiments. In other embodiments, a bottom electrode may be provided between the substrate and the piezoelectric layer. Other layers including but not limited to seed, capping, passivation, or other layers might be included in the piezoelectric cooling element. Thus, cooling element 120 may be actuated using a piezoelectric.

[0043] In some embodiments, cooling system 100 includes chimneys (not shown) or other ducting. Such ducting provides a path for heated fluid to flow away from heatgenerating structure 102. In some embodiments, ducting returns fluid to the side of top plate 110 distal from heat-generating structure 102. In some embodiments, ducting may instead direct fluid away from heat-generating structure 102 in a direction parallel to heat-generating structure 102 or perpendicular to heat-generating structure 102 but in the opposite direction (e.g. toward the bottom of the page). For a device in which fluid external to the device is used in cooling system 100, the ducting may channel the heated fluid to a vent. In such embodiments, additional fluid may be provided from an inlet vent. In embodiments, in which the device is enclosed, the ducting may provide a circuitous path back to the region near vent 112 and distal from heat-generating structure 102. Such a path allows for the fluid to dissipate heat before being reused to cool heat-generating structure 102. In other embodiments, ducting may be omitted or configured in another manner. Thus, the fluid is allowed to carry away heat from heat-generating structure 102.

[0044] Operation of cooling system 100 is described in the context of FIGS. 1A-1F. Although described in the context of particular pressures, gap sizes, and timing of flow, operation of cooling system 100 is not dependent upon the explanation herein. FIGS. 1C-1D depict in-phase operation of cooling system 100. Referring to FIG. 1C, cooling element 120 has been actuated so that its tip 121 moves away from top plate 110. FIG. 1C can thus be considered to depict the end of a down stroke of cooling element 120. Because of the vibrational motion of cooling element 120, gap 152 for bottom chamber 150 has decreased in size and is shown as gap 152B. Conversely, gap 142 for top chamber 140 has increased in size and is shown as gap 142B. During the down stroke, a lower (e.g. minimum) pressure is developed at the periphery when cooling element 120 is at the neutral position. As the down stroke continues, bottom chamber 150 decreases in size and top chamber 140 increases in size as shown in FIG. 1C. Thus, fluid is driven out of orifices 132 in a direction that is at or near perpendicular to the surface of orifice plate 130 and/or the top surface of heat-generating structure 102. The fluid is driven from orifices 132 toward heat-generating structure 102 at a high speed, for example in excess of thirty-five meters per second. In some embodiments, the fluid then travels along the surface of heat-generating structure 102 and toward the periphery of heat-generating structure 102, where the pressure is lower than near orifices 132. Also in the down stroke, top chamber 140 increases in size and a lower pressure is present in top chamber 140. As a result, fluid is drawn into top chamber 140 through vent 112. The motion of the fluid into vent 112, through orifices 132, and along the surface of heat-generating structure 102 is shown by unlabeled arrows in FIG. 1C.

[0045] Cooling element 120 is also actuated so that tip 121 moves away from heatgenerating structure 102 and toward top plate 110. FIG. ID can thus be considered to depict the end of an up stroke of cooling element 120. Because of the motion of cooling element 120, gap 142 has decreased in size and is shown as gap 142C. Gap 152 has increased in size and is shown as gap 152C. During the upstroke, a higher (e.g. maximum) pressure is developed at the periphery when cooling element 120 is at the neutral position. As the upstroke continues, bottom chamber 150 increases in size and top chamber 140 decreases in size as shown in FIG. ID. Thus, the fluid is driven from top chamber 140 (e.g. the periphery of chamber 140/150) to bottom chamber 150. Thus, when tip 121 of cooling element 120 moves up, top chamber 140 serves as a nozzle for the entering fluid to speed up and be driven towards bottom chamber 150. The motion of the fluid into bottom chamber 150 is shown by unlabeled arrows in FIG. ID. The location and configuration of cooling element 120 and orifices 132 are selected to reduce suction and, therefore, back flow of fluid from the jet channel (between heat-generating structure 102 and orifice plate 130) into orifices 132 during the upstroke. Thus, cooling system 100 is able to drive fluid from top chamber 140 to bottom chamber 150 without an undue amount of backflow of heated fluid from the jet channel entering bottom chamber 150. Moreover, cooling system 100 may operate such that fluid is drawn in through vent 112 and driven out through orifices 132 without cooling element 120 contacting top plate 110 or orifice plate 130. Thus, pressures are developed within chambers 140 and 150 that effectively open and close vent 112 and orifices 132 such that fluid is driven through cooling system 100 as described herein. [0046] The motion between the positions shown in FIGS. 1C and ID is repeated. Thus, cooling element 120 undergoes vibrational motion indicated in FIGS. 1A-1D, drawing fluid through vent 112 from the distal side of top plate 110 into top chamber 140; transferring fluid from top chamber 140 to bottom chamber 150; and pushing the fluid through orifices 132 and toward heat-generating structure 102. As discussed above, cooling element 120 is driven to vibrate at or near the structural resonant frequency of cooling element 120. Further, the structural resonant frequency of cooling element 120 is configured to align with the acoustic resonance of the chamber 140/150. The structural and acoustic resonant frequencies are generally chosen to be in the ultrasonic range. For example, the vibrational motion of cooling element 120 may be at frequencies from 15 kHz through 30 kHz. In some embodiments, cooling element 120 vibrates at a frequency/frequencies of at least 20 kHz and not more than 30 kHz. The structural resonant frequency of cooling element 120 is within ten percent of the acoustic resonant frequency of cooling system 100. In some embodiments, the structural resonant frequency of cooling element 120 is within five percent of the acoustic resonant frequency of cooling system 100. In some embodiments, the structural resonant frequency of cooling element 120 is within three percent of the acoustic resonant frequency of cooling system 100. Consequently, efficiency and flow rate may be enhanced. However, other frequencies may be used.

[0047] Fluid driven toward heat-generating structure 102 may move substantially normal (perpendicular) to the top surface of heat-generating structure 102. In some embodiments, the fluid motion may have a nonzero acute angle with respect to the normal to the top surface of heat-generating structure 102. In either case, the fluid may thin and/or form apertures in the boundary layer of fluid at heat-generating structure 102. As a result, transfer of heat from heat-generating structure 102 may be improved. The fluid deflects off of heatgenerating structure 102, traveling along the surface of heat-generating structure 102. In some embodiments, the fluid moves in a direction substantially parallel to the top of heatgenerating structure 102. Thus, heat from heat-generating structure 102 may be extracted by the fluid. The fluid may exit the region between orifice plate 130 and heat-generating structure 102 at the edges of cooling system 100. Chimneys or other ducting (not shown) at the edges of cooling system 100 allow fluid to be carried away from heat-generating structure 102. In other embodiments, heated fluid may be transferred fijrther from heat-generating structure 102 in another manner. The fluid may exchange the heat transferred from heatgenerating structure 102 to another structure or to the ambient environment. Thus, fluid at the distal side of top plate 110 may remain relatively cool, allowing for the additional extraction of heat. In some embodiments, fluid is circulated, returning to the distal side of top plate 110 after cooling. In other embodiments, heated fluid is carried away and replaced by new fluid at the distal side of cooling element 120. As a result, heat-generating structure 102 may be cooled.

