Title:
CURRENT INTRODUCTION TERMINAL AND PRESSURE HOLDING DEVICE EQUIPPED WITH SAME, AND X-RAY IMAGE CAPTURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/073936
Kind Code:
A1
Abstract:
A current introduction terminal for introducing electric current into a chamber while maintaining airtightness of the chamber is provided, in which a printed substrate (SUB) comprising an insulating substrate made of resin is used as a dividing wall dividing environments of the inside and outside of the chamber. A current introduction substrate (110) is produced by providing the printed substrate with a through-via hole (131, 132) penetrating through between a first surface (SF1) and a second surface (SF2), filling the opening of the through-via hole with a resin material (133), and then forming metal pads (PD1, PD2) on the surfaces so as to cover the opening.
Inventors:
MATSUDA YUJI (JP)
KAMESHIMA TAKASHI (JP)
SUGATA OSAMI (JP)
TOSUE TOSHIAKI (JP)
KAMESHIMA TAKASHI (JP)
SUGATA OSAMI (JP)
TOSUE TOSHIAKI (JP)
Application Number:
PCT/JP2018/037464
Publication Date:
April 18, 2019
Filing Date:
October 05, 2018
Export Citation:
Assignee:
RIKEN (JP)
International Classes:
H01J5/42; G01T7/00; H05K1/11
Domestic Patent References:
| WO2012144326A1 | 2012-10-26 | |||
| WO2014061202A1 | 2014-04-24 |
Foreign References:
| JPH02137764U | 1990-11-16 | |||
| JP2014011288A | 2014-01-20 | |||
| US9591770B2 | 2017-03-07 |
Other References:
"PCB Mounted Epoxy Vacuum Feedthroughs", 19 April 2017, BELILOVE COMPANY-ENGINEERS
Attorney, Agent or Firm:
SANO PATENT OFFICE (JP)
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