Title:
CRYSTALLINE ITO THIN FILM PREPARATION METHOD AND ON-CELL TOUCH PANEL PREPARATION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/051913
Kind Code:
A1
Abstract:
A crystalline ITO thin film preparation method and an On-cell touch panel preparation method. The crystalline ITO thin film preparation method is used for preparing a crystalline ITO thin film on a liquid crystal panel (1), comprising: by applying a deposition process, preparing a non-crystalline ITO thin film (2) on a surface of a color film substrate (12) facing away from a liquid crystal layer (13); and under a preset temperature, by applying an excimer laser anneal process, crystallizing the non-crystalline ITO thin film (2) to obtain a crystallized ITO thin film. The On-cell touch panel preparation method comprises the steps of preparing a touch sensing electrode layer (4), specifically comprising: by applying the deposition process, preparing the non-crystalline ITO thin film (2) on the surface of the color film substrate (12) facing away from the liquid crystal layer (13); by applying a photoetching process, etching the non-crystalline ITO thin film (2) to form a patterned touch sensing electrode (21); and under the preset temperature, by applying the excimer laser anneal process, crystallizing the non-crystalline ITO thin film (2) corresponding to patterned touch sensing electrode (21) to form the crystallized ITO thin film.
Inventors:
LV SHAOQING (CN)
Application Number:
PCT/CN2017/105812
Publication Date:
March 21, 2019
Filing Date:
October 12, 2017
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
G02F1/1343; G02F1/1333
Foreign References:
CN101645336A | 2010-02-10 | |||
CN105103093A | 2015-11-25 | |||
US20020016075A1 | 2002-02-07 | |||
CN1866092A | 2006-11-22 |
Attorney, Agent or Firm:
MING & YUE INTELLECTUAL PROPERTY LAW FIRM (CN)
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