[0048] FIGS. IE- IF depict an embodiment of active MEMS cooling system 100 including centrally anchored cooling element 120 in which the cooling element is driven out- of-phase. More specifically, sections of cooling element 120 on opposite sides of anchor 160 (and thus on opposite sides of the central region of cooling element 120 that is supported by anchor 160) are driven to vibrate out-of-phase. In some embodiments, sections of cooling element 120 on opposite sides of anchor 160 are driven at or near one hundred and eighty degrees out-of-phase. Thus, one section of cooling element 120 vibrates toward top plate 110, while the other section of cooling element 120 vibrates toward orifice plate 130/heat- generating structure 102. Movement of a section of cooling element 120 toward top plate 110 (an upstroke) drives fluid in top chamber 140 to bottom chamber 150 on that side of anchor 160. Movement of a section of cooling element 120 toward orifice plate 130 drives fluid through orifices 132 and toward heat-generating structure 102. Thus, fluid traveling at high speeds (e.g. speeds described with respect to in-phase operation) is alternately driven out of orifices 132 on opposing sides of anchor 160. Because fluid is driven through orifices 132 at high speeds, cooling system 100 may be viewed as a MEMs jet. The movement of fluid is shown by unlabeled arrows in FIGS. IE and IF.The motion between the positions shown in FIGS. IE and IF is repeated. Thus, cooling element 120 undergoes vibrational motion indicated in FIGS. 1 A, IE, and IF, alternately drawing fluid through vent 112 from the distal side of top plate 110 into top chamber 140 for each side of cooling element 120; transferring fluid from each side of top chamber 140 to the corresponding side of bottom chamber 150; and pushing the fluid through orifices 132 on each side of anchor 160 and toward heatgenerating structure 102. As discussed above, cooling element 120 is driven to vibrate at or near the structural resonant frequency of cooling element 120. Further, the structural resonant frequency of cooling element 120 is configured to align with the acoustic resonance of the chamber 140/150. The structural and acoustic resonant frequencies are generally chosen to be in the ultrasonic range. For example, the vibrational motion of cooling element 120 may be at the frequencies described for in-phase vibration. The structural resonant frequency of cooling element 120 is within ten percent of the acoustic resonant frequency of cooling system 100. In some embodiments, the structural resonant frequency of cooling element 120 is within five percent of the acoustic resonant frequency of cooling system 100. In some embodiments, the structural resonant frequency of cooling element 120 is within three percent of the acoustic resonant frequency of cooling system 100. Consequently, efficiency and flow rate may be enhanced. However, other frequencies may be used.

[0049] Fluid driven toward heat-generating structure 102 for out-of-phase vibration may move substantially normal (perpendicular) to the top surface of heat-generating structure 102, in a manner analogous to that described above for in-phase operation. Similarly, chimneys or other ducting (not shown) at the edges of cooling system 100 allow fluid to be carried away from heat-generating structure 102. In other embodiments, heated fluid may be transferred birther from heat-generating structure 102 in another manner. The fluid may exchange the heat transferred from heat-generating structure 102 to another structure or to the ambient environment. Thus, fluid at the distal side of top plate 110 may remain relatively cool, allowing for the additional exhaction of heat. In some embodiments, fluid is circulated, returning to the distal side of top plate 110 after cooling. In other embodiments, heated fluid is carried away and replaced by new fluid at the distal side of cooling element 120. As a result, heat-generating structure 102 may be cooled.

[0050] Although shown in the context of a uniform cooling element in FIGS. 1A-1F, cooling system 100 may utilize cooling elements having different shapes. FIG. 1G depicts an embodiment of engineered cooling element 120’ having a tailored geometry and usable in a cooling system such as cooling system 100. Cooling element 120’ includes an anchored region 122 and cantilevered arms 123. Anchored region 122 is supported (e.g. held in place) in cooling system 100 by anchor 160. Cantilevered arms 123 undergo vibrational motion in response to cooling element 120’ being actuated. Each cantilevered arm 123 includes step region 124, extension region 126 and outer region 128. In the embodiment shown in FIG. 1G, anchored region 122 is centrally located. Step region 124 extends outward from anchored region 122. Extension region 126 extends outward from step region 124. Outer region 128 extends outward from extension region 126. In other embodiments, anchored region 122 may be at one edge of the actuator and outer region 128 at the opposing edge. In such embodiments, the actuator is edge anchored.

[0051] Extension region 126 has a thickness (extension thickness) that is less than the thickness of step region 124 (step thickness) and less than the thickness of outer region 128 (outer thickness). Thus, extension region 126 may be viewed as recessed. Extension region 126 may also be seen as providing a larger bottom chamber 150. In some embodiments, the outer thickness of outer region 128 is the same as the step thickness of step region 124. In some embodiments, the outer thickness of outer region 128 is different from the step thickness of step region 124. In some embodiments, outer region 128 and step region 124 each have a thickness of at least three hundred twenty micrometers and not more than three hundred and sixty micrometers. In some embodiments, the outer thickness is at least fifty micrometers and not more than two hundred micrometers thicker than the extension thickness. Stated differently, the step (difference in step thickness and extension thickness) is at least fifty micrometers and not more than two hundred micrometers. In some embodiments, the outer step (difference in outer thickness and extension thickness) is at least fifty micrometers and not more than two hundred micrometers. Outer region 128 may have a width, o, of at least one hundred micrometers and not more than three hundred micrometers. Extension region 126 has a length, e, extending outward from the step region of at least 0.5 millimeter and not more than 1.5 millimeters in some embodiments. In some embodiments, outer region 128 has a higher mass per unit length in the direction from anchored region 122 than extension region 126. This difference in mass may be due to the larger size of outer region 128, a difference in density between portions of cooling element 120, and/or another mechanism.

[0052] Use of engineered cooling element 120’ may fijrther improve efficiency of cooling system 100. Extension region 126 is thinner than step region 124 and outer region 128. This results in a cavity in the bottom of cooling element 120’ corresponding to extension region 126. The presence of this cavity aids in improving the efficiency of cooling system 100. Each cantilevered arm 123 vibrates towards top plate 110 in an upstroke and away from top plate 110 in a downstroke. When a cantilevered arm 123 moves toward top plate 110, higher pressure fluid in top chamber 140 resists the motion of cantilevered arm 123. Furthermore, suction in bottom chamber 150 also resists the upward motion of cantilevered arm 123 during the upstroke. In the downstroke of cantilevered arm 123, increased pressure in the bottom chamber 150 and suction in top chamber 140 resist the downward motion of cantilevered arm 123. However, the presence of the cavity in cantilevered arm 123 corresponding to extension region 126 mitigates the suction in bottom chamber 150 during an upstroke. The cavity also reduces the increase in pressure in bottom chamber 150 during a downstroke. Because the suction and pressure increase are reduced in magnitude, cantilevered arms 123 may more readily move through the fluid. This may be achieved while substantially maintaining a higher pressure in top chamber 140, which drives the fluid flow through cooling system 100. Moreover, the presence of outer region 128 may improve the ability of cantilevered arm 123 to move through the fluid being driven through cooling system 100. Outer region 128 has a higher mass per unit length and thus a higher momentum. Consequently, outer region 128 may improve the ability of cantilevered arms 123 to move through the fluid being driven through cooling system 100. The magnitude of the deflection of cantilevered arm 123 may also be increased. These benefits may be achieved while maintaining the stiffness of cantilevered arms 123 through the use of thicker step region 124. Further, the larger thickness of outer region 128 may aid in pinching off flow at the bottom of a downstroke. Thus, the ability of cooling element 120’ to provide a valve preventing backflow through orifices 132 may be improved. Thus, performance of cooling system 100 employing cooling element 120’ may be improved.

