Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2012/109304
Kind Code:
A3
Abstract:
A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
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Inventors:
SYSSOEV SERGEI (US)
BARTLETT ALLEN J (US)
CASELLO JOHN J (US)
WELLS JEFFREY A (US)
EACOBACCI MICAHEL J (US)
BARTLETT ALLEN J (US)
CASELLO JOHN J (US)
WELLS JEFFREY A (US)
EACOBACCI MICAHEL J (US)
Application Number:
PCT/US2012/024243
Publication Date:
November 29, 2012
Filing Date:
February 08, 2012
Export Citation:
Assignee:
BROOKS AUTOMATION INC (US)
SYSSOEV SERGEI (US)
BARTLETT ALLEN J (US)
CASELLO JOHN J (US)
WELLS JEFFREY A (US)
EACOBACCI MICAHEL J (US)
SYSSOEV SERGEI (US)
BARTLETT ALLEN J (US)
CASELLO JOHN J (US)
WELLS JEFFREY A (US)
EACOBACCI MICAHEL J (US)
International Classes:
F04B37/08
Foreign References:
| US4555907A | 1985-12-03 | |||
| DE3216591A1 | 1983-11-10 | |||
| GB1531378A | 1978-11-08 | |||
| GB2061391A | 1981-05-13 | |||
| US4896511A | 1990-01-30 |
Attorney, Agent or Firm:
SMITH, James M. et al. (Brook Smith & Reynolds, P.C.,530 Virginia Rd, P.O. Box 913, Concord MA, US)
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