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Title:
CRUCIBLE AND EVAPORATION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/090967
Kind Code:
A1
Abstract:
Disclosed are a crucible and an evaporation method. The crucible comprises a first crucible body (101), and a second crucible body (102) arranged in the opposite first crucible body (101), wherein a cavity structure is enclosed between the first crucible body (101) and the second crucible body (102) to enable the cross section of the cavity to be annular, and the cavity is used for containing evaporation materials (300); and a first heating component (201) is arranged around an outer wall face, facing away from the second crucible body (102), of the first crucible body (101), and a second heating component (202) is arranged around an inner wall face, facing away from the first crucible body, of the second crucible body. The crucible further comprises a heating control system, wherein the heating control system controls the first heating component (201) and the second heating component (202) so that same heat for different periods of time. By performing evaporation through the arrangement, the problems of deformation or cracking of the crucible do not occur.

Inventors:
QIAO, Xiaoping (No. 9-2, Tangming RdGuangming New Distric, Shenzhen Guangdong 2, 518132, CN)
LI, Jinchuan (No. 9-2, Tangming RdGuangming New Distric, Shenzhen Guangdong 2, 518132, CN)
Application Number:
CN2018/072620
Publication Date:
May 16, 2019
Filing Date:
January 15, 2018
Export Citation:
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Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. (No. 9-2, Tangming Rd Gongming Street,Guangming New Distric, Shenzhen Guangdong 2, 518132, CN)
International Classes:
C23C14/24; F27B14/04
Foreign References:
CN205473956U2016-08-17
CN206289297U2017-06-30
CN106756805A2017-05-31
CN105964318A2016-09-28
CN102373420A2012-03-14
CN102121093A2011-07-13
EP0982411A22000-03-01
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (Room 1508, Huihua Commercial & Trade BuildingNo. 80, Xianlie Zhong Road, Yuexiu Distric, Guangzhou Guangdong 0, 510070, CN)
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