Title:
CURRENT CONTROL ELEMENT, MEMORY ELEMENT, MEMORY DEVICE, AND PRODUCTION METHOD FOR CURRENT CONTROL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2011/114666
Kind Code:
A1
Abstract:
Provided is a current control element that is able to prevent the occurrence of a write disturb even when electrical pulses with different polarities are applied, and that is able to apply a large current to a variable resistance element. The current control element is provided with a first electrode (32), a second electrode (31), and a current control layer (33). The current control layer (33) is composed of SiNx (0 < x ≤ 0.85), and contains hydrogen or fluorine. When the concentration of the hydrogen or fluorine is regarded as D (= D0 × 1022 atoms/cm3), the thickness of the current control layer (33) is regarded as d (nm), and the maximum voltage that can be applied between the first electrode (32) and the second electrode (31) is regarded as V0 (V), D, x, d and V0 satisfy (ln(10000(Cexp(αd)exp(βx))-1)/γ)2 ≤ V0, (ln(1000(Cexp(αd)exp(βx))-1)/γ)2 - (ln(10000(Cexp(αd)exp(βx))-1)/γ)2/2 ≥ 0 (where C = k1 × D0
k2, α, β, γ, k1 and k2 are constants).
Inventors:
HAYAKAWA YUKIO
ARITA KOJI
MIKAWA TAKUMI
NINOMIYA TAKEKI
ARITA KOJI
MIKAWA TAKUMI
NINOMIYA TAKEKI
Application Number:
PCT/JP2011/001401
Publication Date:
September 22, 2011
Filing Date:
March 10, 2011
Export Citation:
Assignee:
PANASONIC CORP (JP)
HAYAKAWA YUKIO
ARITA KOJI
MIKAWA TAKUMI
NINOMIYA TAKEKI
HAYAKAWA YUKIO
ARITA KOJI
MIKAWA TAKUMI
NINOMIYA TAKEKI
International Classes:
H01L49/02; H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
| WO2010004675A1 | 2010-01-14 |
Foreign References:
| JP2008511036A | 2008-04-10 | |||
| JPH07175419A | 1995-07-14 | |||
| JPH05235040A | 1993-09-10 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house Extensive 守 (JP)
New house Extensive 守 (JP)
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