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Patent Searching and Data


Title:
DEFECT CLASSIFICATION DEVICE, INSPECTION DEVICE, AND INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/049387
Kind Code:
A1
Abstract:
The present invention addresses the problem of a film formation process in that a minute defect that an inspection before film formation (pre-inspection) has failed to detect becomes a larger film swelling due to film formation, and that, since the film swelling cannot be distinguished from an on-film defect, the film swelling is detected during an inspection after the film formation (post-inspection) as being an on-film defect that is on the film. In order to prevent the erroneous determination of the on-film defect, the sensitivity of the post-inspection has been reduced so that a film swelling due to a minute defect would not be detected. According to the present invention, classification is performed to determine whether a defect is at least one of an on-film defect and a film swelling, by performing a coordinate correction on the result of a post-inspection by means of an actual-defect fine alignment using the result of a pre-inspection performed with two-stage thresholds, and by checking defects against each other. In addition, classification is performed to determine whether a defect is at least one of an on-film defect and a film swelling by, during the post-inspection, preparing instruction data from information of the refractive index and thickness of a film formed on a wafer and comparing the instruction data with a signal intensity ratio of a detection system (see FIG. 1A).

Inventors:
KONDO Takanori (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
HONDA Toshifumi (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
HAMAMATSU Akira (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
OTA Hideo (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
KIMOTO Yoshio (24-14 Nishi Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
Application Number:
JP2017/032731
Publication Date:
March 14, 2019
Filing Date:
September 11, 2017
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
H01L21/66; G01N21/956
Foreign References:
JP2011013077A2011-01-20
JP2016212009A2016-12-15
JP2014048206A2014-03-17
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (Atago Green Hills MORI Tower 32F, 5-1 Atago 2-chome, Minato-k, Tokyo 32, 〒1056232, JP)
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