Title:
CRYOPUMP WITH HIGH OCCLUSION LIMIT
Document Type and Number:
WIPO Patent Application WO/2019/062037
Kind Code:
A1
Abstract:
Disclosed is a cryopump with a high occlusion limit mounted in a vacuum chamber. The cryopump comprises a housing (2), a low-temperature cold source, a radiation cooling shield (3) located in the housing (2) and a low-temperature plate assembly (7) surrounded by the radiation cooling shield (3), wherein the low-temperature cold source comprises a refrigerator cold head (4), the refrigerator cold head (4) comprises a second stage cooling station (42) and a first stage cooling station (41) arranged coaxially, the radiation cooling shield (3) is connected by heat to the first stage cooling station (41), the low-temperature plate assembly (7) is in thermal connection with the second stage cooling station (42), the housing (2) is provided with a gas inlet (1) with a gas intake direction thereof being axially orthogonal to the refrigerator cold head (4), and the low-temperature plate assembly (7) is movably mounted on the second stage cooling station (42) and can rotate around the second stage cooling station (42). The low-temperature plate assembly of the cryopump is able to more closely approach the gas inlet by means of rotational movement thereof, thereby realizing good condensation and adsorption of gas at the gas inlet.
Inventors:
WU YIFENG (CN)
DENG JIALIANG (CN)
DENG JIALIANG (CN)
Application Number:
PCT/CN2018/078722
Publication Date:
April 04, 2019
Filing Date:
March 12, 2018
Export Citation:
Assignee:
ANHUI VACREE TECH CO LTD (CN)
International Classes:
F04B37/08; F04B39/00; F04B39/06
Foreign References:
| CN107605700A | 2018-01-19 | |||
| CN102400888A | 2012-04-04 | |||
| CN105484968A | 2016-04-13 | |||
| CN102588247A | 2012-07-18 | |||
| US20070256429A1 | 2007-11-08 | |||
| JP2010196632A | 2010-09-09 | |||
| JP2011137423A | 2011-07-14 |
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