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Patent Searching and Data

Document Type and Number:
WIPO Patent Application WO/2018/147187
Kind Code:
A low-temperature cryopanel part of this cryopump is provided with two cryopanel members (62) disposed on both sides of a low-temperature cooling stage with a cryopump center axis therebetween. Each of the cryopanel members (62) is provided with: a bow-shaped flat part (75), having a circular arc portion (78) and a string (79); and a first bent part (76) integrally formed with the bow-shaped flat part (75) and connected to the bow-shaped flat part (75) at a portion of the string (79). The bow-shaped flat part (75) is thermally coupled to the low-temperature cooling stage through the first bent part (76). The shape of the remaining portion of the string of the bow-shaped flat part (75) of each of the cryopanel members (62) is determined so as to allow the two cryopanel members (62) to be interchangeable without interfering with a refrigerator.

YATSU Takahiro (LTD. Tanashi Works 1-1, Yato-cho 2-chom, Nishitokyo-shi Tokyo 85, 〒1888585, JP)
Application Number:
Publication Date:
August 16, 2018
Filing Date:
February 02, 2018
Export Citation:
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SUMITOMO HEAVY INDUSTRIES, LTD. (1-1 Osaki 2-chome, Shinagawa-ku Tokyo, 25, 〒1416025, JP)
International Classes:
F04B37/08; F04B37/16
Foreign References:
Attorney, Agent or Firm:
MORISHITA Sakaki (2-11-12, Ebisu-Nishi Shibuya-ku Tokyo, 21, 〒1500021, JP)
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