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Patent Searching and Data


Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2019/163760
Kind Code:
A1
Abstract:
A cryopump (10) is provided with: a cryopump housing (70); and a water-absorbing layer (80) attached to the exterior of the cryopump housing (70). The cryopump (10) may further be provided with a heat insulation layer (82) disposed between the cryopump housing (70) and the water-absorbing layer (80). The cryopump (10) may be provided with a water-absorbing heat insulation sheet (84) which includes the water-absorbing layer (80) on the outer side and the heat insulation layer (82) on the inner side.

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Inventors:
YATSU Takahiro (LTD. Tanashi Works 1-1, Yato-cho 2-chom, Nishitokyo-shi Tokyo 85, 〒1888585, JP)
Application Number:
JP2019/006063
Publication Date:
August 29, 2019
Filing Date:
February 19, 2019
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD. (1-1 Osaki 2-chome, Shinagawa-ku Tokyo, 25, 〒1416025, JP)
International Classes:
F04B37/08
Foreign References:
JP2000161214A2000-06-13
JPH06154505A1994-06-03
JP2003121044A2003-04-23
JP2017178349A2017-10-05
Attorney, Agent or Firm:
MORISHITA Sakaki (2-11-12, Ebisu-Nishi Shibuya-ku Tokyo, 21, 〒1500021, JP)
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