Title:
CRYOGENIC SUSCEPTOR AND ELECTRIC CONNECTOR ASSEMBLY USED THEREIN
Document Type and Number:
WIPO Patent Application WO/2023/106445
Kind Code:
A1
Abstract:
Disclosed is a susceptor which can operate with durability, even at a low or cryogenic temperature. The present invention provides a susceptor characterized by comprising: a base member; a ceramic plate having electrodes on the base member; and an electrode connector assembly for applying power to the electrodes of the ceramic plate through the base member. The electrode connector assembly comprises: a first connector terminal which is the end in contact with the electrodes; a second connector terminal which is the end where power is input; and a connector rod connecting the first connector terminal and the second connector terminal.
Inventors:
KIM HYEKYONG (KR)
JI MINHO (KR)
JI MINHO (KR)
Application Number:
PCT/KR2021/018530
Publication Date:
June 15, 2023
Filing Date:
December 08, 2021
Export Citation:
Assignee:
MICO CERAM LTD (KR)
International Classes:
H01L21/683; B23Q3/15; H01L21/687; H02N13/00
Foreign References:
| JP2015088745A | 2015-05-07 | |||
| JP2002141404A | 2002-05-17 | |||
| JP2014138164A | 2014-07-28 | |||
| JP2020047638A | 2020-03-26 | |||
| US20130220545A1 | 2013-08-29 |
Attorney, Agent or Firm:
HMP IP GROUP (KR)
Download PDF: