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Patent Searching and Data


Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2018/147180
Kind Code:
A1
Abstract:
A cryopump (10) is equipped with: a refrigerator (16) that is equipped with a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield (30) that is thermally coupled to the high-temperature cooling stage and extends, with a cylindrical shape, in the axial direction from a cryopump intake port; and a low-temperature cryopanel portion that is thermally coupled to the low-temperature cooling stage and surrounded by the radiation shield (30), and that is equipped with a plurality of cryopanels (60) and a plurality of heat-transfer members (62) which are arranged, with a columnar shape, in the axial direction, the plurality of cryopanels (60) and the plurality of heat-transfer members (62) being stacked on one another in the axial direction.

Inventors:
TAKAHASHI Kakeru (LTD. Tanashi Works 1-1, Yato-cho 2-chom, Nishitokyo-shi Tokyo 85, 〒1888585, JP)
Application Number:
JP2018/003572
Publication Date:
August 16, 2018
Filing Date:
February 02, 2018
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD. (1-1 Osaki 2-chome, Shinagawa-ku Tokyo, 25, 〒1416025, JP)
International Classes:
F04B37/16; F04B37/08
Foreign References:
JPH03151577A1991-06-27
JPS6119987A1986-01-28
JP2014227989A2014-12-08
JP2009062891A2009-03-26
Attorney, Agent or Firm:
MORISHITA Sakaki (2-11-12, Ebisu-Nishi Shibuya-ku Tokyo, 21, 〒1500021, JP)
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