HIRANO YOSHIHIRO
UCHIKAWA AKIRA
EP0460477A1 | 1991-12-11 | |||
US5350336A | 1994-09-27 | |||
US4530272A | 1985-07-23 | |||
US4350560A | 1982-09-21 |
PATENT ABSTRACTS OF JAPAN vol. 17, no. 700 (C - 1145) 21 December 1993 (1993-12-21)
1. | A crystal puller cell located within a growing hall and providing a Czochralski type crystal puller with an environment having reduced airborne particulate contamination, comprising: plural cell walls and a cell ceiling isolating the environment within the cell from the environment in a growing hall outside the cell; a first floor positioned at a first level for supporting a crystal puller; a second floor for accessing the crystal puller; and an adjustable air contamination control system for maintaining airborne particulate within the cell below a specified level, the specified level being adjustable to correspond to the activity performed in the housing and being controllable independently of the flow rate in the growing hall outside of the cell. |
2. | The crystal puller cell of claim 1 in which the second floor comprises a multilevel operations floor having a second level and an intermediate level, the second level positioned at a height appropriate for loading raw material and unloading finished crystals and the intermediate level positioned at a height appropriate for maintaining the crystal puller. |
3. | The crystal puller cell of claim 1 in which at least one of the plural walls includes a magnetic shielding material. |
4. | The crystal puller cell of claim 3 in which the magnetic shielding material includes a metal alloy. |
5. | The crystal puller cell of claim 3 in which the magnetic shielding material includes a low carbon, mild steel . |
6. | The crystal puller cell of claim 1 in which the adjustable air contamination control system includes means for operating in a low and high airflow mode. |
7. | The crystal puller cell of claim 1 in which the adjustable air contamination control system includes means for operating in a low, moderate, high, and purge airflow mode. |
8. | The crystal puller cell of claim 1 in which the adjustable air contamination control unit includes a high efficiency particulate air filter and means for supplying air through the filter. |
9. | The crystal puller cell of claim 1 in which the adjustable air contamination control unit includes a variable air volume damper and a variable frequency drive motor. |
10. | The crystal puller cell of claim 1 in which the ceiling comprises a grid frame including an air filter housing, lighting fixtures, and a sprinkler head. |
11. | The crystal puller cell of claim 1 in which the walls comprise prefabricated metal walls. |
12. | The crystal puller cell of claim 1 in which the base floor comprises a precast concrete pad. |
13. | The crystal puller cell of claim 1 further comprising a crystal puller having a remote control console located outside the crystal puller cell. |
14. | A crystalgrowing hall containing multiple crystal puller cells and providing an environment having airborne particulate levels compatible with the use of crystal puller cells, comprising: shell walls defining the interior of the growing hall; multiple crystal puller cells in accordance with claim 1 located within the growing hall; a clean aisle within the growing hall, the clean aisle maintaining a first airborne particulate level, and the second level of the crystal puller cells opening onto the clean aisle to enable operators to bring raw materials into and remove finished products from the crystal puller cells; and a maintenance aisle within the growing hall, the maintenance aisle maintaining a second airborne particulate level that is higher than the first airborne particulate level, and the crystal puller cells opening onto the maintenance aisle to enable maintenance workers to maintain the crystal pullers. |
15. | The crystalgrowing hall of claim 14 in which the second floor of at least one of the multiple crystal puller cells comprises a multilevel operations floor having a second level and an intermediate level, the second level being appropriate for loading raw material and unloading finished crystal and corresponding to the level of the clean aisle and the intermediate level being appropriate for maintaining the crystal puller and corresponding to the level of the maintenance aisle. |
16. | The crystalgrowing hall of claim 14 in which each of the crystal puller cells includes a door that opens onto the clean aisle and a door that opens onto the maintenance aisle, the doors being controlled by logic > circuitry that prevent cross contamination caused by opening both doors simultaneously. 24 17. |
17. | The crystalgrowing hall of claim 14 in which each of the crystal puller cells include a door that opens onto the clean aisle and a door that opens onto the maintenance aisle, the doors being controlled by logic circuitry that prevents cross contamination caused by opening doors when the particulate level within the crystal puller cell is incompatible with the particulate level in the aisle on the other side of the door. |
