Title:
DATA GENERATION SYSTEM AND DATA GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2014/050207
Kind Code:
A1
Abstract:
In accordance with a specification for a substrate processing apparatus, to generate high-quality configuration data for operating the substrate processing apparatus with fewer manufacturing steps. The invention is provided with: a storage unit which hierarchically structures and stores a plurality of mutually different specifications and a plurality of mutually different configuration data units, and stores relatedness information indicating relatedness between levels of the specifications and the configuration data units; a specification acquisition unit which acquires a specification for a substrate processing apparatus; and a data generation unit which selects configuration data units corresponding to the specification acquired by the specification acquisition unit, on the basis of the relatedness information, from the plurality of configuration data units, and generates configuration data units for operating the substrate processing apparatus having the specification acquired at the specification acquisition unit.
Inventors:
FURUTA TOMOYASU (JP)
Application Number:
PCT/JP2013/065014
Publication Date:
April 03, 2014
Filing Date:
May 30, 2013
Export Citation:
Assignee:
DAINIPPON SCREEN MFG (JP)
International Classes:
G05B19/042; G06F9/44; H01L21/027
Foreign References:
| JP2002015968A | 2002-01-18 | |||
| JP2000148221A | 2000-05-26 | |||
| JP2002342083A | 2002-11-29 | |||
| JPH06222911A | 1994-08-12 |
Attorney, Agent or Firm:
FURIKADO, Shoichi et al. (JP)
Swing angle Shoichi (JP)
Swing angle Shoichi (JP)
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