CRYSTAL OSCILLATOR PIECE AND METHOD FOR MANUFACTURING THE SAME

WIPO Patent Application WO/2008/117891

A1

A crystal oscillator piece in which generation of leakage oscillation is suppressed, and its manufacturing method. The method for manufacturing a crystal oscillator piece comprises a step for forming a first etching mask on the surface of a crystal wafer and forming a second etching mask on the backside thereof, dipping the crystal wafer in etching solution, and dissolving the crystal at a part not covered with the first etching mask and the second etching mask to form an oscillation leg, and characterized in that the length of a first projection projecting from a position corresponding to the first end of the first etching mask is set, in the second etching mask, such that the first residue formed on the first side face side becomes constant regardless of positional shift of the first and second etching masks, and the first and second etching masks regulate the second residue formed on the second side face side such that one of two main axes passing the centroid and intersecting a cross-section orthogonal to the longitudinal direction of the oscillation leg dynamically and perpendicularly is formed substantially in parallel with the surface or the backside of the crystal wafer.

KATOH AKIKO (JP)
MORIYA TAKASHI (JP)

PCT/JP2008/056537

October 02, 2008

March 26, 2008

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CITIZEN HOLDINGS CO LTD (JP)
KATOH AKIKO (JP)
MORIYA TAKASHI (JP)

H03H9/215; G01C19/56; H01L41/09; H01L41/18; H01L41/22; H01L41/332; H03H3/02; H03H9/19; H01L21/306

JP2005277482A	2005-10-06
JP2006217497A	2006-08-17
JP2006214779A	2006-08-17
JP2006269738A	2006-10-05

AOKI, Atsushi et al. (Toranomon 37 Mori Bldg.5-1, Toranomon 3-chome,Minato-k, Tokyo 23, JP)

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