18. | The crystalgrowing hall of claim 14 in which the first particulate level is that of class 10,000 or better. |
19. | The crystalgrowing hall of claim 14 in which the second particulate level is that of a class 100,000 or better. |
20. | The crystalgrowing hall of claim 14 in which the crystal puller cells include magnetic shielding to reduce exposure of operators to intense magnetic fields and in which each of the crystal puller cells includes a door that opens onto the clean aisle and a door that opens onto the maintenance aisle, the doors being controlled by logic circuitry that prohibits opening the doors while a magnet within the crystal puller cell is energized. |
21. | The crystalgrowing hall of claim 14 further comprising a remote control console for operating a crystal puller within a crystal puller cell, the remote control console positioned outside of the puller cell and allowing a crystal puller operator to the crystal puller without entering the crystal puller cell. |
22. | The crystal growing hall of 21 further comprising a remote viewing instrument so that the crystal puller operator can observe conditions inside the crystal puller. |
23. | The crystal growing hall of 21 in which the remote control console allows the crystal puller operator to operate a multiple crystal pullers from a single location so that the productivity of the crystal puller operator is improved. |
24. | A crystalgrowing hall containing multiple crystal pullers and simultaneously providing multiple environments within the growing hall, each environment characterized by an airborne particulate level, the airborne particulate level in each environment being maintained at a level appropriate to the activities that occur with the environment, comprising: shell walls defining the interior of the growing hall; multiple crystal puller cells located within the interior of the growing hall, each puller cell having an cell interior environment, the airborne particulate in the cell interior environment being maintained at a level appropriate to the activity within the crystal puller cell at a particular time; a clean aisle maintaining an environment having a relatively low level of airborne particulate, the clean aisle connecting the crystal puller cells with a source of raw materials and a place to deposit grown crystals; and a maintenance aisle within the growing hall, the maintenance aisle maintaining an environment having an airborne particulate level higher than that of the clean aisle environment. |
25. | A method of operating a growing hall to reduce clean room costs and improve cleanliness, the growing hall being divided into clean aisles, maintenance aisles, and crystal puller cells, the method comprising: maintaining a first airborne particulate level in the maintenance aisle; maintaining a second airborne particulate level in the clean aisles, the second airborne particulate level being lower than the first airborne particulate level; and maintaining a third airborne particulate level in the crystal puller cell, the third airborne particulate level being selected from at least two possible levels, the selection being based upon the activities within the crystal puller cell. |
26. | The method of claim 25 in which each crystal puller cell has a door that opens onto the maintenance aisle and a door that opens onto the clean aisle and in which maintaining the third airborne particulate level includes selectively prohibiting air transfer between the crystal puller cell and the clean and maintenance aisles, the selective prohibition of air transfer being accomplished by precluding the opening of the door between the crystal puller cell and the respective clean and maintenance aisles when the third particulate level is not compatible with the respective first and second particulate levels. |
27. | The method of claim 25 in which each crystal puller cell has a door that opens onto the maintenance aisle and a door that opens onto the clean aisle and in which maintaining the first and second airborne particulate levels includes prohibiting the clean and maintenance aisle by precluding the simultaneous opening of both doors to crystal puller cell. |
Technical Field
This invention relates to facilities for growing
crystals for use in the semiconductor industry and, in
particular, to a crystal puller cell for housing a
Czochralski crystal puller and to a growing hall housing
multiple ones of such cells.
Background of the Invention
Integrated circuits are typically fabricated on
wafers of a single-crystal semiconductor material. The wafers are sliced from a single crystal ingot grown in a
Czochralski-type crystal growing machine, referred to as
a "crystal puller." Typically, many crystal pullers are
located within a single large room, called a "growing
hall." A control console located by each crystal puller
allows a crystal puller operator to control each crystal
puller in accordance with instrument readings and -
observations through an observation window of conditions within the crystal puller.
