Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2019/163762
Kind Code:
A1
Abstract:
A cryopump 10 is provided with: a cryopump housing 16; a cryogenic refrigerator 14 provided with an expander 18 which is attached to the cryopump housing 16, and a compressor 20 which collects a working gas from the expander 18, compresses the working gas, and supplies the compressed working gas to the expander 18; a purge gas line 22 which supplies a purge gas to the cryopump housing 16; and a first heat exchanger 26 provided to the purge gas line 22 so as to heat the purge gas using exhaust heat from the compressor 20.
Inventors:
NAKAMURA MASATOSHI (JP)
Application Number:
PCT/JP2019/006065
Publication Date:
August 29, 2019
Filing Date:
February 19, 2019
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F04B37/08; F04B37/16
Foreign References:
| JP2015175342A | 2015-10-05 | |||
| DE102015213527A1 | 2017-01-19 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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