Title:
CRYOPUMP WITH ENHANCED FRONTAL ARRAY
Document Type and Number:
WIPO Patent Application WO/2019/099728
Kind Code:
A8
Abstract:
A cryopump has a cryogenic refrigerator with a cold stage and a colder stage that cool a radiation shield (20) having sides, a closed end and a frontal opening (204). A primary cryopumping array (130) is thermally coupled to the colder stage, and a frontal array (206) is thermally coupled and cooled. The frontal array (206) is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array (130), the frontal array (206) being recessed from the frontal opening (204) and closer to the primary cryopumping array (130) than to the frontal opening (204).
Inventors:
CASELLO JOHN (US)
MAHONEY PAUL (US)
MAHONEY PAUL (US)
Application Number:
PCT/US2018/061367
Publication Date:
July 02, 2020
Filing Date:
November 15, 2018
Export Citation:
Assignee:
EDWARDS VACUUM LLC (US)
International Classes:
F04B37/08
Attorney, Agent or Firm:
SMITH, James, M. et al. (US)
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