Title:
DEBRIS REDUCTION DEVICE AND LIGHT SOURCE DEVICE PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2024/004381
Kind Code:
A1
Abstract:
The present invention provides a debris reduction device that enables the enhancement of debris capturing probability, and a light source device provided with the debris reduction device. The debris reduction device according to an embodiment of the present technology is equipped with a fixed foil trap. The fixed foil trap includes a housing body, a plurality of pieces of foil, an inlet hole, and a pressure increasing mechanism. The housing body includes: an entry port through which light emitted from a light source enters; an exit port through which the light that entered through the entry port exits; and an internal space through which the light travels. The plurality of pieces of foil are fixed in a region of the internal space through which the light travels. The inlet hole is configured in the housing body so as to communicate with the internal space, and a transparent gas, transparent to light, flows into the inlet hole. The pressure increasing mechanism increases the pressure of the internal space, and includes at least one of the following: an entry-side member disposed on the entry port so that an opening area of the entry port is reduced without blocking the traveling of the light; and an exit-side member that is disposed on the exit port so that the opening area of the exit port is reduced without blocking the traveling of the light.
Inventors:
ASHIZAWA NORITAKA (JP)
YABUTA HIRONOBU (JP)
YABUTA HIRONOBU (JP)
Application Number:
PCT/JP2023/017355
Publication Date:
January 04, 2024
Filing Date:
May 09, 2023
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2017219698A | 2017-12-14 | |||
| JP2008235754A | 2008-10-02 | |||
| JP2005505945A | 2005-02-24 |
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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