Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2005/050017
Kind Code:
A1
Abstract:
A cryopump in which the volume of gas absorbed is increased without increasing the size of the cryopump by providing tubular panels (41, 42) having a surface parallel with the inflow direction of gas at the gas inflow section through which gas flows from a vacuum chamber (8) into a cryopanel (34).
Inventors:
TANAKA HIDEKAZU (JP)
Application Number:
PCT/JP2004/017016
Publication Date:
June 02, 2005
Filing Date:
November 16, 2004
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
TANAKA HIDEKAZU (JP)
TANAKA HIDEKAZU (JP)
International Classes:
F04B37/08; (IPC1-7): F04B37/08
Foreign References:
| JPS4643740B1 | 1971-12-25 | |||
| JPH02294573A | 1990-12-05 | |||
| JPH07507855A | 1995-08-31 | |||
| JPS62113876A | 1987-05-25 |
Attorney, Agent or Firm:
Takaya, Satoshi (10-12 Yoyogi 2-chome, Shibuya-k, Tokyo 53, JP)
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