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Patent Searching and Data


Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2019/168014
Kind Code:
A1
Abstract:
This cryopump 10 is provided with: a refrigerator 16 including a first cooling stage 22 and a second cooling stage 24; a radiation shield 30 which surrounds the second cooling stage 24 and extends in an axial direction, and which is thermally coupled with the first cooling stage 22; a plurality of adsorbent cryo-panels 60 which are arranged between an intake opening 12 and the second cooling stage 24 in the axial direction, and are thermally coupled with the second cooling stage 24; and a condensation cryo-panel 68 which is arranged between the radiation shield 30 and the plurality of adsorbent cryo-panels 60 in a radial direction, and is thermally coupled with the second cooling stage 24, the condensation cryo-panel 68 extending in the axial direction and having a tubular shape with both ends opened.

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Inventors:
GOTANDA Syuhei (LTD. Tanashi Works 1-1, Yato-cho 2-chom, Nishitokyo-shi Tokyo 85, 〒1888585, JP)
Application Number:
JP2019/007522
Publication Date:
September 06, 2019
Filing Date:
February 27, 2019
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD. (1-1 Osaki 2-chome, Shinagawa-ku Tokyo, 25, 〒1416025, JP)
International Classes:
F04B37/08; F04B37/02; F04B37/16
Foreign References:
JP2010048132A2010-03-04
JPH0180681U1989-05-30
JP2017180451A2017-10-05
Attorney, Agent or Firm:
MORISHITA Sakaki (2-11-12, Ebisu-Nishi Shibuya-ku Tokyo, 21, 〒1500021, JP)
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