[0053] Further, cooling elements used in cooling system 100 may have different structures and/or be mounted differently than depicted in FIGS. 1A-1G. In some embodiments, the cooling element may have rounded comers and/or rounded ends but still be anchored along a central axis such that cantilevered arms vibrate. The cooling element may be anchored only at its central region such that the regions surrounding the anchor vibrate in a manner analogous to a jellyfish or the opening/closing of an umbrella. In some such embodiments, the cooling element may be circular or elliptical in shape. In some embodiments, the anchor may include apertures through which fluid may flow. Such an anchor may be utilized for the cooling element being anchored at its top (e.g. to the top plate). Although not indicated in FIGS. 1A-1G, the piezoelectric utilized in driving the cooling element may have various locations and/or configurations. For example, the piezoelectric may be embedded in the cooling element, affixed to one side of the cooling element (or cantilevered arm(s)), may occupy some or all of the cantilevered arms, and/or may have a location that is close to or distal from the anchored region. In some embodiments, cooling elements that are not centrally anchored may be used. For example, a pair of cooling elements that have offset apertures, that are anchored at their ends (or all edges), and which vibrate out of phase may be used. Thus, various additional configurations of cooling element 120 and/or 120’, anchor 160, and/or other portions of cooling system 100 may be used.

[0054] Using the cooling system 100 actuated for in-phase vibration or out-of-phase vibration of cooling element 120 and/or 120’, fluid drawn in through vent 112 and driven through orifices 132 may efficiently dissipate heat from heat-generating structure 102. Because fluid impinges upon the heat-generating structure with sufficient speed (e.g. at least thirty meters per second) and in some embodiments substantially normal to the heatgenerating structure, the boundary layer of fluid at the heat-generating structure may be thinned and/or partially removed. Consequently, heat transfer between heat-generating structure 102 and the moving fluid is improved. Because the heat-generating structure is more efficiently cooled, the corresponding integrated circuit may be run at higher speed and/or power for longer times. For example, if the heat-generating structure corresponds to a highspeed processor, such a processor may be run for longer times before throttling. Thus, performance of a device utilizing cooling system 100 may be improved. Further, cooling system 100 may be a MEMS device. Consequently, cooling systems 100 may be suitable for use in smaller and/or mobile devices, such as smart phones, other mobile phones, virtual reality headsets, tablets, two-in-one computers, wearables and handheld games, in which limited space is available. Performance of such devices may thus be improved. Because cooling element 120/120’ may be vibrated at frequencies of 15 kHz or more, users may not hear any noise associated with actuation of cooling elements. If driven at or near structural and/or acoustic resonant frequencies, the power used in operating cooling systems may be significantly reduced. Cooling element 120/120’ does not physically contact top plate 110 or orifice plate 130 during vibration. Thus, resonance of cooling element 120/120’ may be more readily maintained. More specifically, physical contact between cooling element 120/120’ and other structures disturbs the resonance conditions for cooling element 120/120’.

Disturbing these conditions may drive cooling element 120/120’ out of resonance. Thus, additional power would need to be used to maintain actuation of cooling element 120/120’. Further, the flow of fluid driven by cooling element 120/120’ may decrease. These issues are avoided through the use of pressure differentials and fluid flow as discussed above. The benefits of improved, quiet cooling may be achieved with limited additional power. Further, out-of-phase vibration of cooling element 120/120’ allows the position of the center of mass of cooling element 120/120’ to remain more stable. Although a torque is exerted on cooling element 120/120’, the force due to the motion of the center of mass is reduced or eliminated. As a result, vibrations due to the motion of cooling element 120/120’ may be reduced. Moreover, efficiency of cooling system 100 may be improved through the use of out-of-phase vibrational motion for the two sides of cooling element 120/120’. Consequently, performance of devices incorporating the cooling system 100 may be improved. Further, cooling system 100 may be usable in other applications (e.g. with or without heat-generating structure 102) in which high fluid flows and/or velocities are desired.

[0055] FIGS. 2A-2B depict an embodiment of active MEMS cooling system 200 including a top centrally anchored cooling element. FIG. 2A depicts a side view of cooling system 200 in a neutral position. FIG. 2B depicts a top view of cooling system 200. FIGS. 2A-2B are not to scale. For simplicity, only portions of cooling system 200 are shown. Referring to FIGS. 2A-2B, cooling system 200 is analogous to cooling system 100. Consequently, analogous components have similar labels. For example, cooling system 200 is used in conjunction with heat-generating structure 202, which is analogous to heat-generating structure 102.

[0056] Cooling system 200 includes top plate 210 having vents 212, cooling element 220 having tip 221, orifice plate 230 including orifices 232, top chamber 240 having a gap, bottom chamber 250 having a gap, flow chamber 240/250, and anchor (i.e. support structure) 260 that are analogous to top plate 110 having vent 112, cooling element 120 having tip 121, orifice plate 130 including orifices 132, top chamber 140 having gap 142, bottom chamber 150 having gap 152, flow chamber 140/150, and anchor (i.e. support structure) 160, respectively. Also shown is pedestal 290 that is analogous to pedestal 190. Thus, cooling element 220 is centrally supported by anchor 260 such that at least a portion of the perimeter of cooling element 220 is free to vibrate. In some embodiments, anchor 260 extends along the axis of cooling element 220. In other embodiments, anchor 260 is only near the center portion of cooling element 220. Although not explicitly labeled in FIGS. 2A and 2B, cooling element 220 includes an anchored region and cantilevered arms including step region, extension region, and outer regions analogous to anchored region 122, cantilevered arms 123, step region 124, extension region 126, and outer region 128 of cooling element 120’. In some embodiments, cantilevered arms of cooling element 220 are driven in-phase. In some embodiments, cantilevered arms of cooling element 220 are driven out-of-phase. In some embodiments, a simple cooling element, such as cooling element 120, may be used.

[0057] Anchor 260 supports cooling element 220 from above. Thus, cooling element 220 is suspended from anchor 260. Anchor 260 is suspended from top plate 210. Top plate 210 includes vent 213. Vents 212 on the sides of anchor 260 provide a path for fluid to flow into sides of chamber 240. [0058] As discussed above with respect to cooling system 100, cooling element 220 may be driven to vibrate at or near the structural resonant frequency of cooling element 220. Further, the structural resonant frequency of cooling element 220 may be configured to align with the acoustic resonance of the chamber 240/250. The structural and acoustic resonant frequencies are generally chosen to be in the ultrasonic range. For example, the vibrational motion of cooling element 220 may be at the frequencies described with respect to cooling system 100. Consequently, efficiency and flow rate may be enhanced. However, other frequencies may be used.

