Title:
DEFECT DETECTING APPARATUS AND DEFECT DETECTING METHOD
Document Type and Number:
WIPO Patent Application WO/2008/015973
Kind Code:
A1
Abstract:
A defect inspecting apparatus inspects defects of a sample having a pattern formed
on the surface. The defect inspecting apparatus is provided with a stage (11)
which has a sample (10) placed thereon and linearly moves and turns; a light source
(1); an illuminating optical system, which selects a discretionary wavelength
region from the light source and epi-illuminates the sample surface through
a polarizer (7) and an objective lens (9); a detecting optical system, which obtains
a pupil image, by passing through reflection light applied by the illuminating
optical system from the surface of the sample through the objective lens (9) and
an analyzer (12) which satisfies the cross-nichols conditions with the polarizer;
and a detecting section which detects defects of the sample by comparing the obtained
pupil image with a previously stored pupil image. Conformity of the pattern
on a substrate to be inspected can be judged in a short time.
Inventors:
ENDO, Kazumasa (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
遠藤 一正 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
MOCHIDA, Daisaku (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
持田 大作 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
YOSHIKAWA, Toru (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
遠藤 一正 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
MOCHIDA, Daisaku (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
持田 大作 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
YOSHIKAWA, Toru (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
Application Number:
JP2007/064764
Publication Date:
February 07, 2008
Filing Date:
July 27, 2007
Export Citation:
Assignee:
NIKON CORPORATION (2-3 Marunouchi 3-Chome, Chiyoda-ku Tokyo, 31, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内三丁目２番３号 Tokyo, 1008331, JP)
ENDO, Kazumasa (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
遠藤 一正 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
MOCHIDA, Daisaku (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
持田 大作 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内三丁目２番３号 Tokyo, 1008331, JP)
ENDO, Kazumasa (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
遠藤 一正 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
MOCHIDA, Daisaku (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
持田 大作 (〒31 東京都千代田区丸の内３丁目２番３号 株式会社ニコン内 Tokyo, 1008331, JP)
International Classes:
G01N21/956; G01B11/30; H01L21/66
Attorney, Agent or Firm:
OKADA, FUSHIMI AND HIRANO, PC (NE Kudan Bldg, 2-7 Kudan-minami 3-chome,Chiyoda-k, Tokyo 74, 1020074, JP)
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