Title:
CRYSTAL PULLING FURNACE AND METHOD FOR PULLING SINGLE CRYSTAL SILICON ROD, AND SINGLE CRYSTAL SILICON ROD
Document Type and Number:
WIPO Patent Application WO/2023/130780
Kind Code:
A1
Abstract:
A crystal pulling furnace and method for pulling a single crystal silicon rod, and a single crystal silicon rod. The crystal pulling furnace comprises a cylindrical heating device located above a water cooling jacket, wherein the heating device is configured such that a single crystal silicon rod can enter a heat treatment chamber defined by the heating device for heat treatment when the single crystal silicon rod moves upwardly in a vertical direction; and a cylindrical cooling device arranged above the heating device, wherein the cooling device is configured such that a heated single crystal silicon rod can enter a cooling chamber defined by the cooling device for cooling treatment when the single crystal silicon rod continues moving upwardly in the vertical direction.
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Inventors:
SONG ZHENLIANG (CN)
SONG SHAOJIE (CN)
SONG SHAOJIE (CN)
Application Number:
PCT/CN2022/122976
Publication Date:
July 13, 2023
Filing Date:
September 30, 2022
Export Citation:
Assignee:
XI’AN ESWIN MATERIAL TECH CO LTD (CN)
International Classes:
C30B15/00; C30B29/06
Foreign References:
| CN114318500A | 2022-04-12 | |||
| US5264189A | 1993-11-23 | |||
| US20100127354A1 | 2010-05-27 | |||
| CN1206755A | 1999-02-03 | |||
| CN110735179A | 2020-01-31 |
Attorney, Agent or Firm:
DRAGON INTELLECTUAL PROPERTY LAW FIRM (CN)
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