CRYSTAL MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURED USING SAME, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SAME

Title:

CRYSTAL MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURED USING SAME, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SAME

Document Type and Number:

WIPO Patent Application WO/2010/023937

Kind Code:

A1

Abstract:

Provided is a crystal manufacturing apparatus capable of manufacturing a crystal in a desired position on a substrate. One end of a spring (2) is fixed to a rack (1) and the other end thereof is coupled to a magnetic body (3). One end of the magnetic body (3) is coupled to the spring and the other end thereof is coupled to a piston (6). A coil (4) is wound around the magnetic body (3) and electrically connected between a power supply circuit (5) and a ground node (GND). The piston (6) comprises a straight member (61) inserted into a cylinder (7). The cylinder (7) has a hollow columnar shape and comprises a small hole (71) in the bottom surface (7B) thereof. The cylinder (7) holds a silicon melt (13). A substrate (11) is supported by an XY stage (12) so as to face the small hole (71) of the cylinder (7). The power supply circuit (5) feeds a pulsed current to the coil (4) to move the piston (6) in a vertical direction (DR1). As a result, a droplet (14) is ejected from the small hole (71) toward the substrate (11) at an initial speed of 1.02 m/s.

Inventors:

HIGASHI, Seiichiro (HIROSHIMA UNIVERSITY 3-1, Kagamiyama 1-chome, Higashihiroshima-sh, Hiroshima 30, 〒7398530, JP)
東清一郎 (〒30 広島県東広島市鏡山一丁目３番１号国立大学法人広島大学大学院先端物質科学研究科内 Hiroshima, 〒7398530, JP)

Application Number:

JP2009/004209

Publication Date:

March 04, 2010

Filing Date:

August 28, 2009

Export Citation:

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Assignee:

HIROSHIMA UNIVERSITY (3-2 Kagamiyama 1-chome, Higashihiroshima-shi Hiroshima, 11, 〒7398511, JP)
国立大学法人広島大学 (〒11 広島県東広島市鏡山一丁目３番２号 Hiroshima, 〒7398511, JP)
HIGASHI, Seiichiro (HIROSHIMA UNIVERSITY 3-1, Kagamiyama 1-chome, Higashihiroshima-sh, Hiroshima 30, 〒7398530, JP)

International Classes:

C30B29/06; C01B33/02; C30B28/06; H01L21/208; H01L21/336; H01L29/786; H01L31/04

Attorney, Agent or Firm:

MATSUYAMA, Takao (Intelix International, Aqua Dojima West 4-16, Dojimahama 1-chome, Kita-ku, Osaka-sh, Osaka 04, 〒5300004, JP)

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