Title:
CURABLE COMPOSITION FOR IMPRINTING, CURED PRODUCT, IMPRINTING PATTERN PRODUCTION METHOD, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/176778
Kind Code:
A1
Abstract:
Provided are: a curable composition for imprinting, the curable composition containing a polymerizable compound and a polymerization initiator, wherein one of the components contained in said composition is a compound including a 5-membered ring structure having at least two heteroatoms as ring members; a cured product of said curable composition for imprinting; an imprinting pattern production method using said curable composition for imprinting; and a device manufacturing method involving said imprinting pattern production method.
Inventors:
SHIMOJU NAOYA (JP)
SHIBUYA AKINORI (JP)
SHIBUYA AKINORI (JP)
Application Number:
PCT/JP2022/005427
Publication Date:
August 25, 2022
Filing Date:
February 10, 2022
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
C08F2/44; B29C59/02; C08F2/50; H01L21/027
Domestic Patent References:
| WO2017170697A1 | 2017-10-05 | |||
| WO2020175301A1 | 2020-09-03 |
Foreign References:
| JP2010114209A | 2010-05-20 | |||
| JP2013245229A | 2013-12-09 | |||
| JP2008105414A | 2008-05-08 | |||
| US8540888B1 | 2013-09-24 |
Attorney, Agent or Firm:
SIKs & Co. (JP)
Download PDF:
Previous Patent: CERAMIC CIRCUIT BOARD AND SEMICONDUCTOR DEVICE USING SAME
Next Patent: INFORMATION PROCESSING DEVICE AND PROGRAM
Next Patent: INFORMATION PROCESSING DEVICE AND PROGRAM