To grow an ingot, a seed crystal is dipped into a
crucible of molten semiconductor and then slowly
retracted as the seed and the crucible are rotated in
opposite directions. The semiconductor freezes onto the seed as it is retracted to produce a single crystal
ingot . Crystals are sometimes grown in the presence of a
strong magnetic field which, by controlling thermal
convection in the molten semiconductor, produces an ingot
having a more uniform amount of oxygen incorporated into
the ingot from the crucible walls.
The growing process begins with loading into a
crucible a "charge" of ultrapure polysilicon. A dopant
is often added to the charge to change the electrical
properties of the resultant crystal. A seed crystal
having the desired crystal orientation is then secured
within the crystal puller in a chuck attached to a cable
that is used to raise the seed, and a charged crucible is
loaded into the crystal puller. The section of the
crystal puller in which the seed crystal and the charge
are placed is called the "furnace tank." As the single--
crystal ingot is grown, it is received into a "pull
chamber" above the furnace tank. A "mechanical unit"
below the furnace tank includes motors and other
mechanical and electrical devices used in the crystal
growing process.
Before melting the charge, the air in the furnace
tank and pull chamber is evacuated and replaced with an
inert gas, such as argon. The crucible is rotated as the
charge within it is melted, typically using a resistant
heater. The seed crystal is dipped slightly into the
melted charge and slowly retracted to grow the ingot.
After the ingot is grown and cooled, the pull chamber is
opened and the ingot is removed.
Extremely small amounts of contamination in a
crystal can have severe adverse effects on the
characteristics of electronic circuits fabricated on the
crystal. It is critical, therefore, that airborne
contamination be minimized in the growing area. Although
clean room techniques for reducing airborne particulate
contamination are widely used in the semiconductor
industry, it is difficult and expensive to maintain a
high degree of cleanliness in a large growing hall . The
energy cost of providing the required volume of filtered
airflow is too great. Higher than optimum particulate
levels have, therefore, been tolerated in growing halls,
along with corresponding contamination of the grown
crystals .
Cross-contamination problems are much worse during
the installation of new equipment . Growing halls
typically include an overhead bridge crane that is used
to install new equipment and repair existing equipment.
Use of such an overhead crane produces particulate
contamination that settles down onto the active crystal
pullers .
To reduce contamination of the crystals during the
installation of new crystal pullers, one practice has
been to install several machines at one time in a
segregated area of the growing hall. Under these circumstances, the growing hall is not being continually
contaminated and disrupted by the installation of
individual machines.
Summary of the Invention
An object of the present invention is, therefore, to
provide a crystal-growing environment having a reduced
level of airborne particulate contamination.
Another object of this invention is to provide such
an environment at a reasonable cost and to achieve such
an environment at a minimum running cost .
A further object of this invention is to provide
such an environment capable of modular expansion.
Yet another object of this invention is to provide
such an environment that is capable of reducing exposure
of machine operators to magnetic fields.
Still another object of the present invention is to
improve the productivity of crystal puller operators.
The present invention is an economical, low
contamination environment for a crystal puller. The
environment includes a crystal-puller cell for housing a
crystal puller and a growing hall containing multiple
crystal puller cells.
The crystal puller cell comprises plural cell walls
that isolate the environment within the cell from the
environment in the growing hall outside the cell and a
base floor at a first level for mounting of a crystal
puller. Above the base floor is a second floor for
accessing the crystal puller. The second floor is
preferably a multi-level floor having a second, or
operator, level positioned at a height convenient for
loading the raw material and unloading the single crystal
and an intermediate, or maintenance, level positioned at
a height between the first and second levels and
convenient for maintaining the crystal puller. If a
crystal puller cell houses a crystal puller using a
magnetic process, the walls of the cell can be shielded-
to reduce exposure of workers and other equipment to the intense magnetic fields.
The crystal puller cell also includes an adjustable
air contamination control system for maintaining airborne
particulate within the cell below specified levels. The
particulate level specified at any particular time is
appropriate for the operation being performed within the
crystal-growing cell. For example, the specified
particulate level would be lowest, i.e., the environment within the cell would be cleanest, when the semiconductor
material is exposed to the environment, i.e., when the
raw material is being loaded and the single crystal is
being unloaded. A higher particulate level can be
tolerated when the crystal puller is operating and the
furnace tank and pull chamber are closed. An even higher
particulate level could be tolerated when the machine is
idle. By maintaining only the level of cleanliness
required, the costs associated with maintaining suitable
particulate levels are greatly reduced.
The area within the growing hall is divided into
three types of areas: puller cells, clean aisles, and
maintenance aisles. Each area has an environment
characterized by an airborne particulate level, which
corresponds to a level of cleanliness. A relatively high
degree of cleanliness is maintained in the clean aisles,
which are used to bring raw material to and finished
products from the puller cell. A lower degree of
cleanliness is maintained in the maintenance aisles,
which are used by maintenance workers to maintain the
crystal pullers.
Each crystal puller cell has two doors: a first
door, at the operator level, that opens onto a clean
aisle and a second door, at the maintenance level, that
opens onto a maintenance aisle. Cross contamination is
prevented by logic circuitry that electronically controls
the door locks to prevent both doors from being opened
simultaneously and to prevent either door from opening
when the environment within the puller cell is not
compatible with that outside the door.
By maintaining separate environments in areas in
which the semiconductor material is exposed to the
environment, a low particulate level can be maintained in
appropriate areas at a lower overall cost. Providing a
separate environment for each crystal puller not only
isolates each puller from contamination in the growing
hall, it allows a reduction in airflow when appropriate
in each cell, thereby further reducing costs. Moreover,
additional crystal puller cells and crystal pullers can
be installed with minimal contamination of existing
machines.
In accordance with another aspect of the invention,
a remote control console capable of controlling multiple
crystal pullers is located in a clean aisle away from the
doors of the puller cells. By observing instruments and
video images transmitted to the remote control panel from
a television camera positioned to observe conditions
within the crystal puller, an operator can operate the
multiple crystal pullers from one remote location,
thereby reducing contamination in the immediate vicinity
of the pullers, reducing operator exposure to magnetic
fields, and improving productivity by allowing a single
operator to operate more machines.
Additional objects and advantages of the present
invention will be apparent from the following detailed
description of a preferred embodiment thereof, which
proceeds with reference to the accompanying drawings.
Brief Description of the Drawings
Fig. 1 is a plan view of a growing hall • designed in accordance with the present invention.
Fig. 2 is a cross sectional view of a crystal puller
cell taken along line 2--2 of Fig. 1.
Fig. 3 shows a prefabricated ceiling unit used in
the crystal puller cell of Fig. 2.
Fig. 4 is a block diagram of a control unit used to control the puller cell of Fig. 2.
Fig. 5 is a schematic view of a remotely controlled
bay including several of the crystal puller cells of Fig.
2.
Detailed Description of Preferred Embodiments
Fig. 1 shows the layout of a crystal-growing hall 10
of the present invention. Hall 10 is contained within a
shell 12 formed from multiple walls 14 and a high ceiling
16 (Fig. 2) that provides an unobstructed, column-free
expanse for containing multiple crystal puller cells 18
of the present invention. Fig. 2 shows a cross sectional
view of a preferred crystal puller cell 18 of the present
invention within crystal-growing hall 10. The
environment within crystal puller cell 18 is isolated
from the environment within hall 10 by prefabricated
walls 24 and a prefabricated ceiling unit 26. Crystal
puller cell 18 houses a multi-story crystal puller 28,
which rests upon a prefabricated concrete pad 30, which,
in turn, rests upon a base floor 32.
The use of prefabricated components to construct
puller cell 18 eliminates the need for heavy construction
in growing hall 10, thereby reducing sources of
contamination. The use of prefabricated components also
reduces the time required to construct puller cell 18.
If a magnetic process is used in crystal puller
machine 28, prefabricated walls 24 can include a magnetic
shielding material, such as low carbon, mild steel, or
other appropriate metal alloy to prevent exposure of
machine operators and other machines to intense magnetic
fields. Moreover, physically separating an exemplary
puller cell 18a from the other puller cells 18 can
further reduce the propagation of magnetic fields from
puller cell 18a through the metal walls to the other
puller cells 18.
Crystal puller 28 comprises a pull chamber 42a into
which the grown single crystal is received, a furnace
tank 42b in which a semiconductor material is melted and
grown into a single crystal, and a mechanical unit 44,
positioned below furnace tank 42b, that contains
mechanical and electrical components that operate crystal
puller machine 28.
Puller cell 18 also includes a discontinuous multi¬
level floor 46 comprising an operator floor 48 positioned
at an operator level convenient to pull chamber 42a and a
maintenance floor 52 at a maintenance level convenient to
furnace tank 42b. Operator floor 48 is typically level
with the bottom of pull chamber 42a so that an operator
or a material handling device (not shown) can easily
access the pull chamber 42a. Such an operator floor 48
is particularly useful with crystal pullers 28 that use a
door-type pull chamber 42a. It will be understood that
ingots grown in crystal puller 28 can be quite large,
some being longer than two meters and weighing over one
hundred kilograms. Access to crystal puller 28 is
provided through two doors in puller cell 18, a
maintenance door 62 that opens onto the maintenance level
and an operator door 64 that opens onto the operator
level .
Fig. 3 shows that prefabricated ceiling unit 26
includes a filter housing 78 for housing high-efficiency
particulate air ("HEPA") filters 80, lighting fixtures
82, and fire-prevention sprinklers 84 all mounted on a
common ceiling grid 86. Grid 86 is mounted at the top of
walls 24, above crystal pulling machine 28 and below a
hall ceiling 16, and attached to a plenum 88 to provide
air flow. Electric power is supplied to grid 86 to
provide lighting within puller cell 18, and grid 86 is
attached to a water supply for use by fire-prevention
sprinklers 8 . Because ceiling units 26 are
prefabricated, the amount of heavy construction required
in growing hall 10 is reduced. By mounting ceiling units
26 on walls 24 of an appropriate height, puller cell 18
can accommodate crystal puller machines 28 of various
heights. Free ceiling 16 permits the use of walls 24 of
various heights, thereby providing flexibility in
constructing within a single growing hall 10 puller cells
18 that accommodate machines of different sizes,
including larger machines that may be required in the
future.
A bridge crane 94 is typically installed below
building trusses 92 and is used in the installation and
repair of crystal pullers 28 and in the construction of
puller cells 18. Bridge cranes are inevitably a source
of particulate contamination but, because bridge crane 94
is above ceiling unit 26, particles shed by bridge crane
94 do not contaminate the environment within crystal
puller cell 18.
Filtered air is supplied to HEPA filters 80 in
ceiling unit 26 by plenum 88. The airflow within each
puller cell 18 is individually controlled by airflow
control circuitry 98 within a control unit 100 (Fig. 4) ,
airflow control circuitry 98 controlling an air supply
system comprising variable airflow dampers 104 and a
variable frequency motor 106 in an air handler unit 102
to produce an appropriate airflow at any particular time.
Airflow control circuitry 98, an air handler unit ("AHU")
102, variable air flow dampers 104, an airborne particle
counter 131, and HEPA filters 80 together comprise an
adjustable air contamination control system 108.
In one embodiment, a low airflow mode is used when
puller cell 18 is idle or is being cleaned. A moderate
airflow rate is used when crystal puller 28 is operating
with the pull chamber 42a and furnace tank 42b closed. A
high airflow rate is used when maximum cleanliness is
required, i.e., when raw material is being loaded or a
single crystal is being unloaded. A purge airflow rate,
which is greater than the high airflow rate, is used to
purge the interior of puller cell 18 after it has been
contaminated. Each airflow operation made at each puller
cell 18 is controlled by a status signal from a
controller 29 of crystal puller 28 and by an airborne
particle counter 131 or other device which indicates the particle level in the puller cell.
