Title:
CRYO PUMP, AND VACUUM PUMPING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/055465
Kind Code:
A1
Abstract:
Disclosed is a cryo pump (10) comprising: a first cryo panel that comprises a radiation shield (18) having a shield opening (20) and a louver (23) arranged on the shield opening (20); a second cryo panel (24) surrounded by the first cryo panel; and a freezing machine (14) for cooling the first cryo panel to a first cooling temperature and cooling the second cryo panel to a second cooling temperature that is lower than the first cooling temperature. The louver (23) has a rough surface (42) formed thereon.
Inventors:
TANAKA HIDEKAZU (JP)
Application Number:
PCT/JP2010/000944
Publication Date:
May 12, 2011
Filing Date:
February 16, 2010
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
TANAKA HIDEKAZU (JP)
TANAKA HIDEKAZU (JP)
International Classes:
F04B37/08; F04B37/16
Foreign References:
| JPS6027790A | 1985-02-12 | |||
| JPH01215591A | 1989-08-29 | |||
| JPH0565874A | 1993-03-19 | |||
| JP2005256771A | 2005-09-22 | |||
| JP2006103343A | 2006-04-20 | |||
| JPH04121479U | 1992-10-29 | |||
| JPS63183279A | 1988-07-28 |
Attorney, Agent or Firm:
MORISHITA, SAKAKI (JP)
Sakaki Morishita (JP)
Sakaki Morishita (JP)
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