Title:
CURRENT CONTROL ELEMENT AND NONVOLATILE MEMORY ELEMENT USING SAME
Document Type and Number:
WIPO Patent Application WO/2012/035786
Kind Code:
A1
Abstract:
A current control element (100) that is formed so as to cover the bottom opening (105) of a via hole (104) formed in an interlayer insulating layer (102) includes: a corrosion inhibiting layer (106) formed at the bottom of the bottom opening of the via hole so as to cover the entire bottom opening; a second electrode layer (108) formed below the corrosion inhibiting layer and made of a different material from the corrosion inhibiting layer; a current control layer (110) that is formed below and in physical contact with the second electrode layer; and a first electrode layer (112) that is formed below and in physical contact with the current control layer. The first electrode layer, the current control layer, and the second electrode layer constitute either an MSM diode or an MIM diode.
Inventors:
MIYANAGA, Ryoko (())
宮永 良子 (())
MIKAWA, Takumi (())
三河 巧 (())
HAYAKAWA, Yukio (())
宮永 良子 (())
MIKAWA, Takumi (())
三河 巧 (())
HAYAKAWA, Yukio (())
Application Number:
JP2011/005262
Publication Date:
March 22, 2012
Filing Date:
September 16, 2011
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
MIYANAGA, Ryoko (())
宮永 良子 (())
MIKAWA, Takumi (())
三河 巧 (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
MIYANAGA, Ryoko (())
宮永 良子 (())
MIKAWA, Takumi (())
三河 巧 (())
International Classes:
H01L49/02; H01L27/105; H01L45/00; H01L49/00
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (3rd Fl, Bo-eki Bldg. 123-1 Higashimachi, Chuo-ku, Kobe-sh, Hyogo 31, 〒6500031, JP)
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Claims: