Title:
CURRENT VARIATION MEASURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/114944
Kind Code:
A1
Abstract:
A current variation measuring apparatus (1) comprises a voltage source (30) for energizing a measured material (10) including a semiconductor circuit; a beam irradiating means (20) for irradiating a laser beam onto the measured material (10) by causing the laser beam to scan it; and a current/voltage converting means (40) for measuring the amount of current variation, which is caused by the beam irradiation, in the measured material (10) which is energized by the voltage source (30) and to which the laser beam is irradiated by the beam irradiating means (20). The current/voltage converting means (40) has an amplifier (41) having an input terminal connected to the measured material (10), and also has a transformer (42) connected between the output and input terminals of the amplifier (41). In this case, since the current/voltage converting means uses the transformer, the amount of current variation caused by the beam irradiation can be selected from among the currents flowing into the current/voltage converting means and can be converted to a voltage for detection. This allows the amount of current variation to be measured with high precision even for a measured material that exhibits a large resting current.
Inventors:
Iida, Hitoshi c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Nakajima, Yuji c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Kumagai, Michiko c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Nakajima, Yuji c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Kumagai, Michiko c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Application Number:
PCT/JP2006/304747
Publication Date:
November 02, 2006
Filing Date:
March 10, 2006
Export Citation:
Assignee:
HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Hamamatsu-sh, Shizuoka 58, 43585, JP)
Iida, Hitoshi c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Nakajima, Yuji c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Kumagai, Michiko c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Iida, Hitoshi c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Nakajima, Yuji c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
Kumagai, Michiko c/o Hamamatsu Photonics K.K. (1126-1 Ichino-cho, Hamamatsu-sh, Shizuoka 58, 43585, JP)
International Classes:
G01R31/311; G01R19/12
Attorney, Agent or Firm:
Hasegawa, Yoshiki (SOEI PATENT AND LAW FIRM, Ginza First Bldg. 10-6, Ginza 1-chome, Chuo-k, Tokyo 61, 10400, JP)
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