Title:
DEEP ULTRAVIOLET LASER GENERATION DEVICE AND LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/174388
Kind Code:
A1
Abstract:
An embodiment of the present invention provides a deep ultraviolet laser generation device (1000) equipped with: a first laser light source (100) having a first wavelength of 1.87-2.1 μm; a second laser light source (200) having a second wavelength of 1.53-1.57 μm; a nonlinear wavelength conversion element (3) that generates a near-infrared light (31) having a wavelength of 841-899 nm by means of a sum frequency mixing process; a nonlinear waveform conversion element (4) that generates a blue light (41) having a wavelength of 420-450 nm from the near-infrared light by means of a second harmonic generation process; and a third nonlinear waveform conversion element (5) that generates a deep ultraviolet light (51) having a wavelength of 210-225 nm from the blue light by means of another second harmonic generation process. The first laser light source can be a thulium-doped laser light source or a thulium-doped fiber light source, and the second laser light source can be a semiconductor laser light source, an erbium-doped fiber light source, or an erbium/ytterbium-doped fiber light source.
Inventors:
KANEDA YUSHI (JP)
Application Number:
PCT/JP2015/063556
Publication Date:
November 19, 2015
Filing Date:
May 12, 2015
Export Citation:
Assignee:
OXIDE CORP (JP)
International Classes:
G02F1/37; H01S3/067; H01S3/10; H01S3/16
Foreign References:
| JP2011215472A | 2011-10-27 | |||
| JP2009513995A | 2009-04-02 | |||
| JP2013156448A | 2013-08-15 | |||
| JP2007086108A | 2007-04-05 | |||
| JPH11212127A | 1999-08-06 |
Attorney, Agent or Firm:
OKAMOTO, MASAYUKI (JP)
Masayuki Okamoto (JP)
Masayuki Okamoto (JP)
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