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Patent Searching and Data


Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2018/164011
Kind Code:
A1
Abstract:
The cryopump 10 is provided with: a freezer 16 comprising a room-temperature part, a first cooling stage, and a second cooling stage; and a cryopump housing 70 comprising a radiation shield thermally coupled to the first cooling stage and surrounding the second cooling stage without making contact with the second cooling stage, a shield housing part 74 which has an intake port 12 and a housing bottom surface 70a disposed on the opposite side from the intake port 12 and which surrounds the radiation shield without making contact with the radiation shield, and a freezer housing part 76 which connects the shield housing part 74 to the room-temperature part 26 of the freezer 16. A first heater 84 disposed on an outer surface of the freezer housing part 76, or a second heater disposed on the housing bottom surface 70a, or a heat transfer member thermally coupled to the first cooling stage and disposed in a gap between the freezer housing part 76 and the freezer 16 is provided so as to apply heat into the cryopump housing 70 from the outside.

Inventors:
SHIMOMURA Makoto (LTD. Tanashi Works 1-1, Yato-cho 2-chom, Nishitokyo-shi Tokyo 85, 〒1888585, JP)
Application Number:
JP2018/008132
Publication Date:
September 13, 2018
Filing Date:
March 02, 2018
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD. (1-1 Osaki 2-chome, Shinagawa-ku Tokyo, 25, 〒1416025, JP)
International Classes:
F04B37/08; F04B37/16
Foreign References:
JP2016160884A2016-09-05
JP2008223538A2008-09-25
JP2016153617A2016-08-25
Attorney, Agent or Firm:
MORISHITA Sakaki (2-11-12, Ebisu-Nishi Shibuya-ku Tokyo, 21, 〒1500021, JP)
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