Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2019/168014
Kind Code:
A1
Abstract:
This cryopump 10 is provided with: a refrigerator 16 including a first cooling stage 22 and a second cooling stage 24; a radiation shield 30 which surrounds the second cooling stage 24 and extends in an axial direction, and which is thermally coupled with the first cooling stage 22; a plurality of adsorbent cryo-panels 60 which are arranged between an intake opening 12 and the second cooling stage 24 in the axial direction, and are thermally coupled with the second cooling stage 24; and a condensation cryo-panel 68 which is arranged between the radiation shield 30 and the plurality of adsorbent cryo-panels 60 in a radial direction, and is thermally coupled with the second cooling stage 24, the condensation cryo-panel 68 extending in the axial direction and having a tubular shape with both ends opened.
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Inventors:
GOTANDA SYUHEI (JP)
Application Number:
PCT/JP2019/007522
Publication Date:
September 06, 2019
Filing Date:
February 27, 2019
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F04B37/08; F04B37/02; F04B37/16
Foreign References:
| JP2010048132A | 2010-03-04 | |||
| JPH0180681U | 1989-05-30 | |||
| JP2017180451A | 2017-10-05 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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