Title:
CURRENT CONTROL ELEMENT, MEMORY ELEMENT, MEMORY DEVICE, AND PRODUCTION METHOD FOR CURRENT CONTROL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2011/114666
Kind Code:
A1
Abstract:
Provided is a current control element that is able to prevent the occurrence of a write disturb even when electrical pulses with different polarities are applied, and that is able to apply a large current to a variable resistance element. The current control element is provided with a first electrode (32), a second electrode (31), and a current control layer (33). The current control layer (33) is composed of SiNx (0 < x ≤ 0.85), and contains hydrogen or fluorine. When the concentration of the hydrogen or fluorine is regarded as D (= D0 × 1022 atoms/cm3), the thickness of the current control layer (33) is regarded as d (nm), and the maximum voltage that can be applied between the first electrode (32) and the second electrode (31) is regarded as V0 (V), D, x, d and V0 satisfy (ln(10000(Cexp(αd)exp(βx))-1)/γ)2 ≤ V0, (ln(1000(Cexp(αd)exp(βx))-1)/γ)2 - (ln(10000(Cexp(αd)exp(βx))-1)/γ)2/2 ≥ 0 (where C = k1 × D0
k2, α, β, γ, k1 and k2 are constants).
Inventors:
HAYAKAWA, Yukio (())
早川 幸夫 (())
ARITA, Koji (())
有田 浩二 (())
早川 幸夫 (())
ARITA, Koji (())
有田 浩二 (())
Application Number:
JP2011/001401
Publication Date:
September 22, 2011
Filing Date:
March 10, 2011
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
HAYAKAWA, Yukio (())
早川 幸夫 (())
ARITA, Koji (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
HAYAKAWA, Yukio (())
早川 幸夫 (())
ARITA, Koji (())
International Classes:
H01L49/02; H01L27/105; H01L45/00; H01L49/00
Attorney, Agent or Firm:
NII, Hiromori (6F,Tanaka Ito Pia Shin-Osaka Bldg.,,3-10, Nishi Nakajima 5-chome, Yodogawa-ku,,Osaka-cit, Osaka 11, 〒5320011, JP)
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Claims:
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