Title:
CURRENT MEASURING APPARATUS AND CURRENT MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2006/070697
Kind Code:
A1
Abstract:
A current measuring apparatus and a current measuring method, by which a minute current flowing in a measuring sample such as a semiconductor substrate can be measured with low noise and in a wide frequency band by probe irradiation of an electronic beam and the like. The current measuring apparatus includes a probe irradiation section for irradiating the sample with the probe, and a current amplifying circuit, which has a switched capacitor configuration wherein the circuit is electrically connected with the measuring sample and amplifies the current which flows in the measuring sample when the measuring sample is irradiated with the probe.
Inventors:
YAMADA KEIZO (JP)
Application Number:
PCT/JP2005/023647
Publication Date:
July 06, 2006
Filing Date:
December 22, 2005
Export Citation:
Assignee:
FAB SOLUTIONS INC (JP)
YAMADA KEIZO (JP)
YAMADA KEIZO (JP)
International Classes:
G01R31/307; G01R19/00; H01L21/66
Foreign References:
| JP2003185605A | 2003-07-03 | |||
| JPH01286513A | 1989-11-17 | |||
| JPH11234088A | 1999-08-27 | |||
| JPH0862248A | 1996-03-08 | |||
| JP2004222018A | 2004-08-05 | |||
| JP2002151599A | 2002-05-24 |
Attorney, Agent or Firm:
Shiga, Masatake (Yaesu Chuo-k, Tokyo 53, JP)
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