[0059] Cooling system 200 operates in an analogous manner to cooling system 100. Cooling system 200 thus shares the benefits of cooling system 100. Thus, performance of a device employing cooling system 200 may be improved. In addition, suspending cooling element 220 from anchor 260 may further enhance performance. In particular, vibrations in cooling system 200 that may affect other cooling cells (not shown) may be reduced. For example, less vibration may be induced in top plate 210 due to the motion of cooling element 220. Consequently, cross talk between cooling system 200 and other cooling systems (e.g. other cells) or other portions of the device incorporating cooling system 200 may be reduced. Thus, performance may be further enhanced.

[0060] FIGS. 3A-3E depict an embodiment of active MEMS cooling system 300 including multiple cooling cells configured as a module termed a tile, or array. FIG. 3A depicts a perspective view, while FIGS. 3B-3E depict side views. FIGS. 3A-3E are not to scale. Cooling system 300 includes four cooling cells 301A, 301B, 301C and 301D (collectively or generically 301), which are analogous to one or more of cooling systems described herein. More specifically, cooling cells 301 are analogous to cooling system 100 and/or 200. Tile 300 thus includes four cooling cells 301 (i.e. four MEMS jets). Although four cooling cells 301 in a 2x2 configuration are shown, in some embodiments another number and/or another configuration of cooling cells 301 might be employed. In the embodiment shown, cooling cells 301 include shared top plate 310 having apertures 312, cooling elements 320, shared orifice plate 330 including orifices 332, top chambers 340, bottom chambers 350, anchors (support structures) 360, and pedestals 390 that are analogous to top plate 110 having apertures 112, cooling element 120, orifice plate 130 having orifices 132, top chamber 140, bottom chamber 150, anchor 160, and pedestal 190. In some embodiments, cooling cells 301 may be fabricated together and separated, for example by cutting through top plate 310, side walls between cooling cells 301, and orifice plate 330. Thus, although described in the context of a shared top plate 310 and shared orifice plate 330, after fabrication cooling cells 301 may be separated. In some embodiments, tabs (not shown) and/or other structures such as anchors 360 may connect cooling cells 301. Further, tile 300 includes heat-generating structure (termed a heat spreader hereinafter) 302 (e.g. a heat sink, a heat spreader, and/or other structure) that also has sidewalls, or fencing, in the embodiment shown. Cover plate 306 having apertures therein is also shown. Heat spreader 302 and cover plate 306 may be part of an integrated tile 300 as shown or may be separate from tile 300 in other embodiments. Heat spreader 302 and cover plate 306 may direct fluid flow outside of cooling cells 301, provide mechanical stability, and/or provide protection. Electrical connection to cooling cells 301 is provided via flex connector 380 (not shown in FIGS. 3B- 5E) which may house drive electronics 385. Cooling elements 320 are driven out-of-phase (i.e. in a manner analogous to a see-saw). Further, as can be seen in FIGS. 3B-3C and FIGS. 3D-3E cooling element 320 in one cell is driven out-of-phase with cooling element(s) 320 in adjacent cell(s). In FIGS. 3B-3C, cooling elements 320 in a row are driven out-of-phase. Thus, cooling element 320 in cell 301A is out-of-phase with cooling element 320 in cell 301B. Similarly, cooling element 320 in cell 301C is out-of-phase with cooling element 320 in cell 301D. In FIGS. 3D-3E, cooling elements 320 in a column are driven out-of-phase. Thus, cooling element 320 in cell 301A is out-of-phase with cooling element 320 in cell 301C. Similarly, cooling element 320 in cell 301B is out-of-phase with cooling element 320 in cell 301D. By driving cooling elements 320 out-of-phase, vibrations in cooling system 300 may be reduced. Cooling elements 320 may be driven in another manner in some embodiments.

[0061] Cooling cells 301 of cooling system 300 ftmction in an analogous manner to cooling system(s) 100, 200, and/or an analogous cooling system. Consequently, the benefits described herein may be shared by cooling system 300. Because cooling elements in nearby cells are driven out-of-phase, vibrations in cooling system 300 may be reduced. Because multiple cooling cells 301 are used, cooling system 300 may enjoy enhanced cooling capabilities. Further, multiples of individual cooling cells 301 and/or cooling system 300 may be combined in various fashions to obtain the desired footprint of cooling cells.

[0062] FIGS. 4A-4B depict an embodiment of active MEMS cooling system 400. MEMS cooling system 400 may also be considered to be a heat transfer or fluid transfer system. For example, transfer of the fluid by cooling system 400 removes heat from heatgenerating structure 402 and from devices (e.g. processors and/or batteries) to which heatgenerating structure 402 is coupled. However, for simplicity, system 400 is referred to as a cooling system. FIG. 4A depicts a side view of cooling system 400 showing a single cooling cell 401. FIG. 4B depicts multiple cooling cells 401. FIGS. 4A and 4B are not to scale. For simplicity, only portions of cooling system 400 are shown. Cooling system 400 is analogous to cooling system(s) 100, 200, and/or 300. Consequently, analogous components have similar labels. For example, cooling system 400 is used in conjunction with heat-generating structure 402, which is analogous to heat-generating structure(s) 102, 202, and 302. In the embodiment shown, heat-generating structure 402 is a heat spreader that is integrated into system 400. Heat spreader 402 is thermally coupled with heat source(s), such as integrated circuit(s), battery/batteries, and/or components that are desired to be cooled.

[0063] Cooling system 400 includes top plate 410 having vent(s) 412 (only one of which is shown), cooling element 420 having tip 421, orifice plate 430 including orifices 432 and cavities 434, top chamber 440 having a gap, bottom chamber 450 having a gap, flow chamber 440/450, and anchor (i.e. support structure) 460 that are analogous to top plate 110 having vent 112, cooling element 120 having tip 121, orifice plate 130 including orifices 132 and cavities 134, top chamber 140 having gap 142, bottom chamber 150 having gap 152, flow chamber 140/150, and anchor (i.e. support structure) 160, respectively. Also shown is pedestal 490 that is analogous to pedestal 190. Cooling element 420 is centrally supported by anchor 460 such that at least a portion of the perimeter of cooling element 420 is free to vibrate. In some embodiments, anchor 460 extends along the axis of cooling element 220. In other embodiments, anchor 460 is only near the center portion of cooling element 420. In some embodiments, cooling element 420 includes an anchored region and cantilevered arms including step region, extension region, and outer regions analogous to anchored region 122, cantilevered arms 123, step region 124, extension region 126, and outer region 128 of cooling element 120’. In some embodiments, cantilevered arms of cooling element 420 are driven in- phase. In some embodiments, cantilevered arms of cooling element 420 are driven out-of- phase. In some embodiments, cooling system 400 includes multiple cooling cells analogous to cooling cells 301.

[0064] Cooling system 400 also includes an enhanced cover 406. Cover 406 includes insulating layers 482 and 484 and thermally conductive layer 480. In some embodiments, insulating layer 484 may be omitted. Thermally conductive layer 480 is both compliant and has a high thermal conductivity. As a result, thermally conductive layer 480 may avoid or mitigate the transfer of mechanical energy and the transfer of vibrations between cells 401. For example, thermally conductive layer 480 may have a bulk modulus of elasticity of at least 10 GPa. For example, thermally conductive layer 480 may be or include graphite. To remain compliant, thermally conductive layer 480 may be thin or shaped to make it compliant. For example, in some embodiments, thermally conductive layer 480 is not more than two hundred micrometers thick. In some embodiments, thermally conductive layer 480 is not more than one hundred and fifty micrometers thick. In some embodiments, thermally conductive layer 480 is not more than one hundred micrometers thick. In some embodiments, thermally conductive layer 480 is not more than one hundred micrometers thick. In some embodiments, thermally conductive layer 480 is at least fifty micrometers thick. For example, layer 480 may be a pyrolytic graphite sheet (PGS) layer.

[0065] Thermally conductive layer 480 has a high in-plane electrical and a high inplane thermal conductivity. Thus, graphite may be utilized for layer 480. However, cells 401 may be desired to be electrically isolated. Consequently, insulating layer 482 is also present. In some embodiments, insulating layer 482 is a polyamide or other thin insulating layer such as a PET layer. Similarly, layer 484 may be a thin insulating layer. For example, layer 484 may also be a polyamide or PET layer. In some embodiments, layers 482 and 484 each have a thickness that does not exceed one hundred micrometers. In some embodiments, layers 482 and 484 each have a thickness that does not exceed fifty micrometers. Because layers 480, 482, and 484 are compliant, cover 406 remains compliant. The transfer of mechanical energy due to vibrations of cells 401 during use may thus be mitigated or prevented. Consequently, damping of vibrations due to this transfer of mechanical energy may be reduced or eliminated. In addition, fabrication of cooling system 400 may be simplified. Cover 406 may be formed as a sheet including layers 482, 480, and 484. Such a sheet may be laid on top plate 410 and attached, for example via a pressure sensitive adhesive for layer 482.

[0066] Cooling system 400 operates in an analogous manner to cooling system 100. In some embodiments, cooling system 400 transfers heat from a portion of the device (not shown) in which system 400 is incorporated to heat-generating structure 402 (e.g. a heat spreader) and cooling cells 401 via thermal conduction. Cooling element 420 is activated to undergo vibrational motion (e.g. in a see-saw/out-of-phase configuration). The vibrational motion of cooling element 420 draws fluid (e.g. air) into aperture 412, drives the fluid through flow chamber 440/450, and drives the fluid out of flow chamber 440/450 via orifices/egresses 432. The fluid impinges on heat-generating structure 402 and travels out of cooling system 432 via the jet channel. The fluid transfers heat from cooling cells 401, heatgenerating structure 402 and other portions of cooling system 400. Thus, portions of the device in which cooling system 400 is incorporated also have heat transferred to the fluid. Cooling system 400 may thus efficiently cool.

[0067] Thermally conductive layer 480 also aids in conducting heat through cooling system 400. As indicated in FIG. 4B, heat-generating structure 402, which is a heat spreader in the embodiment shown, may have sidewalls that are thermally connected via conduction to thermally conductive layer 400. Thus, heat transferred to heat spreader 402 may be conducted through cells 401 not only through pedestal 490, but also through thermally conductive layer 480. As a result, heat is better transferred from the portion of the device being cooled to cooling system 400. Heat is transferred to fluid driven through cooling system 400, which may then carry the heat away. Thermally conductive layer 480 may make this transfer of heat to cooling system 400 and thus to the fluid more efficient. This efficiency may be indicated by the temperature of the fluid exiting cooling system 400 in comparison to the temperature of heat spreader 402. In the absence of thermally conductive layer 480, the fluid leaving cooling system 400 may be at least eight degrees Celsius cooler than heat spreader 402. In some embodiments in which thermally conductive layer 480 is used, the temperature of fluid leaving system 400 may be not more than five degrees Celsius cooler than heat spreader 402. In some embodiments in which thermally conductive layer 480 is used, the temperature of fluid leaving system 400 may be not more than four degrees Celsius cooler than heat spreader 402. In some embodiments in which thermally conductive layer 480 is used, the temperature of fluid leaving system 400 may be not more than three degrees Celsius cooler than heat spreader 402.

[0068] Cooling system 400 shares the benefits of cooling systems 100, 200, and/or 300. Thus, fluid driven by cooling system 400 efficiently cools heat spreader 402 and, therefore, structures that are thermally coupled (e.g. via conduction) with heat spreader 402. The performance of a device employing cooling system 400 may be improved. The presence of thermally conductive layer 480 may improve the efficiency of cooling system 400. Thus, efficiency of cooling system 400 may be improved. This improvement may be achieved while maintaining the desired vibration isolation between cells 401.

[0069] FIGS. 5A-5B depict an embodiment of active MEMS heat transfer system 500 including an enhanced cover. MEMS cooling system 500 may also be considered to be a heat transfer or fluid transfer system. However, for simplicity, system 500 is referred to as a cooling system. FIG. 5A depicts a plan view of cover 506. FIG. 5B depicts a side view of multiple cooling cells 501. FIGS. 5A and 5B are not to scale. For simplicity, only portions of cooling system 500 are shown. Cooling system 500 is analogous to cooling system(s) 100, 200, 300, and/or 400. Consequently, analogous components have similar labels. For example, cooling system 500 is used in conjunction with heat-generating structure 502, which is analogous to heat-generating structure(s) 102, 202, and 302. In the embodiment shown, heatgenerating structure 502 is a heat spreader that is integrated into system 500. Heat spreader 502 is thermally coupled with heat source(s), such as integrated circuit(s), battery/batteries, and/or components that are desired to be cooled.

[0070] Cooling system 500 includes cells 501, heat spreader 502, and cover 506 including insulating layers 582 and 584 and graphite layer 580 that are analogous to cells 401, heat spreader 402, cover 406 including insulting layers 482 and 484 and graphite layer 480. In the embodiment shown, layer 484 may wrap around the side of heat spreader 502.

[0071] Cooling system 500 operates in a manner analogous to and shares the benefits of cooling systems 100, 200, 300, and/or 400. Thus, fluid driven by cooling system 500 efficiently cools heat spreader 502 and, therefore, structures that are thermally coupled (e.g. via conduction) with heat spreader 502. The performance of a device employing cooling system 500 may be improved. The presence of thermally conductive layer 580 may improve the efficiency of cooling system 500. Thus, efficiency of cooling system 500 may be fijrther improved. This improvement may be achieved while maintaining the desired vibration isolation between cells 501.

