Title:
CYLINDER, PLASMA DEVICE, GAS LASER DEVICE, AND METHOD FOR MANUFACTURING CYLINDER
Document Type and Number:
WIPO Patent Application WO/2015/115624
Kind Code:
A1
Abstract:
Provided is a cylinder characterized in having a first cylinder body in which the inner surface is exposed and a second cylinder body joined to the outer surface of the first cylinder body, the second cylinder body having alumina as the main component, and the first cylinder body having an yttrium-containing oxide as the main component.
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Inventors:
NOGUCHI YUKIO (JP)
Application Number:
PCT/JP2015/052768
Publication Date:
August 06, 2015
Filing Date:
January 30, 2015
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01S3/03
Foreign References:
| JPS59227183A | 1984-12-20 | |||
| JP2009176459A | 2009-08-06 | |||
| JP2004296910A | 2004-10-21 | |||
| JP2002192655A | 2002-07-10 | |||
| JP2006128603A | 2006-05-18 | |||
| JP2000191370A | 2000-07-11 | |||
| JPH1045461A | 1998-02-17 | |||
| JP2008156160A | 2008-07-10 | |||
| JPH02289306A | 1990-11-29 | |||
| JPH02159356A | 1990-06-19 | |||
| JP2015048273A | 2015-03-16 |
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