Title:
CURVED GRATING MANUFACTURING METHOD, CURVED GRATING, GRATING UNIT, AND X-RAY IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/060093
Kind Code:
A1
Abstract:
An aspect of the invention is a method for manufacturing a curved grating, comprising: a grating forming step for forming a grating area on one surface of a grating-forming base material, said grating area being an area wherein a plurality of members having the same shape are periodically arranged; a stress layer forming step for forming a stress layer which causes stress on the grating surface of the grating area; a bonding step for bonding a supporting substrate on the stress layer; a polishing step for polishing the other surface of the grating-forming base material, which is on the reverse side from the one surface, when the grating-forming base material has the supporting substrate bonded thereto; and a stripping step for stripping the supporting substrate from the stress layer. The polishing step is performed so that the grating-forming base material curves from the stress caused by the stress layer after the stripping step.
Inventors:
YOKOYAMA MITSURU (JP)
Application Number:
PCT/JP2014/076460
Publication Date:
April 30, 2015
Filing Date:
October 02, 2014
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
A61B6/00; G21K1/06; A61B6/06; C25D5/02; C25D7/00; C25D7/12; G01N23/04; G01N23/20; G01T7/00; G02B5/18
Foreign References:
| JP2013134196A | 2013-07-08 | |||
| JP2013120126A | 2013-06-17 | |||
| JP2014190778A | 2014-10-06 | |||
| JP2014190781A | 2014-10-06 | |||
| JP2011162854A | 2011-08-25 |
Other References:
See also references of EP 3054455A4
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
Etsuji Kotani (JP)
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