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Patent Searching and Data

Document Type and Number:
WIPO Patent Application WO/2018/147181
Kind Code:
A cryopump (10) is equipped with: a refrigerator (16) that is equipped with a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield (30) that is thermally coupled to the high-temperature cooling stage and extends, with a cylindrical shape, in the axial direction from a cryopump intake port; a low-temperature cryopanel portion that is thermally coupled to the low-temperature cooling stage and surrounded by the radiation shield (30), and that is equipped with a plurality of cryopanels (60) which are arranged in the axial direction and include a top cryopanel (60a) disposed closest to the cryopump intake port; and an entrance cryopanel (32) that is thermally coupled to the high-temperature cooling stage, is disposed on the cryopump intake port, and forms a top cryopanel housing compartment (74).

TAKAHASHI Kakeru (LTD. Tanashi Works 1-1, Yato-cho 2-chom, Nishitokyo-shi Tokyo 85, 〒1888585, JP)
Application Number:
Publication Date:
August 16, 2018
Filing Date:
February 02, 2018
Export Citation:
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SUMITOMO HEAVY INDUSTRIES, LTD. (1-1 Osaki 2-chome, Shinagawa-ku Tokyo, 25, 〒1416025, JP)
International Classes:
F04B37/16; F04B37/08
Foreign References:
Attorney, Agent or Firm:
MORISHITA Sakaki (2-11-12, Ebisu-Nishi Shibuya-ku Tokyo, 21, 〒1500021, JP)
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