Title:
CYCLONE COLLECTOR
Document Type and Number:
WIPO Patent Application WO/2018/220896
Kind Code:
A1
Abstract:
[Problem] To allow particles in an intake gas to be reliably collected and to prevent the discharge of water mist. [Solution] This cyclone collector 12 is provided with: a container 21; a liquid film forming part 23 that forms a liquid film 40 inside the container 21; a gas intake hole 33 provided on a lid part 32; and a discharge pipe 24b. The gas intake hole 33 extends downward with respect to an orthogonal plane 21B that is orthogonal to an axis 21A of the container 21, and an opening 33a of the gas intake hole 33 opens to a region other than the liquid film 40. The intake gas from the gas intake hole 33 jets out toward the liquid film 40.
Inventors:
TAMURA AKITAKE (JP)
Application Number:
PCT/JP2018/002617
Publication Date:
December 06, 2018
Filing Date:
January 29, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B04C5/04; B01D47/00; B04C11/00; G01N1/02
Foreign References:
| JP2015224991A | 2015-12-14 | |||
| JP2015217325A | 2015-12-07 | |||
| JPH0453464U | 1992-05-07 | |||
| JP2015174073A | 2015-10-05 | |||
| JP2006314917A | 2006-11-24 | |||
| JPH06126215A | 1994-05-10 | |||
| JP2015224992A | 2015-12-14 | |||
| JP2002543975A | 2002-12-24 | |||
| JPH0477096U | 1992-07-06 | |||
| JP2002543975A | 2001-10-05 |
Other References:
See also references of EP 3632571A4
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
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