Title:
CRYSTAL ORIENTATION MAP GENERATION DEVICE, CHARGED PARTICLE RADIATION DEVICE, CRYSTAL ORIENTATION MAP GENERATION METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2019/082976
Kind Code:
A1
Abstract:
A crystal orientation map generation device (10) that is used in a charged particle radiation device (100) in which charged particle radiation is made incident to the surface of a sample, and that generates a crystal orientation map, which is a map representing the crystal coordinate system of a crystal at a selected position on the sample surface with respect to the incident direction of the charged particle radiation, said device (10) comprising: an orientation information acquisition unit (1) that acquires orientation information for the crystal at the selected position with respect to the incident direction; an incident direction information acquisition unit (2) that acquires information pertaining to the incident direction of charged particle radiation with respect to the sample; and a crystal orientation map generation unit (3) that, on the basis of the crystal orientation information acquired by the orientation information acquisition unit (1), the information pertaining to the incident direction acquired by the incident direction information acquisition unit (2) when the crystal orientation information was acquired and information pertaining to a post-change incident direction acquired by the incident direction information acquisition unit (2), generates a crystal orientation map in the post-change incident direction at the selected position.
Inventors:
AMINO TAKAFUMI (JP)
MORI TAKASHIGE (JP)
MARUYAMA NAOKI (JP)
MORI TAKASHIGE (JP)
MARUYAMA NAOKI (JP)
Application Number:
PCT/JP2018/039705
Publication Date:
May 02, 2019
Filing Date:
October 25, 2018
Export Citation:
Assignee:
NIPPON STEEL CORP (JP)
International Classes:
G01N23/2055; G01N23/203; G01N23/2251; H01J37/26; H01J37/28
Domestic Patent References:
| WO2015121603A1 | 2015-08-20 |
Foreign References:
| JP2014192037A | 2014-10-06 | |||
| JP2003121394A | 2003-04-23 | |||
| US5557104A | 1996-09-17 | |||
| JP2016139513A | 2016-08-04 | |||
| JP2018022592A | 2018-02-08 |
Other References:
JEOL NEWS (JAPANESE, vol. 43, 2011, pages 7 - 12
KENBIKYO, vol. 48, no. 3, 2013, pages 216 - 220
KENBIKYO, vol. 48, no. 3, 2013, pages 216 - 220
Attorney, Agent or Firm:
BRIGHTAS IP ATTORNEYS (JP)
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