[0072] FIGS. 6A-6B depict embodiments 600 and 600’ of active MEMS heat transfer systems including enhanced covers. MEMS cooling systems 600 and 600’ may also be considered to be a heat transfer or fluid transfer system. However, for simplicity, systems 600 and 600’ are referred to as cooling systems. FIG. 6A depicts a side view of cooling system 600. FIG. 6B depicts a side view of multiple cooling cells 601 in cooling system 600’. FIGS. 6A and 6B are not to scale. For simplicity, only portions of cooling systems 600 and 600’ are shown. Cooling systems 600 and 600’ are analogous to cooling system(s) 100, 200, 300, 400 and/or 500. Consequently, analogous components have similar labels. For example, cooling system 600 and 600’ are used in conjunction with heat-generating structure 602, which is analogous to heat-generating structure(s) 102, 202, and 302. In the embodiment shown, heatgenerating structure 602 is a heat spreader that is integrated into system 600. Heat spreader 602 is thermally coupled with heat source(s), such as integrated circuit(s), battery/batteries, and/or components that are desired to be cooled.

[0073] Cooling system 600 includes cells 601, heat spreader 602, and cover 606 including insulating layers 682 and 684 and graphite layer 680 that are analogous to cells 401, heat spreader 402, cover 406 including insulting layers 482 and 484 and graphite layer 480. In the embodiment shown, insulating layer 682 fits within heat spreader 602. Cooling system 600’ includes cells 601, heat spreader 602, and cover 606 including insulating layers 682 and 684 and graphite layer 680’ that are analogous to cells 401, heat spreader 402, cover 406 including insulting layers 482 and 484 and graphite layer 480. In the embodiment shown, insulating layer 682 fits within heat spreader 602. In addition, graphite layer 680’ wraps around heat spreader 602. Although shown as wrapping completely around cooling system 600’, in some embodiments, graphite layer 680’ may only partially wrap around cooling system 600’.

[0074] Cooling system 600 operates in a manner analogous to and shares the benefits of cooling systems 100, 200, 300, and/or 400. Thus, fluid driven by cooling system 600 efficiently cools heat spreader 602 and, therefore, structures that are thermally coupled (e.g. via conduction) with heat spreader 602. The performance of a device employing cooling system 600 may be improved. The presence of thermally conductive layer 680 and 680’ may improve the efficiency of cooling system 600. Thermally conductive layer 680’ may in particular improve the efficiency of thermal conduction to the cooling system 600’. Thus, efficiency of cooling system 600 may be birther improved. This improvement may be achieved while maintaining the desired vibration isolation between cells 601.

[0075] FIG. 7 depicts an embodiment of active MEMS heat transfer system 700 including an enhanced cover. MEMS cooling system 700 may also be considered to be a heat transfer or fluid transfer system. For example, transfer of the fluid by cooling system 700 removes heat from heat-generating structure 702 and from devices (e.g. processors and/or bateries) to which heat-generating structure 702 is coupled. However, for simplicity, system 700 is referred to as a cooling system. Although a single cooling cell is shown in FIG. 7, multiple cooling cells may be provided. FIG. 7 is not to scale. For simplicity, only portions of cooling system 700 are shown. Cooling system 700 is analogous to cooling system(s) 100, 200, 300, 400, 500, 600, and/or 600’. Consequently, analogous components have similar labels. For example, cooling system 700 is used in conjunction with heat-generating structure 702, which is analogous to heat-generating structure(s) 102, 202, 302, 402, 502, and 602. In the embodiment shown, heat-generating structure 702 is a heat spreader that is integrated into system 700. Heat spreader 702 is thermally coupled with heat source(s), such as integrated circuit(s), battery/batteries, and/or components that are desired to be cooled.

[0076] Cooling system 700 includes top plate 710 having vent(s) 712 (only one of which is shown), cooling element 720 having tip 721, orifice plate 730 including orifices 732 and cavities 734, top chamber 740 having a gap, bottom chamber 750 having a gap, flow chamber 740/450, and anchor (i.e. support structure) 760 that are analogous to top plate 110 having vent 112, cooling element 120 having tip 121, orifice plate 130 including orifices 132 and cavities 134, top chamber 140 having gap 142, bottom chamber 150 having gap 152, flow chamber 140/150, and anchor (i.e. support structure) 160, respectively. Also shown is pedestal 790 that is analogous to pedestal 190. Cooling system 700 also includes an enhanced cover 706 including insulating layers 782 and 784 and thermally conductive layer 780 that are analogous to, e.g. enhanced cover 406 including insulating layers 482 and 484 and thermally conductive layer 480. Cooling element 720 is centrally supported by anchor 760 such that at least a portion of the perimeter of cooling element 720 is free to vibrate. In some embodiments, anchor 760 extends along the axis of cooling element 220. In other embodiments, anchor 760 is only near the center portion of cooling element 720. In some embodiments, cooling element 720 includes an anchored region and cantilevered arms including step region, extension region, and outer regions analogous to anchored region 122, cantilevered arms 123, step region 124, extension region 126, and outer region 128 of cooling element 120’. In some embodiments, cantilevered arms of cooling element 720 are driven in- phase. In some embodiments, cantilevered arms of cooling element 720 are driven out-of- phase. In some embodiments, cooling system 700 includes multiple cooling cells analogous to cooling cells 301.

[0077] Cooling system 700 also includes membrane 770 that may fimction as a dust cover. In top plate, flow chamber 771 has been formed in top cover 710. Flow chamber 771 has an inner wall on which support members 772 reside and which includes vent 712. The outer wall of flow chamber 771 includes opening 773. Cover 706 is on the outer wall of flow chamber 771. Membrane 770 is supported by support members 772. In some embodiments, membrane 770 is flush with the outer wall of top plate 710. In the embodiment shown, membrane 770 is flush with the bottom portion of layer 782 of cover 706. Also shown is mesh 774. Mesh 774 may be a steel mesh used to support membrane 770. In some embodiments, flow chamber 771 is at least three hundred and not more than four hundred micrometers in depth for a top plate 710 having a thickness of five hundred micrometers. In some embodiments, flow chamber 771 is nominally three hundred and fifty micrometers deep and five millimeters wide. The bottom of membrane 770 is desired to be distal from the bottom (inner wall) of flow chamber 771. For example, in some embodiments, the bottom of membrane 770 is at least two hundred micrometers and not more than three hundred micrometers from the bottom of flow chamber 771. In some such embodiments, the bottom of membrane 770 is not more than two hundred and fifty micrometers from the bottom of flow chamber 771. Further membrane 770 is desired to be compliant and not overly restrict flow through cooling system 700. In some embodiments, therefore, membrane 770 may be not more than three hundred micrometers thick. In some embodiments, membrane 770 may be not more than two hundred micrometers thick. Membrane 770 may be at least one hundred micrometers thick.

