Title:
DATA ANALYSIS DEVICE, DATA ANALYSIS METHOD, PROGRAM, AND RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2022/230112
Kind Code:
A1
Abstract:
This data analysis device comprises: an input unit that receives measured values of a photoelectron signal from a photoelectron spectroscopy device measuring the photoelectron signal that is produced from a sample by photoelectron spectroscopy; and an analysis unit that analyzes a depth profile of the sample, by using theoretical values of the photoelectron signal for when the sample is modeled as a layered body that comprises a plurality of layers, and minimizing the sum of squared deviations between the theoretical values of the photoelectron signal and the measured values of the photoelectron signal. When minimizing the sum of squared deviations, the analysis unit calculates the relative concentrations of chemical species in the sample so as to satisfy a maximum smoothing condition, which states that the relative concentrations vary smoothly between the plurality of layers of the layered body.
Inventors:
HOSHINA YUTAKA (JP)
TOKUDA KAZUYA (JP)
SAITO YOSHIHIRO (JP)
TOKUDA KAZUYA (JP)
SAITO YOSHIHIRO (JP)
Application Number:
PCT/JP2021/016993
Publication Date:
November 03, 2022
Filing Date:
April 28, 2021
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
International Classes:
G01N23/2273
Foreign References:
| JP2006343244A | 2006-12-21 | |||
| JP2017054915A | 2017-03-16 | |||
| US20110210246A1 | 2011-09-01 | |||
| US5280176A | 1994-01-18 |
Other References:
YONAMOTO YOSHIKI: "Application of Maximum Entropy Method to Semiconductor Engineering", ENTROPY, vol. 15, no. 12, 1 January 2013 (2013-01-01), pages 1663 - 1689, XP093002408, DOI: 10.3390/e15051663
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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