Referring to Fig. 1, the area within growing hall 10
is divided into puller cells 18, clean aisles 114, and
maintenance aisles 116. Puller cell maintenance door 62
opens onto maintenance aisle 116, and operator door 64
opens onto clean aisle 114. A relatively high degree of
cleanliness is maintained in clean aisles 114, which are
used to bring raw materials and finished products to and
from puller cell 18. The raw material typically
comprises ultrapure polycrystalline silicon, precharged
in a quartz crucible; the finished product is typically a
single crystal silicon ingot. A lower degree of
cleanliness is maintained in maintenance aisle 116, which
is used by maintenance workers to maintain crystal puller
28. To maintain their cleanliness, clean aisles 114 have
clean aisle ceilings 118 (Fig. 2) at a suitable height
120 with particulate filters 121 that continuously
provide filtered air to clean aisles 114. Ceiling height
120 is typically much lower than that of a prior art
growing hall, so less airflow is needed to maintain the
required level of cleanliness .
Control unit 100 includes logic circuitry 122 that
controls locks 124 and 126 on respective doors 62 and 64
to eliminate cross contamination among puller cell 18,
clean aisle 114, and maintenance aisle 116. Logic
circuitry 122 prohibits opening either door when
conditions within puller cell 18 do not match those
outside that door. For example, if puller cell 18 is
operating in a high flow mode to obtain a high degree of
cleanliness or if puller cell 18 is operating in a
moderate airflow mode to obtain a medium degree of
cleanliness, logic circuitry 122 will prevent first door 62 from opening onto maintenance aisle 116. Similarly,
if puller cell 18 is operating in a low flow mode and
first door 62 is opened, logic circuitry 122 will prevent
second door 64 from opening onto clean aisle 114. Logic
circuitry 122 also prevents first and second doors 62 and
64 from being opened simultaneously. Furthermore,
airborne particle counters 131 monitor particle level in
puller cells 18. Logic circuitry 122 has a data
interface with airborne particle counter 131 and prevents
second door 64 from opening onto clean aisle 114 unless
the particle level in puller cell 18 is compatible with
that of clean aisle 114. Also, logic circuitry 122
prohibits opening either door while a magnet device in
the puller cell is energized. This feature can keep
operators away from areas in which a strong magnetic field is present.
Fig. 5 shows schematically a remote control console
136 for controlling several puller cells 18 within a bay
138. Remote control 136 is located in clean aisle 114
and electrically connected by conductors 139 to
individual puller controller 29 through control consoles
140 positioned adjacent to each crystal puller cell 18.
A television camera 142 located within each puller cell
18 transmits images of the conditions within each crystal
puller 28 to an operator, who can observe the images on a
video display by remote console control 136.
By allowing the operator to monitor multiple crystal
pullers 28 from one location, the operator's productivity
is greatly increased. By eliminating the requirement for
operators to move among the crystal pullers 28 to monitor
the pulling operations, much of the particulate
contamination caused by the operators is eliminated. The
operator is also removed from magnetic fields used in any
of the puller cells 18. Because remote control console
136 is located in clean aisle 114, the operator can
quickly proceed to an individual puller cell 18, when
remote control console 136 indicates such a visit is
required.
By individually controlling the environment
surrounding each crystal puller machine 28, the present
invention allows the areas in growing hall 10 to maintain
appropriate cleanliness while reducing the overall
facilities cost. Because smaller areas are kept clean,
the cost of providing the necessary flow of filtered and
conditioned air to maintain the cleanliness level is much
less expensive, and those smaller areas can be maintained
in a cleaner condition. Adjusting the airflow to a level
appropriate to the activity with puller cell 18 further
reduces costs.
Additional crystal puller machines 28 can be added
while previously installed machines continue operating
without contamination, thereby allowing flexibility in
scheduling installation of new machines. It is more
effective to invest capital in crystal pullers and puller
cells only as required to meet production schedules.
It will be obvious that many changes may be made to
the above-described details of the invention without
departing from the underlying principles thereof. For
example, a puller cell 18 could also accommodate two or
more crystal pullers 28. Such an arrangement would
increase operating costs, but reduce construction costs.
Puller cell 18 could be divided by an internal wall into
a maintenance area, defined by maintenance floor 52, and
an operator area, defined by operator floor 48, with the
environments of the maintenance and operator areas being
separately controllable. The scope of the present
invention should, therefore, be determined only by the
following claims.