[0078] Membrane 770 is utilized to reduce or prevent the entry of dust into chambers 740 and 750. In some embodiments, membrane 770 prevents at least ninety percent of particles having a size of one micron or more from entering vent 712. In some embodiments, membrane 770 prevents at least ninety-nine percent of particles having a size of one micron or more from entering vent 712. Membrane 770 also reduces or prevents the entry of smaller particles into chambers 740 and 750. For example, membrane 770 may be or have the characteristics corresponding to a MERV14 filter (e.g. may prevent at least eighty four percent of particles having a characteristic size of 0.3 micrometer through 1.0 micrometers from passing through membrane 770). In some embodiments, membrane 770 may be or have the characteristics corresponding to a MERV15, MERV16, or finer filter. In some embodiments, the device in which cooling system 700 is incorporated has filters on inlets and/or outlets or is sealed. For example, a MERV14 filter may be utilized on device inlets and/or outlets. In some embodiments, such a filter may be at least three hundred micrometers thick, at least four hundred micrometers thick, or at least five hundred micrometers thick. In some embodiments, such a device filter may be not more than six hundred micrometers thick. In such cases, membrane 770 may have looser tolerances (e.g. might correspond to a MERV13 or MERV14 filter) or might be omitted. Thus, some combination of a device filter and membrane 770 may be used to preclude or reduce entry of dust into system 700.

[0079] Cooling system 700 operates in an analogous manner to cooling system 100. In some embodiments, cooling system 700 transfers heat from a portion of the device (not shown) in which system 700 is incorporated to heat-generating structure 702 (e.g. a heat spreader) and cooling cells 701 via thermal conduction. Cooling element 720 is activated to undergo vibrational motion (e.g. in a see-saw/out-of-phase configuration). The vibrational motion of cooling element 720 draws fluid (e.g. air) into aperture opening 773, through flow chamber 771, and in through vent 712. The vibrational motion also drives the fluid through flow chamber 740/450, and drives the fluid out of flow chamber 740/450 via orifices/egresses 732. The fluid impinges on heat-generating structure 702 and travels out of cooling system 732 via the jet channel. The fluid transfers heat from cooling cells 701, heat-generating structure 702 and other portions of cooling system 700. Thus, portions of the device in which cooling system 700 is incorporated also have heat transferred to the fluid. Cooling system 700 may thus efficiently cool.

[0080] Cooling system 700 shares the benefits of cooling systems 100, 200, 300, and/or 400. Thus, fluid driven by cooling system 700 efficiently cools heat spreader 702 and, therefore, structures that are thermally coupled (e.g. via conduction) with heat spreader 702. The performance of a device employing cooling system 700 may be improved. The presence of thermally conductive layer 780 may improve the efficiency of cooling system 700. Thus, efficiency of cooling system 700 may be improved. This improvement may be achieved while maintaining the desired vibration isolation between cells 701. The use of membrane 770 improves the reliability of system 700 by reducing or preventing the entry of dust into flow chamber 740/750. This improvement may be achieved without significant reduction in the flow of fluid through system 700. For example, use of membrane 770 that is sufficiently thin (e.g. nominally two hundred micrometers in thickness for MERV14 characteristics) mitigates issues due to dust while reducing fluid flow by five percent or less. Membrane 770 may also reduce noise due to system 700. Consequently, performance of system 700 may be improved.

[0081] FIGS. 8A-8B depict an embodiment of active MEMS heat transfer system 800 including an enhanced cover. FIG. 8 A depicts a side view of MEMS cooling system 800, while FIG. 8B depicts a top view of a portion of the flow chamber in which a membrane resides. MEMS cooling system 800 may also be considered to be a heat transfer or fluid transfer system. For example, transfer of the fluid by cooling system 800 removes heat from heat-generating structure 802 and from devices (e.g. processors and/or batteries) to which heat-generating structure 802 is coupled. However, for simplicity, system 800 is referred to as a cooling system. Although a single cooling cell is shown in FIG. 8, multiple cooling cells may be provided. FIG. 8 is not to scale. For simplicity, only portions of cooling system 800 are shown. Cooling system 800 is analogous to cooling system(s) 100, 200, 300, 400, 500, 600, 600’, and/or 700. Consequently, analogous components have similar labels. For example, cooling system 800 is used in conjunction with heat-generating structure 802, which is analogous to heat-generating structure(s) 102, 202, 302, 402, 502, and 602. In the embodiment shown, heat-generating structure 802 is a heat spreader that is integrated into system 800. Heat spreader 802 is thermally coupled with heat source(s), such as integrated circuit(s), battery/batteries, and/or components that are desired to be cooled.

[0082] Cooling system 800 includes top plate 810 having vent(s) 812 (only one of which is shown), cooling element 820 having tip 821, orifice plate 830 including orifices 832 and cavities 834, top chamber 840 having a gap, bottom chamber 850 having a gap, flow chamber 840/450, and anchor (i.e. support structure) 860 that are analogous to top plate 110 having vent 112, cooling element 120 having tip 121, orifice plate 130 including orifices 132 and cavities 134, top chamber 140 having gap 142, bottom chamber 150 having gap 152, flow chamber 140/150, and anchor (i.e. support structure) 160, respectively. Also shown is pedestal 890 that is analogous to pedestal 190. Cooling system 800 also includes an enhanced cover 806 including insulating layers 882 and 884 and thermally conductive layer 880 that are analogous to, e.g. enhanced cover 406 including insulating layers 482 and 484 and thermally conductive layer 480. Cooling element 820 is centrally supported by anchor 860 such that at least a portion of the perimeter of cooling element 820 is free to vibrate. In some embodiments, anchor 860 extends along the axis of cooling element 220. In other embodiments, anchor 860 is only near the center portion of cooling element 820. In some embodiments, cooling element 820 includes an anchored region and cantilevered arms including step region, extension region, and outer regions analogous to anchored region 122, cantilevered arms 123, step region 124, extension region 126, and outer region 128 of cooling element 120’. In some embodiments, cantilevered arms of cooling element 820 are driven in- phase. In some embodiments, cantilevered arms of cooling element 820 are driven out-of- phase. In some embodiments, cooling system 800 includes multiple cooling cells analogous to cooling cells 301.

[0083] Cooling system 800 also includes membrane 870 that may fimction as a dust cover, flow chamber 871, support members 872, and opening 873 that are analogous to membrane 770, flow chamber 771, support members 772, and opening 773, respectively. However, support members 872 are integrally formed as part of the inner wall of flow chamber 871. Consequently, support members 872 are indicated by dashed lines in FIG 8B. in the embodiment shown, a central support member 872 extends across flow chamber 871. Thus, aperture 812 may be considered a split aperture.

[0084] Membrane 870 is utilized to reduce or prevent the entry of dust into chambers 840 and 850. Membrane 870 thus shares the characteristics of membrane 770. In some embodiments, membrane 870 may be used in conjunction with a filter on the inlet(s) and/outlet(s) of the device in which cooling system 800 is incorporated. Thus, some combination of a device filter and membrane 870 may be used to preclude or reduce entry of dust into system 800.

[0085] Cooling system 800 operates in an analogous manner to cooling systems 100 and 700. Thus, cooling system 800 shares the benefits of cooling systems 100, 200, 300, 400, and/or 700. Thus, fluid driven by cooling system 800 efficiently cools heat spreader 802 and, therefore, structures that are thermally coupled (e.g. via conduction) with heat spreader 802. The performance of a device employing cooling system 800 may be improved. The presence of thermally conductive layer 880 may improve the efficiency of cooling system 800. Thus, efficiency of cooling system 800 may be improved. This improvement may be achieved while maintaining the desired vibration isolation between cells 801. The use of membrane 870 improves the reliability of system 800 by reducing or preventing the entry of dust into flow chamber 840/750. This improvement may be achieved without significant reduction in the flow of fluid through system 800. Membrane 870 may also reduce noise due to system 800. Consequently, performance of system 800 may be improved.

[0086] FIG. 9 depicts an embodiment of method 900 for declogging a port of an active cooling mems system. Method 900 may include steps that are not depicted for simplicity. Method 900 is described in the context of system 700. However, method 700 may be used with other cooling systems including but not limited to system 800.

[0087] An actuator (e.g. a cooling element) is driven in a first vibrational mode and at a first frequency for normal usage, at 902. For example, the cantilevered arms of the cooling element may be driven out-of-phase. Thus, the actuator may be driven to oscillate, or vibrate. Fluid may flow through the system and cool the desired structures.

[0088] The actuator is driven in a second vibrational mode at a second frequency to declog a membrane or other structure that may collect dust, at 904. For example, the cantilevered arms of the cooling element may be driven in-phase. Thus, the actuator oscillates in a different manner than at 9O2.The activation of the actuator at 904 is at a second frequency that is different from the first frequency. 904 may take place for a short time, for example for a few seconds or less in some embodiments. Other times may be used in other embodiments. Normal usage may be resumed at 906.

[0089] For example, cooling element 720 of cooling system 700 may be activated at 902. In some embodiments, cooling element 720 is driven out-of-phase. Thus, the cantilevered arms of cooling element 720 may vibrate out-of-phase, in a see-saw manner as depicted in FIGS. 1E-1F. In some embodiments, the frequency/frequencies used to drive cooling element 720 may be in the 23-24 kHz range. However, other frequencies are possible Fluid is drawn in through opening 773 and inlet 712, directed through chambers 740 and 750 and driven out of orifices 732. Thus, cooling system 700 may be used to drive fluid flow and cool heat spreader 702 and structures thermally connected to heat spreader 702. Further, dust may collect on membrane 770.

[0090] Cooling element 720 is driven in a second vibrational mode at a second frequency, at 904. In some embodiments, cooling element 720 is driven in-phase at 904. Thus, the cantilevered arms of cooling element 720 may vibrate in-phase, in a butterfly manner as depicted in FIGS. 1C-1D. In some embodiments, the frequency/frequencies used to drive cooling element 720 may be in the 27-28 kHz range. However, other frequencies are possible. Fluid is expelled from opening 773. In some embodiments, a substantially synthetic flow is formed. Thus, fluid may be drawn into and then expelled from opening 773 in an oscillating manner with little or no net fluid flow. Fluid being expelled from opening 773 may unclog or reduce clogging of membrane 770. Stated differently, some or all of the dust that accumulates on membrane. In some embodiments, 904 takes place at scheduled intervals. In some embodiments, 904 may be carried out at scheduled intervals and/or in response to conditions such as a reduction in flow or a user request. Normal operation may then resume at 906.

[0091] Using method 900, performance of systems 700 and/or 800 may be improved. In particular, the lifetime of systems 700 and/or 800 may be fijrther extended by the ability to remove particles from membranes 770 and 880. Thus, not only may systems described herein provide efficient fluid flow, heat transfer, and cooling, but reliability and lifetime may be improved.

[0092] FIG. 10 depicts an embodiment of method 1000 for using an active cooling system. Method 1000 may include steps that are not depicted for simplicity. Method 1000 is described in the context of system 400. However, method 1000 may be used with other cooling systems including but not limited to systems and cells described herein.

[0093] A driving signal at a frequency and an input voltage corresponding to the resonant state of one or more cooling elements is provided to the active MEMS cooling system, at 1002. In some embodiments, a driving signal having the frequency corresponding to the resonant frequency of a specific cooling element is provided to that cooling element. In some embodiments, a driving signal is provided to multiple cooling elements. In such embodiments, the frequency of the driving signal corresponds to the resonant state of one or more cooling elements being driven, a statistical measure of the resonance, and/or within a threshold of the resonance as discussed above.

[0094] Characteristic(s) of the MEMS cooling system are monitored while the cooling element(s) are driven to provide a feedback signal corresponding to a proximity to a resonant state of the cooling element(s), at 1004. In some embodiments, characteristic(s) of each individual cooling element are monitored to determine the deviation of the frequency of vibration for that cooling element from the resonant frequency of that cooling element. In some embodiments, characteristic(s) for multiple cooling elements are monitored at 1004. The characteristic(s) monitored may be a proxy for resonance and/or a deviation therefrom. For example, the voltage at the cooling element, the power drawn by the cooling element, power output by the power source, peak-to-peak current output by the power source, peak voltage output by the power source, average current output by the power source, RMS current output by the power source, average voltage output by the power source, amplitude of displacement of the at least one cooling element, RMS current through the cooling element, peak voltage at the cooling element, average current through the cooling element, average voltage at the at least one cooling element, and/or the peak current drawn by the cooling element may be monitored. Using the characteristic(s) monitored, a deviation from the resonant state of the cooling element (e.g. deviation of the driving/vibration frequency from the resonant frequency) may be determined.

[0095] The frequency and/or input voltage is adjusted based on the feedback signal, at 1006. More specifically, 1006 includes updating the frequency and/or input voltage, based on the feedback signal, to correspond to resonant state(s) of the cooling element(s) at 1006. For example, the frequency for the drive signal may be updated to more closely match the resonant frequency/frequencies. In some embodiments, updating the frequency includes changing the frequency to correspond to a power drawn corresponding to the vibration of the cooling element(s) being maximized, a voltage provided at the cooling element(s) being maximized, a voltage across the cooling element(s) being minimized, and/or an amplitude of a current drawn by the at least one cooling element being minimized. In some embodiments, 1006 includes determining whether the feedback signal indicates that a drift in the resonant frequency of the cooling element(s) exceeds a threshold and identifying a new frequency in response to a determination that the drift exceeds the threshold. The new frequency accounts for the drift in the resonant frequency. The method also includes setting the new frequency as the frequency for the driving signal in response to the new frequency being identified.

[0096] For example, cooling element 420 in MEMS cooling system 400 is driven, at 1002. Thus, the cooling element 420 is driven at a frequency that is at or near resonance for one or more of the cooling elements.

[0097] Characteristics of cooling element 420 within MEMS cooling system 400 or WOOD are monitored, at 1004. Thus, the drift of the cooling element(s) 420 from resonance may be determined. The frequency may be adjusted based on the monitoring of 1004, at 1006. Thus, MEMS cooling system 400 may be kept at or near resonance.

[0098] Thus, using method 1000, an active cooling system, such as cooling system(s) 100, 200, 300, 400, 500, 600, 600’, 700, 700’, and/or 800 may be efficiently driven. These cooling systems are also configured for improved alignment, symmetry, efficiency, and/or reliability. Thus, method 1000 may be used to operate active MEMS cooling systems and achieve the benefits described herein.

[0099] Although the foregoing embodiments have been described in some detail for purposes of clarity of understanding, the invention is not limited to the details provided.

There are many alternative ways of implementing the invention. The disclosed embodiments are illustrative and not restrictive.